DE69912680D1 - Kompakte Vakuumpumpe - Google Patents

Kompakte Vakuumpumpe

Info

Publication number
DE69912680D1
DE69912680D1 DE69912680T DE69912680T DE69912680D1 DE 69912680 D1 DE69912680 D1 DE 69912680D1 DE 69912680 T DE69912680 T DE 69912680T DE 69912680 T DE69912680 T DE 69912680T DE 69912680 D1 DE69912680 D1 DE 69912680D1
Authority
DE
Germany
Prior art keywords
vacuum pump
compact vacuum
compact
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69912680T
Other languages
English (en)
Other versions
DE69912680T2 (de
Inventor
Fausto Casaro
Raffaella Caretto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11416789&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69912680(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian SpA filed Critical Varian SpA
Publication of DE69912680D1 publication Critical patent/DE69912680D1/de
Application granted granted Critical
Publication of DE69912680T2 publication Critical patent/DE69912680T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0613—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
    • F04D25/062—Details of the bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0613—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
    • F04D25/064—Details of the rotor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE69912680T 1998-05-27 1999-04-22 Kompakte Vakuumpumpe Expired - Lifetime DE69912680T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITTO980453 1998-05-27
IT98TO000453A ITTO980453A1 (it) 1998-05-27 1998-05-27 Pompa da vuoto compatta

Publications (2)

Publication Number Publication Date
DE69912680D1 true DE69912680D1 (de) 2003-12-18
DE69912680T2 DE69912680T2 (de) 2004-08-12

Family

ID=11416789

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69912680T Expired - Lifetime DE69912680T2 (de) 1998-05-27 1999-04-22 Kompakte Vakuumpumpe

Country Status (5)

Country Link
US (1) US6158986A (de)
EP (1) EP0962264B1 (de)
JP (1) JP3292706B2 (de)
DE (1) DE69912680T2 (de)
IT (1) ITTO980453A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10320851A1 (de) * 2003-05-09 2004-11-25 Leybold Vakuum Gmbh Turbopumpe
ITTO20030421A1 (it) * 2003-06-05 2004-12-06 Varian Spa Pompa da vuoto compatta
DE602004025916D1 (de) * 2004-07-20 2010-04-22 Varian Spa Rotationsvakuumpumpe und ihr Auswuchtverfahren
DE102008035891A1 (de) 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP5919745B2 (ja) * 2011-11-15 2016-05-18 株式会社島津製作所 真空ポンプ
DE202012000611U1 (de) * 2012-01-21 2013-04-23 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
CN114632810B (zh) * 2022-03-02 2023-07-04 中交一公局集团有限公司 一种环保安全的可增强土壤修复效果的土壤修复装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2457783C2 (de) * 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
DE3302839A1 (de) * 1983-01-28 1984-08-02 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Turbomolekularpumpe mit induktivitaetsarmem gleichstrommotor, bremseinrichtung und verfahren zum betrieb derselben
JPS62218692A (ja) * 1986-03-18 1987-09-26 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
JPH0259294A (ja) * 1988-08-26 1990-02-28 Nippon F D Kk 自動切断装置
EP0408791B1 (de) 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
DE3926577A1 (de) * 1989-08-11 1991-02-14 Leybold Ag Vakuumpumpe mit einem rotor und mit unter vakuum betriebenen rotorlagerungen
DE4127134B4 (de) * 1991-08-15 2004-07-08 Papst Licensing Gmbh & Co. Kg Diagonallüfter
JPH05195982A (ja) * 1992-01-22 1993-08-06 Mitsubishi Heavy Ind Ltd ターボ分子ポンプ
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
FR2735535B1 (fr) * 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
JP3710584B2 (ja) * 1996-05-02 2005-10-26 株式会社荏原製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
EP0962264B1 (de) 2003-11-12
DE69912680T2 (de) 2004-08-12
ITTO980453A1 (it) 1999-11-29
JP3292706B2 (ja) 2002-06-17
US6158986A (en) 2000-12-12
JPH11351189A (ja) 1999-12-21
EP0962264A2 (de) 1999-12-08
EP0962264A3 (de) 2000-12-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition