EP2886870B2 - Pompe à vide avec géométrie d'admission perfectionnée - Google Patents

Pompe à vide avec géométrie d'admission perfectionnée Download PDF

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Publication number
EP2886870B2
EP2886870B2 EP14196002.1A EP14196002A EP2886870B2 EP 2886870 B2 EP2886870 B2 EP 2886870B2 EP 14196002 A EP14196002 A EP 14196002A EP 2886870 B2 EP2886870 B2 EP 2886870B2
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
inlet
rotor
stage
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP14196002.1A
Other languages
German (de)
English (en)
Other versions
EP2886870A1 (fr
EP2886870B1 (fr
Inventor
Bernhard Koch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2886870A1 publication Critical patent/EP2886870A1/fr
Application granted granted Critical
Publication of EP2886870B1 publication Critical patent/EP2886870B1/fr
Publication of EP2886870B2 publication Critical patent/EP2886870B2/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4213—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps suction ports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump or vacuum pump stage with a housing which has at least one inlet.
  • Rotating sleeves have proven themselves in vacuum pumps, for example in the form of a Holweck pump stage.
  • One or a plurality of sleeves is fastened on one side to a hub, which in turn is arranged on a shaft.
  • a hub which in turn is arranged on a shaft.
  • Such a structure is shown, for example, by DE 10 2011 112 689 A1 .
  • the inlet is not as in the prior art ( DE 10 2011 112 689 A1 ) belonging pump axially to the shaft, but arranged radially to the shaft and the rotating sleeve, as shown in the EP 1 302 667 A1 is shown.
  • These prior art pumps or pump stages have the disadvantage that, given the probable direction of movement of a gas molecule, it may happen that the molecule does not enter the Holweck channels but leaves the suction area again in the direction of the recipient. This has a negative effect on the pumping speed.
  • EP 2 385 257 A2 includes a side channel pump stage with a scraper and a vacuum pump with a high vacuum pump stage, which can be designed as a Holweck or turbo molecular pump stage. This prior art vacuum pump can be further improved with regard to the pumping speed.
  • the technical problem on which the invention is based consists in specifying a vacuum pump or vacuum pump stage with a radially arranged inlet in which the pumping speed is increased while the size of the inlet remains unchanged.
  • the inventive design of the inlet and thus the suction opening influences the direction of movement of the molecules in such a way that they can no longer leave the suction flange of the pump or pump stage in the direction of the recipient and continue to remain in the pumping process.
  • the gas molecules that hit this inner wall are deflected in the direction of the rotating sleeve after hitting the inner wall and enter the vacuum pump or vacuum pump stage with a high degree of probability.
  • the number of gas molecules that do not enter the pumping area of the vacuum pump or vacuum pumping stage directly after an impact on the inner wall of the widening inlet is most likely fed to the pumping area of the vacuum pump or vacuum pumping stage, so that the pumping speed of the vacuum pump or vacuum pumping stage is thereby increased significantly increased.
  • the same principle also applies to the radial inlet into a turbomolecular pumping stage with counter-rotating rotor and stator disc blades, in this case the gas molecules are already admitted into the active pumping area with a preferred direction, so that the pumping speed increases here as well.
  • This inlet can be located both on the high vacuum side of the rotor in front of or in the area of the first rotor disk and in the further course of the active pumping structure at any point to form an additional inlet for a split-flow pump.
  • the configuration according to the invention not only increases the probability that a gas molecule will successfully enter the active pumping area, but also that a gas molecule that was already in the active pumping area is then returned to the active pumping area if it does not exit the active pumping area into the inlet channel so that it can still be conveyed and thus additionally increases the pumping speed becomes.
  • the vacuum pump has at least one Holweck step with a one-piece shaft and surrounding stator, with the conveying structure lying on one of the two parts, or at least one cross-thread Holweck step with a one-piece shaft, the conveying structure being a counter-rotating thread structure or a turbo rotor of a turbo pump, the conveying structure containing at least one turbo rotor disk and one turbo stator disk.
  • the embodiment according to the invention with the inlet widening in the direction of the shaft can be used particularly advantageously in these vacuum pumps.
  • the vacuum pump stage is designed as a Holweck stage with a one-piece shaft and surrounding stator, the conveying structure being on one of the two parts, or as a cross-thread Holweck stage with a one-piece shaft, the conveying structure being a represents opposite thread structure is formed.
  • the embodiment according to the invention with the inlet widening in the direction of the shaft can also be used particularly advantageously in these vacuum pump stages.
  • the inlet is designed as an inlet, which conducts a gas through the inlet channels of the rotor which are arranged in the direction of rotation of the rotor.
  • This embodiment has the advantage that the gas molecules entering through the suction opening are conveyed directly into the channels arranged in the direction of rotation of the rotor, for example a Holweck stator. This direct supply also increases the pumping speed of the vacuum pump or vacuum pump stage.
  • the inlet is designed to widen in the direction of rotation of the rotor.
  • the opposite side of the inlet flange can, as is known from the prior art, be partially cylindrical.
  • the inlet is designed to widen in cross section with a curved outer contour.
  • the inlet can also be designed to widen with a straight outer contour.
  • the curved outer contour has the advantage that the contour can be adapted in such a way that the gas molecules are most likely to be deflected in the direction of the rotating sleeve after an impact on the outer contour and not in the opposite direction.
  • the curved outer contour allows a smaller expansion of the inlet in the direction of the pump chamber than is the case with a straight outer contour.
  • the inlet can be designed to widen linearly conically in cross section. This embodiment is easy to manufacture and the pumping speed of the vacuum pump or vacuum pump stage is increased nonetheless.
  • the inlet is only designed to widen in the direction of rotation of the rotor. If the inlet is designed to widen only on the side which is arranged in the direction of rotation of the rotor, the costs for the widening design of the inlet are reduced.
  • the vacuum pump is advantageously designed as a molecular vacuum pump, in particular as a Holweck pump.
  • the design of the inlet flange according to the invention can be applied to Holweck pumping stages in which the active pumping surfaces are arranged in the stator.
  • the invention can also be applied to Holweck pump stages in which the active pumping structures are arranged on the sleeve, that is to say on the rotor.
  • the invention can also be applied to cross-thread Holweck pump stages in which active pumping structures are arranged on both the rotor and the stator.
  • the invention can also be applied to turbo-molecular pumping stages, in which the active pumping structure consists of rotor and stator blades.
  • Fig. 1 shows a longitudinal section through a vacuum pump 1 belonging to the prior art.
  • a suction opening 4 is provided in a housing 2 of the vacuum pump 1, through which gas is sucked into the vacuum pump 1. After the compression, the gas is expelled from the vacuum pump 1 through an outlet 6.
  • a rotor 10 is provided inside the vacuum pump 1 which, together with a stator 30, generates the pumping effect.
  • the rotor 10 has a shaft 12, the end of which facing the suction opening 4 is supported by a permanent magnetic bearing 14. The opposite end is supported by a roller bearing 16.
  • This bearing arrangement has the advantage over other types of bearings that are also possible, such as the floating bearing with roller bearings on the side opposite the intake opening, that a lubricant-free bearing is used on the intake side and narrow gaps and a shorter overall length are achieved due to the rotor-dynamically simpler bearing.
  • a permanent magnet 20 is provided on the shaft, which works together with a powered drive coil.
  • the rotor 10 is set to a sufficiently fast speed. This is measured according to the pumping principle used and, with molecular principles, is usually a few 10,000 revolutions per minute.
  • the stator 30 has one or a plurality of helical channels 30 on its surface facing the rotor.
  • a hub 40 is attached to the shaft 12. It has a first side 42 and a second side 44 opposite this first side 42. The second side 44 faces the suction opening.
  • a first sleeve 50 is attached to the first side and a second sleeve 52 to the second side. Both sleeves 50, 52 cooperate with the stator 30 and its helical channel 32 to generate a pumping effect according to Holweck.
  • the gas flow leads through the suction opening into a gap S between the second sleeve 52 and the stator 30.
  • the first sleeve 50 is arranged in the gas flow downstream of the second sleeve 52 and thus compresses towards the sleeve pressure.
  • Fig. 2 the housing 2 is shown, which has the inlet 4.
  • the rotating sleeve 52 and the pump-active structure 32 are shown.
  • FIG. 2 it is shown schematically how a gas molecule 60 hits the sleeve 52. Due to the probable direction of movement of the gas molecule 60, it can happen that the molecule does not enter the Holweck channels 32, but leaves the suction area 62 again in the direction of the recipient, i.e. against the direction of the arrow A. The resulting speed is shown by arrow 80.
  • Fig. 3 shows an inlet flange 4 known from practice, which is designed as an asymmetrically drilled inlet channel. This embodiment directs the gas molecules 60 in different directions of the inlet 4. The resulting velocity is shown by the arrow 80.
  • Fig. 4 shows an inlet geometry according to the invention which represents a further improvement compared to the prior art, in which the inlet 4 is designed to widen in the direction of the sleeve 52. This influences the direction of movement of the molecules 60 in such a way that they can no longer leave the suction flange of the pump 1 in the direction of the recipient, i.e. against the direction of the arrow A, and continue to remain in the pumping process.
  • FIG. 4 the likely direction of movement of the gas molecules 60 after they have been in contact with the rotating sleeve 52, it is found that if they do not enter the Holweck pump stage, there is an increased probability that they hit the housing wall 64 above the pump stage. The further movement of the molecules is subject to the usual probability distribution.
  • inlet 4 as in Fig. 4 configured in such a way that the gas molecules that strike here move back into the pump, this measure increases the pumping speed.
  • Fig. 5 Fig. 3 shows a modified embodiment of the invention.
  • the inlet 64 is according to Fig. 5 formed linearly conically widening. According to this inlet geometry, too, the gas molecules that abut the inner wall of the extension 64 of the inlet flange 4 move back again in the direction of the pump chamber, so that the pumping speed of the pump also increases significantly as a result.
  • Fig. 6 shows a turbo pumping stage 66 with a suction opening 62.
  • the turbo pumping stage has a rotor 68 with rotor blades 70.
  • the gas molecules (not shown) enter the vacuum pumping stage 66 in the direction of arrow A. If the gas molecules are deflected by the rotor blades 70 in the direction of the outlet, they strike the inner wall of the enlargement 64 of the suction opening 62 and are again directed in the direction of the rotor 68.
  • Fig. 7 shows a schematic representation of the pump stage 66 with the rotor 68.
  • the rotor 68 has rotor disks 72, 74 and stator disks 76, 78, the rotor disks 72, 74 and the stator disks 76, 78 have opposing rotor and stator blades.
  • a gas molecule which enters the suction opening 62 in the direction of the arrow A is correspondingly deflected by the widening 64 of the suction opening 62 and "passes through” the pump stage 66 and exits the pump stage 66 in the direction of the arrow B.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (8)

  1. Pompe à vide ou étage de pompe à vide avec un corps, qui présente au moins une entrée, avec un rotor, qui présente un arbre, dans laquelle/lequel l'entrée est disposée radialement par rapport à l'arbre, la pompe à vide ou l'étage de pompe à vide présentant au moins un étage de pompe Holweck avec un rotor, qui présente un arbre, un moyeu assemblé à l'arbre et un manchon (52) relié au moyeu et concentrique à l'arbre, caractérisé(e) en ce que l'entrée (4) est réalisée sous forme évasée en direction du manchon (52) et en direction de l'arbre (12), et en ce que l'entrée (4) est réalisée sous forme évasée dans le sens de rotation du rotor et en ce que l'entrée (4) est réalisée sous forme évasée uniquement dans le sens de rotation du rotor.
  2. Pompe à vide selon la revendication 1, caractérisée en ce que la pompe à vide présente au moins un étage de pompe Holweck avec un arbre en une seule pièce et un stator enveloppant, ou au moins un étage Holweck à filetage croisé avec un arbre en une seule pièce, dans laquelle une structure de transport représente une structure filetée contraire, ou un turbo-rotor d'une turbopompe, dans laquelle la structure de transport comprend au moins un disque de turbo-rotor (72, 74) et un disque de turbo-stator (76, 78) .
  3. Etage de pompe à vide selon la revendication 1, caractérisé en ce que l'étage de pompe à vide est réalisé sous la forme d'un étage Holweck avec un arbre en une seule pièce et un stator enveloppant, ou sous la forme d'un étage Holweck à filetage croisé avec un arbre en une seule pièce, dans lequel la structure de transport représente une structure filetée contraire.
  4. Pompe à vide ou étage de pompe à vide selon la revendication 1, caractérisé(e) en ce que l'entrée (4) est réalisée sous la forme d'une entrée (4) conduisant du gaz à travers l'entrée (4) dans des canaux (32) disposés dans le sens de rotation du rotor.
  5. Pompe à vide ou étage de pompe à vide selon l'une quelconque des revendications précédentes, caractérisé(e) en ce que l'entrée (4) est réalisée sous forme évasée en section transversale avec un contour extérieur courbe (64).
  6. Pompe à vide ou étage de pompe à vide selon l'une quelconque des revendications 1 à 5, caractérisé(e) en ce que l'entrée (4) est réalisée sous forme évasée conique linéaire en section transversale.
  7. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la pompe à vide (1) est réalisée sous la forme d'une pompe à vide moléculaire.
  8. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la pompe à vide (1) est réalisée sous la forme d'une pompe Holweck.
EP14196002.1A 2013-12-18 2014-12-03 Pompe à vide avec géométrie d'admission perfectionnée Active EP2886870B2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102013114290.7A DE102013114290A1 (de) 2013-12-18 2013-12-18 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2886870A1 EP2886870A1 (fr) 2015-06-24
EP2886870B1 EP2886870B1 (fr) 2017-12-20
EP2886870B2 true EP2886870B2 (fr) 2020-12-23

