FR2630167B1 - Pompe moleculaire a vide - Google Patents

Pompe moleculaire a vide

Info

Publication number
FR2630167B1
FR2630167B1 FR888804896A FR8804896A FR2630167B1 FR 2630167 B1 FR2630167 B1 FR 2630167B1 FR 888804896 A FR888804896 A FR 888804896A FR 8804896 A FR8804896 A FR 8804896A FR 2630167 B1 FR2630167 B1 FR 2630167B1
Authority
FR
France
Prior art keywords
vacuum pump
molecular vacuum
molecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR888804896A
Other languages
English (en)
Other versions
FR2630167A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHARSHIN SERGEI
SHOLOKHOV VALERY
VICH DEMIKHOV KONSTANTIN
Original Assignee
SHARSHIN SERGEI
SHOLOKHOV VALERY
VICH DEMIKHOV KONSTANTIN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHARSHIN SERGEI, SHOLOKHOV VALERY, VICH DEMIKHOV KONSTANTIN filed Critical SHARSHIN SERGEI
Publication of FR2630167A1 publication Critical patent/FR2630167A1/fr
Application granted granted Critical
Publication of FR2630167B1 publication Critical patent/FR2630167B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
FR888804896A 1988-01-05 1988-04-13 Pompe moleculaire a vide Expired - Fee Related FR2630167B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000001 WO1989006320A1 (fr) 1988-01-05 1988-01-05 Pompe a vide moleculaire

Publications (2)

Publication Number Publication Date
FR2630167A1 FR2630167A1 (fr) 1989-10-20
FR2630167B1 true FR2630167B1 (fr) 1990-08-31

Family

ID=21617173

Family Applications (1)

Application Number Title Priority Date Filing Date
FR888804896A Expired - Fee Related FR2630167B1 (fr) 1988-01-05 1988-04-13 Pompe moleculaire a vide

Country Status (6)

Country Link
JP (1) JPH02502840A (fr)
DE (1) DE3891201T1 (fr)
FI (1) FI894157A0 (fr)
FR (1) FR2630167B1 (fr)
GB (1) GB2221255B (fr)
WO (1) WO1989006320A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1626621A (en) * 1925-08-28 1927-05-03 Middendorf George Compressor for refrigerators or the like
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2244370A5 (fr) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ

Also Published As

Publication number Publication date
DE3891201T1 (de) 1990-01-11
FI894157A0 (fi) 1989-09-04
GB2221255A (en) 1990-01-31
GB2221255B (en) 1991-10-16
JPH02502840A (ja) 1990-09-06
GB8917836D0 (en) 1989-11-01
WO1989006320A1 (fr) 1989-07-13
FR2630167A1 (fr) 1989-10-20

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Legal Events

Date Code Title Description
ST Notification of lapse