WO1989006320A1 - Pompe a vide moleculaire - Google Patents

Pompe a vide moleculaire Download PDF

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Publication number
WO1989006320A1
WO1989006320A1 PCT/SU1988/000001 SU8800001W WO8906320A1 WO 1989006320 A1 WO1989006320 A1 WO 1989006320A1 SU 8800001 W SU8800001 W SU 8800001W WO 8906320 A1 WO8906320 A1 WO 8906320A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
hand
sτοροny
ροτορa
κοτορyχ
Prior art date
Application number
PCT/SU1988/000001
Other languages
English (en)
Russian (ru)
Inventor
Valery Borisovich Sholokhov
Konstantin Evgenievich Demikhov
Vladimir Iliich Vikhrev
Vladimir Pavlovich Sergeev
Sergei Nikolaevich Sharshin
Original Assignee
Sholokhov Valery B
Demikhov Konstantin E
Vikhrev Vladimir I
Sergeev Vladimir P
Sharshin Sergei N
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sholokhov Valery B, Demikhov Konstantin E, Vikhrev Vladimir I, Sergeev Vladimir P, Sharshin Sergei N filed Critical Sholokhov Valery B
Priority to HU881650A priority Critical patent/HU201985B/hu
Priority to GB8917836A priority patent/GB2221255B/en
Priority to JP63501741A priority patent/JPH02502840A/ja
Priority to DE883891201T priority patent/DE3891201T1/de
Priority to PCT/SU1988/000001 priority patent/WO1989006320A1/fr
Priority to FR888804896A priority patent/FR2630167B1/fr
Priority to PL27196788A priority patent/PL271967A1/xx
Publication of WO1989006320A1 publication Critical patent/WO1989006320A1/fr
Priority to FI894157A priority patent/FI894157A0/fi

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the main constituent ⁇ and the elements of the molecular vacuum are polystyrene and ⁇ , found in it from the ground.
  • ⁇ ⁇ / kan ⁇ / / 15 15 15 15 15 15,,,,,,,. ⁇
  • the principle of the operation of a second-hand consumer electronics is excluded, which means that gas molecules are avoided
  • the white wedges between the participating countries increase the inverse flow of the G338, and the other means that there is no electricity in the kelts power supply.
  • Disposal of the invention in a basic embodiment of the invention is hereby obtained with the use of a small, non-volatile source of electricity, resulting in a loss of electricity.
  • the installation of the non-removable card has a labyrinthine seal between the ..
  • FIG. 3 part of the site in place of location: I
  • the best version of the invention is the invention of a vacant ⁇ power supply system. - 5 - ⁇ I (fig. ⁇ ), in the total absence of 2 on the other hand, by turning on the third one. With this delay 4 on the other hand, there is a 3-hour operating room 5
  • the grooved grooves 7 divide the rotary groove 3 into six sections of 8, 9, 10, 11, 12, 13, the length of the grooves increases to the extent that the pumping flow is not drained
  • the locus of the gas supply has a length greater than the length of section 8, which is connected to the suction gas, which is about 3 times.
  • the depth of the kolkoy kayakaz is 7 more - & - there is a participating part in ⁇ , 9,10, II, or 2, which is for green,
  • disk 23 was secured on the left side of the blade 24, which is located in the center. .. It may be used a ⁇ other well-known version of the performance of the handheld disks, when the free cardholders are free 24
  • the thickness of the portable parts 23 can be different and the total share is dependent on the actual quality of the product. Wrong:, _ ⁇ Vietnamese erie tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct , ⁇ .
  • the peculiar pump pump is as follows;.: Reset.
  • the molecules of the exhaust gas are absent and suction

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Une pompe à vide moléculaire comporte un stator creux (1), dans l'ouverture axiale (2) duquel est monté, avec un espacement, un rotor (3) dont la surface cylindrique (5) comporte au moins une gorge annulaire (7) et, sur des sections (8, 9, 10, 11, 12, 13) entre les gorges annulaires (7), des fentes (14) orientées le long d'une ligne hélicoïdale et ayant une profondeur diminuant graduellement dans la direction allant du côté aspiration au côté compression, tandis que la profondeur de chaque gorge annulaire (7) n'est pas inférieure à la profondeur minimale des fentes (14) de la région voisine (8, 9, 10, 11, 12) du rotor (3) côté aspiration. Sur le stator (1) sont fixés des disques à pales (23) dont le nombre est égal au nombre de gorges annulaires (7). Les pales (24) des disques (23) sont situées à l'intérieur des gorges annulaires (7) et les intervalles entre les surfaces de chaque disque (23) en regard des surfaces des gorges annulaires correspondantes (7), d'une part, et lesdites surfaces, d'autre part, sont proportionnés à l'intervalle (4) entre le rotor (3) et le stator (1).
PCT/SU1988/000001 1988-01-05 1988-01-05 Pompe a vide moleculaire WO1989006320A1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
HU881650A HU201985B (en) 1988-01-05 1988-01-05 Molecular vacuum pump
GB8917836A GB2221255B (en) 1988-01-05 1988-01-05 Molecular vacuum pump
JP63501741A JPH02502840A (ja) 1988-01-05 1988-01-05 分子真空ポンプ
DE883891201T DE3891201T1 (de) 1988-01-05 1988-01-05 Vakuum-molekularpumpe
PCT/SU1988/000001 WO1989006320A1 (fr) 1988-01-05 1988-01-05 Pompe a vide moleculaire
FR888804896A FR2630167B1 (fr) 1988-01-05 1988-04-13 Pompe moleculaire a vide
PL27196788A PL271967A1 (en) 1988-01-05 1988-04-21 Molecular vacuum pump
FI894157A FI894157A0 (fi) 1988-01-05 1989-09-04 Molekylvakuumpump.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000001 WO1989006320A1 (fr) 1988-01-05 1988-01-05 Pompe a vide moleculaire

Publications (1)

Publication Number Publication Date
WO1989006320A1 true WO1989006320A1 (fr) 1989-07-13

Family

ID=21617173

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SU1988/000001 WO1989006320A1 (fr) 1988-01-05 1988-01-05 Pompe a vide moleculaire

Country Status (6)

Country Link
JP (1) JPH02502840A (fr)
DE (1) DE3891201T1 (fr)
FI (1) FI894157A0 (fr)
FR (1) FR2630167B1 (fr)
GB (1) GB2221255B (fr)
WO (1) WO1989006320A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE19846188A1 (de) 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2244370A5 (fr) * 1973-09-14 1975-04-11 Cit Alcatel
DE2255618C2 (de) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molekular-Vakuumpumpe
EP0081890B1 (fr) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. Pompe moléculaire à vide élevé
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1626621A (en) * 1925-08-28 1927-05-03 Middendorf George Compressor for refrigerators or the like
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2255618C2 (de) * 1971-11-16 1982-12-23 Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris Molekular-Vakuumpumpe
FR2244370A5 (fr) * 1973-09-14 1975-04-11 Cit Alcatel
EP0081890B1 (fr) * 1981-12-14 1985-10-09 Ultra-Centrifuge Nederland N.V. Pompe moléculaire à vide élevé
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Also Published As

Publication number Publication date
GB8917836D0 (en) 1989-11-01
DE3891201T1 (de) 1990-01-11
JPH02502840A (ja) 1990-09-06
FR2630167B1 (fr) 1990-08-31
FI894157A0 (fi) 1989-09-04
GB2221255B (en) 1991-10-16
FR2630167A1 (fr) 1989-10-20
GB2221255A (en) 1990-01-31

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