Family

ID=52023216

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14196002.1A Active EP2886870B2 (fr) 2013-12-18 2014-12-03 Pompe à vide avec géométrie d'admission perfectionnée

Country Status (4)

Country Link
US (1) US20150167679A1 (fr)
EP (1) EP2886870B2 (fr)
JP (1) JP6118784B2 (fr)
DE (1) DE102013114290A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146492A (ja) 1984-08-11 1986-03-06 Mitsuwa Seiki Co Ltd 分子ポンプ
JPH0213195U (fr) * 1988-06-30 1990-01-26
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede
JPH0475196U (fr) * 1990-11-09 1992-06-30
DE4331589C2 (de) 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
JPH0717986U (ja) * 1993-09-08 1995-03-31 二国機械工業株式会社 渦流ポンプ
DE19508566A1 (de) 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
GB2333127A (en) * 1997-10-21 1999-07-14 Varian Associates Molecular drag compressors having finned rotor construction
DE19821634A1 (de) 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB9921983D0 (en) 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
US6450772B1 (en) * 1999-10-18 2002-09-17 Sarcos, Lc Compact molecular drag vacuum pump
GB2360066A (en) 2000-03-06 2001-09-12 Boc Group Plc Vacuum pump
DE10114585A1 (de) 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB0124731D0 (en) 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
GB0414316D0 (en) 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
DE202005019644U1 (de) 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
DE102008024764A1 (de) 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102009035332A1 (de) 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102010019940B4 (de) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE202010012795U1 (de) 2010-09-21 2012-01-13 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102011112689B4 (de) 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102011112691A1 (de) 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
EP2886870A1 (fr) 2015-06-24
US20150167679A1 (en) 2015-06-18
DE102013114290A1 (de) 2015-06-18
JP6118784B2 (ja) 2017-04-19
JP2015117697A (ja) 2015-06-25
EP2886870B1 (fr) 2017-12-20

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