WO1989006320A1 - Pompe a vide moleculaire - Google Patents
Pompe a vide moleculaire Download PDFInfo
- Publication number
- WO1989006320A1 WO1989006320A1 PCT/SU1988/000001 SU8800001W WO8906320A1 WO 1989006320 A1 WO1989006320 A1 WO 1989006320A1 SU 8800001 W SU8800001 W SU 8800001W WO 8906320 A1 WO8906320 A1 WO 8906320A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- gas
- hand
- sτοροny
- ροτορa
- κοτορyχ
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Definitions
- the main constituent ⁇ and the elements of the molecular vacuum are polystyrene and ⁇ , found in it from the ground.
- ⁇ ⁇ / kan ⁇ / / 15 15 15 15 15 15,,,,,,,. ⁇
- the principle of the operation of a second-hand consumer electronics is excluded, which means that gas molecules are avoided
- the white wedges between the participating countries increase the inverse flow of the G338, and the other means that there is no electricity in the kelts power supply.
- Disposal of the invention in a basic embodiment of the invention is hereby obtained with the use of a small, non-volatile source of electricity, resulting in a loss of electricity.
- the installation of the non-removable card has a labyrinthine seal between the ..
- FIG. 3 part of the site in place of location: I
- the best version of the invention is the invention of a vacant ⁇ power supply system. - 5 - ⁇ I (fig. ⁇ ), in the total absence of 2 on the other hand, by turning on the third one. With this delay 4 on the other hand, there is a 3-hour operating room 5
- the grooved grooves 7 divide the rotary groove 3 into six sections of 8, 9, 10, 11, 12, 13, the length of the grooves increases to the extent that the pumping flow is not drained
- the locus of the gas supply has a length greater than the length of section 8, which is connected to the suction gas, which is about 3 times.
- the depth of the kolkoy kayakaz is 7 more - & - there is a participating part in ⁇ , 9,10, II, or 2, which is for green,
- disk 23 was secured on the left side of the blade 24, which is located in the center. .. It may be used a ⁇ other well-known version of the performance of the handheld disks, when the free cardholders are free 24
- the thickness of the portable parts 23 can be different and the total share is dependent on the actual quality of the product. Wrong:, _ ⁇ Vietnamese erie tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct tinct , ⁇ .
- the peculiar pump pump is as follows;.: Reset.
- the molecules of the exhaust gas are absent and suction
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Une pompe à vide moléculaire comporte un stator creux (1), dans l'ouverture axiale (2) duquel est monté, avec un espacement, un rotor (3) dont la surface cylindrique (5) comporte au moins une gorge annulaire (7) et, sur des sections (8, 9, 10, 11, 12, 13) entre les gorges annulaires (7), des fentes (14) orientées le long d'une ligne hélicoïdale et ayant une profondeur diminuant graduellement dans la direction allant du côté aspiration au côté compression, tandis que la profondeur de chaque gorge annulaire (7) n'est pas inférieure à la profondeur minimale des fentes (14) de la région voisine (8, 9, 10, 11, 12) du rotor (3) côté aspiration. Sur le stator (1) sont fixés des disques à pales (23) dont le nombre est égal au nombre de gorges annulaires (7). Les pales (24) des disques (23) sont situées à l'intérieur des gorges annulaires (7) et les intervalles entre les surfaces de chaque disque (23) en regard des surfaces des gorges annulaires correspondantes (7), d'une part, et lesdites surfaces, d'autre part, sont proportionnés à l'intervalle (4) entre le rotor (3) et le stator (1).
