FR2611818B1 - Pompe rotative a vide moleculaire du type a canal de gaede - Google Patents
Pompe rotative a vide moleculaire du type a canal de gaedeInfo
- Publication number
- FR2611818B1 FR2611818B1 FR8702560A FR8702560A FR2611818B1 FR 2611818 B1 FR2611818 B1 FR 2611818B1 FR 8702560 A FR8702560 A FR 8702560A FR 8702560 A FR8702560 A FR 8702560A FR 2611818 B1 FR2611818 B1 FR 2611818B1
- Authority
- FR
- France
- Prior art keywords
- gaede
- vacuum pump
- channel type
- molecular vacuum
- rotary molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8702560A FR2611818B1 (fr) | 1987-02-26 | 1987-02-26 | Pompe rotative a vide moleculaire du type a canal de gaede |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8702560A FR2611818B1 (fr) | 1987-02-26 | 1987-02-26 | Pompe rotative a vide moleculaire du type a canal de gaede |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2611818A1 FR2611818A1 (fr) | 1988-09-09 |
FR2611818B1 true FR2611818B1 (fr) | 1991-04-19 |
Family
ID=9348350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8702560A Expired - Fee Related FR2611818B1 (fr) | 1987-02-26 | 1987-02-26 | Pompe rotative a vide moleculaire du type a canal de gaede |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2611818B1 (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3885899D1 (de) * | 1988-10-10 | 1994-01-05 | Leybold Ag | Pumpenstufe für eine Hochvakuumpumpe. |
DE58907244D1 (de) * | 1989-07-20 | 1994-04-21 | Leybold Ag | Reibungspumpe mit glockenförmigem Rotor. |
DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
SE508445C2 (sv) * | 1997-01-28 | 1998-10-05 | Magnetal Ab | Vakuumpump av höghastighetstyp |
DE102004047930A1 (de) * | 2004-10-01 | 2006-04-06 | Leybold Vacuum Gmbh | Reibungsvakuumpumpe |
EP3760872B1 (fr) * | 2020-07-03 | 2022-06-08 | Pfeiffer Vacuum Technology AG | Pompe à vide pourvue d'un agencement de fixation destiné à l'application de la pompe à une structure de fixation ainsi qu'un poste de pompage doté d'une telle pompe à vide montée sur celui-ci |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8303927A (nl) * | 1983-11-16 | 1985-06-17 | Ultra Centrifuge Nederland Nv | Hoog-vacuum moleculair pomp. |
JPS6131695A (ja) * | 1984-07-25 | 1986-02-14 | Hitachi Ltd | タ−ボ分子ポンプ |
-
1987
- 1987-02-26 FR FR8702560A patent/FR2611818B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2611818A1 (fr) | 1988-09-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |