DE3891263T1 - Turbomolekular-vakuumpumpe - Google Patents

Turbomolekular-vakuumpumpe

Info

Publication number
DE3891263T1
DE3891263T1 DE883891263T DE3891263T DE3891263T1 DE 3891263 T1 DE3891263 T1 DE 3891263T1 DE 883891263 T DE883891263 T DE 883891263T DE 3891263 T DE3891263 T DE 3891263T DE 3891263 T1 DE3891263 T1 DE 3891263T1
Authority
DE
Germany
Prior art keywords
vacuum pump
turbomolecular vacuum
turbomolecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE883891263T
Other languages
English (en)
Inventor
Nikolaj Michailovic Novikov
Vladimir Ilic Vichrev
Valerij Borisovic Solochov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of DE3891263T1 publication Critical patent/DE3891263T1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE883891263T 1988-02-26 1988-02-26 Turbomolekular-vakuumpumpe Withdrawn DE3891263T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1988/000047 WO1989008192A1 (en) 1988-02-26 1988-02-26 Turbomolecular vacuum pump

Publications (1)

Publication Number Publication Date
DE3891263T1 true DE3891263T1 (de) 1990-03-15

Family

ID=21617205

Family Applications (1)

Application Number Title Priority Date Filing Date
DE883891263T Withdrawn DE3891263T1 (de) 1988-02-26 1988-02-26 Turbomolekular-vakuumpumpe

Country Status (8)

Country Link
US (1) US5052887A (de)
JP (1) JPH02503702A (de)
CH (1) CH674552A5 (de)
DE (1) DE3891263T1 (de)
FI (1) FI894271A0 (de)
FR (1) FR2633674B1 (de)
GB (1) GB2226603B (de)
WO (1) WO1989008192A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
FR2683277B1 (fr) * 1991-11-04 1995-01-13 Cit Alcatel Entretoise a epaisseur ajustable.
US5592618A (en) * 1994-10-03 1997-01-07 International Business Machines Corporation Remote copy secondary data copy validation-audit function
GB9719634D0 (en) * 1997-09-15 1997-11-19 Boc Group Plc Improvements in vacuum pumps
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
DE10010371A1 (de) * 2000-03-02 2001-09-06 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
JP2002327697A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
DE10210404A1 (de) * 2002-03-08 2003-09-18 Leybold Vakuum Gmbh Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor
DE10331932B4 (de) * 2003-07-15 2017-08-24 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
JP2006307795A (ja) * 2005-04-28 2006-11-09 Ebara Corp ターボ型真空ポンプ
US7645116B2 (en) * 2005-04-28 2010-01-12 Ebara Corporation Turbo vacuum pump
US8668436B2 (en) * 2008-02-15 2014-03-11 Shimadzu Corporation Turbomolecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
CN103398013B (zh) * 2013-08-12 2016-08-24 北京中科科仪股份有限公司 涡轮分子泵
GB2552793A (en) 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
GB2553323A (en) * 2016-09-01 2018-03-07 Edwards Ltd Pump assemblies with sealing
WO2023137526A1 (en) * 2022-01-22 2023-07-27 Nihill Jack Heat engine

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2035063C3 (de) * 1970-07-15 1974-05-30 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Laufrad für eine Turbomolekularpumpe
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
DE2229724B2 (de) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
FR2244370A5 (de) * 1973-09-14 1975-04-11 Cit Alcatel
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
SU715821A1 (ru) * 1978-01-05 1980-02-15 Предприятие П/Я В-2058 Пакет дисков турбомолекул рного насоса
IT1146663B (it) * 1981-12-10 1986-11-12 Mion Nastrificio Spa A Procedimento per il taglio ed eventuale fissaggio su supporto di wtichette tessute ed etichette cosi' ottenute
NL8105614A (nl) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv Hoog-vacuum moleculair pomp.
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS61283794A (ja) * 1985-06-10 1986-12-13 Nippon Soken Inc タ−ボ分子ポンプ
JPH0765592B2 (ja) * 1986-02-22 1995-07-19 守彦 木俣 タ−ボ分子ポンプ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
JPS63159695A (ja) * 1986-12-23 1988-07-02 Shimadzu Corp タ−ボ分子ポンプ
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19937392A1 (de) * 1999-08-07 2001-02-08 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit pumpaktiven Elementen

Also Published As

Publication number Publication date
GB2226603B (en) 1992-07-29
FR2633674A1 (fr) 1990-01-05
GB8921649D0 (en) 1990-02-21
US5052887A (en) 1991-10-01
JPH02503702A (ja) 1990-11-01
CH674552A5 (de) 1990-06-15
WO1989008192A1 (en) 1989-09-08
FI894271A0 (fi) 1989-09-11
FR2633674B1 (fr) 1990-11-23
GB2226603A (en) 1990-07-04

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Legal Events

Date Code Title Description
8139 Disposal/non-payment of the annual fee