DE69508163D1 - Turbomolekular-Vakuumpumpe - Google Patents
Turbomolekular-VakuumpumpeInfo
- Publication number
- DE69508163D1 DE69508163D1 DE69508163T DE69508163T DE69508163D1 DE 69508163 D1 DE69508163 D1 DE 69508163D1 DE 69508163 T DE69508163 T DE 69508163T DE 69508163 T DE69508163 T DE 69508163T DE 69508163 D1 DE69508163 D1 DE 69508163D1
- Authority
- DE
- Germany
- Prior art keywords
- vacuum pump
- turbomolecular vacuum
- turbomolecular
- pump
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9410147A FR2723767B1 (fr) | 1994-08-19 | 1994-08-19 | Pompe a vide turbomoleculaire |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69508163D1 true DE69508163D1 (de) | 1999-04-15 |
DE69508163T2 DE69508163T2 (de) | 1999-08-05 |
Family
ID=9466397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69508163T Expired - Fee Related DE69508163T2 (de) | 1994-08-19 | 1995-08-16 | Turbomolekular-Vakuumpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US5542825A (de) |
EP (1) | EP0697524B1 (de) |
JP (1) | JPH0868388A (de) |
DE (1) | DE69508163T2 (de) |
FR (1) | FR2723767B1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE508445C2 (sv) * | 1997-01-28 | 1998-10-05 | Magnetal Ab | Vakuumpump av höghastighetstyp |
DE19718791A1 (de) * | 1997-05-03 | 1998-11-05 | Mannesmann Vdo Ag | Fördereinheit |
JP3013083B2 (ja) * | 1998-06-23 | 2000-02-28 | セイコー精機株式会社 | ターボ分子ポンプ |
US6412173B1 (en) | 1999-07-26 | 2002-07-02 | Phoenix Analysis And Design Technologies, Inc. | Miniature turbomolecular pump |
JP3856661B2 (ja) * | 2001-06-06 | 2006-12-13 | 株式会社荏原製作所 | 真空ポンプ |
DE10211134C1 (de) * | 2002-03-14 | 2003-08-14 | Schwerionenforsch Gmbh | Turbomolekularpumpe mit koaxial zentralem Durchgang |
ITTO20030421A1 (it) * | 2003-06-05 | 2004-12-06 | Varian Spa | Pompa da vuoto compatta |
JP2007309245A (ja) * | 2006-05-19 | 2007-11-29 | Boc Edwards Kk | 真空ポンプ |
US8513826B2 (en) * | 2008-06-26 | 2013-08-20 | Ed Mazur | Wind turbine |
FR2974175B1 (fr) * | 2011-04-14 | 2013-10-11 | Mecanique Magnetique Sa | Dispositif de detection de la position axiale d'un arbre tournant et application a une pompe turbo-moleculaire |
DE202012000611U1 (de) * | 2012-01-21 | 2013-04-23 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3535052A (en) * | 1967-08-18 | 1970-10-20 | Pfeiffer Vakuumtechnik | Electrically driven vacuum pump |
CH477629A (de) * | 1967-08-18 | 1969-08-31 | Pfeiffer Vakuumtechnik | Vakuumpumpe mit elektrischem Antrieb, insbesondere Turbomolekularpumpe |
DE2554995A1 (de) * | 1975-12-06 | 1977-06-16 | Pfeiffer Vakuumtechnik | Turbomolekularpumpe |
US4725750A (en) * | 1980-11-20 | 1988-02-16 | Hughes Aircraft Company | Permanent magnet rotary machine |
JPS58163255A (ja) * | 1982-03-24 | 1983-09-28 | Okuma Mach Works Ltd | 永久磁石式同期モ−タの回転子 |
US4629921A (en) * | 1982-09-14 | 1986-12-16 | Gavaletz John S | Dynamoelectric machine rotor |
US4588914A (en) * | 1984-06-05 | 1986-05-13 | Westinghouse Electric Corp. | Permanent magnet rotor for high speed motors and generators |
JPS62261696A (ja) * | 1986-05-08 | 1987-11-13 | Mitsubishi Electric Corp | タ−ボ分子ポンプ装置 |
JPS62282192A (ja) * | 1986-05-30 | 1987-12-08 | Mitsubishi Electric Corp | タ−ボ分子ポンプ装置 |
DE3931661A1 (de) * | 1989-08-25 | 1991-04-04 | Leybold Ag | Magnetgelagerte vakuumpumpe |
FR2659396B1 (fr) * | 1990-03-07 | 1992-05-15 | Cit Alcatel | Pompe a vide pour vide moleculaire propre. |
JPH04219493A (ja) * | 1990-08-10 | 1992-08-10 | Ebara Corp | ターボ分子ポンプ |
JP2527398B2 (ja) * | 1992-06-05 | 1996-08-21 | 財団法人真空科学研究所 | タ―ボ分子ポンプ |
-
1994
- 1994-08-19 FR FR9410147A patent/FR2723767B1/fr not_active Expired - Fee Related
-
1995
- 1995-08-16 EP EP95401896A patent/EP0697524B1/de not_active Expired - Lifetime
- 1995-08-16 DE DE69508163T patent/DE69508163T2/de not_active Expired - Fee Related
- 1995-08-18 JP JP7210660A patent/JPH0868388A/ja active Pending
- 1995-08-18 US US08/516,939 patent/US5542825A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5542825A (en) | 1996-08-06 |
DE69508163T2 (de) | 1999-08-05 |
FR2723767B1 (fr) | 1997-01-03 |
JPH0868388A (ja) | 1996-03-12 |
FR2723767A1 (fr) | 1996-02-23 |
EP0697524A1 (de) | 1996-02-21 |
EP0697524B1 (de) | 1999-03-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: ALCATEL LUCENT, PARIS, FR |
|
8339 | Ceased/non-payment of the annual fee |