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
HU881650A HU201985B (en) | 1988-01-05 | 1988-01-05 | Molecular vacuum pump |
GB8917836A GB2221255B (en) | 1988-01-05 | 1988-01-05 | Molecular vacuum pump |
JP63501741A JPH02502840A (ja) | 1988-01-05 | 1988-01-05 | 分子真空ポンプ |
DE883891201T DE3891201T1 (de) | 1988-01-05 | 1988-01-05 | Vakuum-molekularpumpe |
PCT/SU1988/000001 WO1989006320A1 (fr) | 1988-01-05 | 1988-01-05 | Pompe a vide moleculaire |
FR888804896A FR2630167B1 (fr) | 1988-01-05 | 1988-04-13 | Pompe moleculaire a vide |
PL27196788A PL271967A1 (en) | 1988-01-05 | 1988-04-21 | Molecular vacuum pump |
FI894157A FI894157A0 (fi) | 1988-01-05 | 1989-09-04 | Molekylvakuumpump. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/SU1988/000001 WO1989006320A1 (fr) | 1988-01-05 | 1988-01-05 | Pompe a vide moleculaire |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1989006320A1 true WO1989006320A1 (fr) | 1989-07-13 |
Family
ID=21617173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/SU1988/000001 WO1989006320A1 (fr) | 1988-01-05 | 1988-01-05 | Pompe a vide moleculaire |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPH02502840A (fr) |
DE (1) | DE3891201T1 (fr) |
FI (1) | FI894157A0 (fr) |
FR (1) | FR2630167B1 (fr) |
GB (1) | GB2221255B (fr) |
WO (1) | WO1989006320A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1238201B (it) * | 1989-11-03 | 1993-07-09 | Varian Spa | Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti. |
DE4216237A1 (de) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gasreibungsvakuumpumpe |
DE19846188A1 (de) | 1998-10-07 | 2000-04-13 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
DE19937392A1 (de) * | 1999-08-07 | 2001-02-08 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit pumpaktiven Elementen |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2244370A5 (fr) * | 1973-09-14 | 1975-04-11 | Cit Alcatel | |
DE2255618C2 (de) * | 1971-11-16 | 1982-12-23 | Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris | Molekular-Vakuumpumpe |
EP0081890B1 (fr) * | 1981-12-14 | 1985-10-09 | Ultra-Centrifuge Nederland N.V. | Pompe moléculaire à vide élevé |
DE3613344A1 (de) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | Turbomolekular-vakuumpumpe fuer hoeheren druck |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1626621A (en) * | 1925-08-28 | 1927-05-03 | Middendorf George | Compressor for refrigerators or the like |
FR1293546A (fr) * | 1961-02-09 | 1962-05-18 | Alsacienne Constr Meca | Perfectionnements aux pompes moléculaires rotatives |
JPS6341695A (ja) * | 1986-08-07 | 1988-02-22 | Seiko Seiki Co Ltd | タ−ボ分子ポンプ |
-
1988
- 1988-01-05 JP JP63501741A patent/JPH02502840A/ja active Pending
- 1988-01-05 WO PCT/SU1988/000001 patent/WO1989006320A1/fr active Application Filing
- 1988-01-05 DE DE883891201T patent/DE3891201T1/de not_active Withdrawn
- 1988-01-05 GB GB8917836A patent/GB2221255B/en not_active Expired - Lifetime
- 1988-04-13 FR FR888804896A patent/FR2630167B1/fr not_active Expired - Fee Related
-
1989
- 1989-09-04 FI FI894157A patent/FI894157A0/fi not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2255618C2 (de) * | 1971-11-16 | 1982-12-23 | Compagnie Industrielle Des Telecommunications Cit-Alcatel S.A., 75008 Paris | Molekular-Vakuumpumpe |
FR2244370A5 (fr) * | 1973-09-14 | 1975-04-11 | Cit Alcatel | |
EP0081890B1 (fr) * | 1981-12-14 | 1985-10-09 | Ultra-Centrifuge Nederland N.V. | Pompe moléculaire à vide élevé |
DE3613344A1 (de) * | 1986-04-19 | 1987-10-22 | Pfeiffer Vakuumtechnik | Turbomolekular-vakuumpumpe fuer hoeheren druck |
Also Published As
Publication number | Publication date |
---|---|
GB8917836D0 (en) | 1989-11-01 |
DE3891201T1 (de) | 1990-01-11 |
JPH02502840A (ja) | 1990-09-06 |
FR2630167B1 (fr) | 1990-08-31 |
FI894157A0 (fi) | 1989-09-04 |
GB2221255B (en) | 1991-10-16 |
FR2630167A1 (fr) | 1989-10-20 |
GB2221255A (en) | 1990-01-31 |
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