DE69924558D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE69924558D1
DE69924558D1 DE69924558T DE69924558T DE69924558D1 DE 69924558 D1 DE69924558 D1 DE 69924558D1 DE 69924558 T DE69924558 T DE 69924558T DE 69924558 T DE69924558 T DE 69924558T DE 69924558 D1 DE69924558 D1 DE 69924558D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69924558T
Other languages
English (en)
Other versions
DE69924558T2 (de
Inventor
Ian David Stones
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Publication of DE69924558D1 publication Critical patent/DE69924558D1/de
Application granted granted Critical
Publication of DE69924558T2 publication Critical patent/DE69924558T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE69924558T 1998-05-20 1999-05-13 Vakuumpumpe Expired - Lifetime DE69924558T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9810872 1998-05-20
GBGB9810872.3A GB9810872D0 (en) 1998-05-20 1998-05-20 Improved vacuum pump

Publications (2)

Publication Number Publication Date
DE69924558D1 true DE69924558D1 (de) 2005-05-12
DE69924558T2 DE69924558T2 (de) 2006-02-23

Family

ID=10832415

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69924558T Expired - Lifetime DE69924558T2 (de) 1998-05-20 1999-05-13 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6135709A (de)
EP (1) EP0959253B1 (de)
JP (1) JP4605836B2 (de)
DE (1) DE69924558T2 (de)
GB (1) GB9810872D0 (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6926493B1 (en) * 1997-06-27 2005-08-09 Ebara Corporation Turbo-molecular pump
US6508631B1 (en) * 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
GB0013491D0 (en) * 2000-06-02 2000-07-26 Boc Group Plc Improved vacuum pump
JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
GB0229355D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
US7500822B2 (en) * 2004-04-09 2009-03-10 Edwards Vacuum, Inc. Combined vacuum pump load-lock assembly
GB0424198D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
US7140833B2 (en) * 2004-11-04 2006-11-28 The Boc Group, Llc Integrated turbo/drag/regenerative pump with counter-rotating turbo blades
US7223064B2 (en) * 2005-02-08 2007-05-29 Varian, Inc. Baffle configurations for molecular drag vacuum pumps
DE102005008643A1 (de) * 2005-02-25 2006-08-31 Leybold Vacuum Gmbh Holweck-Vakuumpumpe
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
US7445422B2 (en) * 2005-05-12 2008-11-04 Varian, Inc. Hybrid turbomolecular vacuum pumps
US20070081893A1 (en) * 2005-10-06 2007-04-12 The Boc Group, Inc. Pump apparatus for semiconductor processing
US7628577B2 (en) * 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
US10641282B2 (en) * 2016-12-28 2020-05-05 Nidec Corporation Fan device and vacuum cleaner including the same
JP7531313B2 (ja) * 2020-06-05 2024-08-09 エドワーズ株式会社 真空ポンプおよび真空ポンプの回転体
EP3907406B1 (de) * 2021-04-16 2023-05-03 Pfeiffer Vacuum Technology AG Vakuumpumpe

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62113887A (ja) * 1985-11-13 1987-05-25 Hitachi Ltd 真空ポンプ
JPS63109299A (ja) * 1986-10-27 1988-05-13 Hitachi Ltd タ−ボ真空ポンプ
JPH01130095U (de) * 1988-02-26 1989-09-05
FR2668209B1 (fr) * 1990-10-18 1994-11-18 Hitachi Koki Kk Pompe d'aspiration moleculaire.
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP3792318B2 (ja) * 1996-10-18 2006-07-05 株式会社大阪真空機器製作所 真空ポンプ
DE29717079U1 (de) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compoundpumpe

Also Published As

Publication number Publication date
GB9810872D0 (en) 1998-07-22
EP0959253A3 (de) 2001-03-14
JPH11351190A (ja) 1999-12-21
EP0959253B1 (de) 2005-04-06
JP4605836B2 (ja) 2011-01-05
EP0959253A2 (de) 1999-11-24
DE69924558T2 (de) 2006-02-23
US6135709A (en) 2000-10-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS LTD., CRAWLEY, WEST SUSSEX, GB