DE3891201T1 - Vakuum-molekularpumpe - Google Patents

Vakuum-molekularpumpe

Info

Publication number
DE3891201T1
DE3891201T1 DE883891201T DE3891201T DE3891201T1 DE 3891201 T1 DE3891201 T1 DE 3891201T1 DE 883891201 T DE883891201 T DE 883891201T DE 3891201 T DE3891201 T DE 3891201T DE 3891201 T1 DE3891201 T1 DE 3891201T1
Authority
DE
Germany
Prior art keywords
molecular pump
vacuum molecular
vacuum
pump
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE883891201T
Other languages
English (en)
Inventor
Valerij Borisovic Solochov
Konstantin Evgenevic Demichov
Vladimir Ilic Vichrev
Vladimir Pavlovic Sergeev
Sergej Nikolaevic Sarsin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE3891201T1 publication Critical patent/DE3891201T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
DE883891201T 1988-01-05 1988-01-05 Vakuum-molekularpumpe Withdrawn DE3891201T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000001 WO1989006320A1 (en) 1988-01-05 1988-01-05 Molecular vacuum pump

Publications (1)

Publication Number Publication Date
DE3891201T1 true DE3891201T1 (de) 1990-01-11

Family

ID=21617173

Family Applications (1)

Application Number Title Priority Date Filing Date
DE883891201T Withdrawn DE3891201T1 (de) 1988-01-05 1988-01-05 Vakuum-molekularpumpe

Country Status (6)

Country Link
JP (1) JPH02502840A (de)
DE (1) DE3891201T1 (de)
FI (1) FI894157A0 (de)
FR (1) FR2630167B1 (de)
GB (1) GB2221255B (de)
WO (1) WO1989006320A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE19846188A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1626621A (en) * 1925-08-28 1927-05-03 Middendorf George Compressor for refrigerators or the like
FR1293546A (fr) * 1961-02-09 1962-05-18 Alsacienne Constr Meca Perfectionnements aux pompes moléculaires rotatives
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2244370A5 (de) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ

Also Published As

Publication number Publication date
GB2221255A (en) 1990-01-31
GB2221255B (en) 1991-10-16
FI894157A0 (fi) 1989-09-04
FR2630167A1 (fr) 1989-10-20
WO1989006320A1 (en) 1989-07-13
FR2630167B1 (fr) 1990-08-31
GB8917836D0 (en) 1989-11-01
JPH02502840A (ja) 1990-09-06

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee