DE58907244D1 - Reibungspumpe mit glockenförmigem Rotor. - Google Patents

Reibungspumpe mit glockenförmigem Rotor.

Info

Publication number
DE58907244D1
DE58907244D1 DE89113317T DE58907244T DE58907244D1 DE 58907244 D1 DE58907244 D1 DE 58907244D1 DE 89113317 T DE89113317 T DE 89113317T DE 58907244 T DE58907244 T DE 58907244T DE 58907244 D1 DE58907244 D1 DE 58907244D1
Authority
DE
Germany
Prior art keywords
bell
shaped rotor
friction pump
friction
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE89113317T
Other languages
English (en)
Inventor
Frank Fleischmann
Hans-Peter Dr Kabelitz
Hans Kriechel
Martin Muehlhoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE58907244D1 publication Critical patent/DE58907244D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE89113317T 1989-07-20 1989-07-20 Reibungspumpe mit glockenförmigem Rotor. Expired - Fee Related DE58907244D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP89113317A EP0408791B1 (de) 1989-07-20 1989-07-20 Reibungspumpe mit glockenförmigem Rotor

Publications (1)

Publication Number Publication Date
DE58907244D1 true DE58907244D1 (de) 1994-04-21

Family

ID=8201650

Family Applications (1)

Application Number Title Priority Date Filing Date
DE89113317T Expired - Fee Related DE58907244D1 (de) 1989-07-20 1989-07-20 Reibungspumpe mit glockenförmigem Rotor.

Country Status (4)

Country Link
US (1) US5165872A (de)
EP (1) EP0408791B1 (de)
JP (1) JP2877914B2 (de)
DE (1) DE58907244D1 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05209589A (ja) * 1992-01-31 1993-08-20 Matsushita Electric Ind Co Ltd 流体回転装置
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE4314419A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit Lagerabstützung
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
US6074165A (en) * 1998-03-10 2000-06-13 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
DE59912626D1 (de) * 1998-05-26 2006-02-16 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
ITTO980453A1 (it) 1998-05-27 1999-11-29 Varian Spa Pompa da vuoto compatta
DE19846189A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe
US6213736B1 (en) * 1998-11-28 2001-04-10 G Louis Weisser Electric motor pump with magnetic coupling and thrust balancing means
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10004263A1 (de) 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
JP5149472B2 (ja) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー ガス摩擦ポンプ
DE10111546A1 (de) 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP4156830B2 (ja) * 2001-12-13 2008-09-24 エドワーズ株式会社 真空ポンプ
DE10308420A1 (de) * 2003-02-27 2004-09-09 Leybold Vakuum Gmbh Testgaslecksuchgerät
JP2005163713A (ja) * 2003-12-04 2005-06-23 Toyota Industries Corp 流体圧縮機
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
CN102667169B (zh) * 2009-12-11 2016-03-02 埃地沃兹日本有限公司 螺纹槽排气部的筒形固定部件以及使用该部件的真空泵
DE102010015151A1 (de) * 2010-04-16 2011-10-20 Knorr-Bremse Systeme für Schienenfahrzeuge GmbH Verdichterflansch für Schraubenverdichter
EP3135919B1 (de) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2020112080A (ja) * 2019-01-10 2020-07-27 エドワーズ株式会社 真空ポンプ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
DE2408256A1 (de) * 1974-02-21 1975-09-04 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe
DE2526164A1 (de) * 1975-06-12 1976-12-30 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
DE3039196A1 (de) * 1980-10-17 1982-05-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur montage einer einflutigen turbomolekular-vakuumpumpe und nach diesem verfahren montierte turbomolekular-vakuumpumpe
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
NL8303927A (nl) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
SU1285198A1 (ru) * 1985-01-04 1987-01-23 Предприятие П/Я А-1614 Двухступенчатый турбомолекул рный вакуумный насос
JPS63154891A (ja) * 1986-12-18 1988-06-28 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
JPS63159695A (ja) * 1986-12-23 1988-07-02 Shimadzu Corp タ−ボ分子ポンプ
FR2611818B1 (fr) * 1987-02-26 1991-04-19 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
GB2232205B (en) * 1987-12-25 1991-11-13 Sholokhov Valery B Molecular vacuum pump

Also Published As

Publication number Publication date
US5165872A (en) 1992-11-24
EP0408791B1 (de) 1994-03-16
JPH03138484A (ja) 1991-06-12
JP2877914B2 (ja) 1999-04-05
EP0408791A1 (de) 1991-01-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee