DE60030833D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE60030833D1
DE60030833D1 DE60030833T DE60030833T DE60030833D1 DE 60030833 D1 DE60030833 D1 DE 60030833D1 DE 60030833 T DE60030833 T DE 60030833T DE 60030833 T DE60030833 T DE 60030833T DE 60030833 D1 DE60030833 D1 DE 60030833D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60030833T
Other languages
English (en)
Other versions
DE60030833T2 (de
Inventor
Yoshinobu Ohtachi
Hirotaka Namiki
Akira Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Publication of DE60030833D1 publication Critical patent/DE60030833D1/de
Application granted granted Critical
Publication of DE60030833T2 publication Critical patent/DE60030833T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
DE60030833T 1999-12-21 2000-12-21 Vakuumpumpe Expired - Lifetime DE60030833T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP36309799 1999-12-21
JP36309799 1999-12-21
JP2000205017 2000-07-06
JP2000205017A JP2001241393A (ja) 1999-12-21 2000-07-06 真空ポンプ

Publications (2)

Publication Number Publication Date
DE60030833D1 true DE60030833D1 (de) 2006-11-02
DE60030833T2 DE60030833T2 (de) 2007-03-29

Family

ID=26581455

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60030833T Expired - Lifetime DE60030833T2 (de) 1999-12-21 2000-12-21 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6575713B2 (de)
EP (1) EP1118774B1 (de)
JP (1) JP2001241393A (de)
KR (1) KR100732275B1 (de)
DE (1) DE60030833T2 (de)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19846189A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP4250353B2 (ja) 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
JP2003049772A (ja) * 2001-08-08 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造
JP2003083249A (ja) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
JP2004286045A (ja) 2003-03-19 2004-10-14 Boc Edwards Kk 磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
KR100553454B1 (ko) * 2003-10-29 2006-02-22 백융 밀폐형 회전압축기의 회전자 회전장치
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem
JP3970260B2 (ja) 2004-04-23 2007-09-05 三菱重工業株式会社 ポンプ
JP2006063969A (ja) * 2004-07-30 2006-03-09 Shimadzu Corp 回転式真空ポンプ、真空装置およびポンプ接続構造
JP2006144783A (ja) * 2004-11-24 2006-06-08 Pfeiffer Vacuum Gmbh 高速回転ロータを有する真空ポンプのフランジと結合可能な破損防止装置
WO2006068014A1 (ja) * 2004-12-20 2006-06-29 Boc Edwards Japan Limited 端部間の接続構造及び該構造を適用した真空システム
DE102005006433A1 (de) * 2005-02-12 2006-08-24 Leybold Vacuum Gmbh Anordnung mehrerer schnelldrehender Vakuumpumpen
JP4822771B2 (ja) * 2005-08-29 2011-11-24 フルタ電機株式会社 ブロア駆動部の脱落防止機構
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
DE102006016405A1 (de) * 2006-04-07 2007-10-11 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
JP4925781B2 (ja) * 2006-10-05 2012-05-09 エドワーズ株式会社 真空ポンプとその振動吸収ダンパ
DE102007008859A1 (de) * 2007-02-23 2008-08-28 Oerlikon Leybold Vacuum Gmbh Vakuumleitung
DE102007009080A1 (de) * 2007-02-24 2008-08-28 Oerlikon Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe
US20080206079A1 (en) * 2007-02-27 2008-08-28 Jtekt Corporation Turbo-molecular pump and touchdown bearing device
DE102007027711A1 (de) 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
EP2255711A1 (de) * 2009-03-17 2010-12-01 Koninklijke Philips Electronics N.V. Staubsauger
WO2011024528A1 (ja) * 2009-08-28 2011-03-03 エドワーズ株式会社 真空ポンプ及び真空ポンプに使用される部材
JP5483684B2 (ja) * 2009-09-03 2014-05-07 株式会社大阪真空機器製作所 分子ポンプ
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
CN102425562B (zh) * 2011-12-05 2014-04-30 北京中科科仪股份有限公司 一种磁悬浮分子泵动平衡方法
CN102425561B (zh) * 2011-12-05 2014-04-30 北京中科科仪股份有限公司 一种磁悬浮分子泵动平衡方法
FR2984972A1 (fr) * 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
CN102594016B (zh) * 2012-03-20 2013-06-12 大连交通大学 机电集成章动活齿传动装置
DE102012222230A1 (de) * 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
EP3034881B1 (de) * 2014-12-18 2018-10-31 Pfeiffer Vacuum GmbH Vakuumpumpe
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve
EP3640481B1 (de) * 2018-10-15 2023-05-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2579791B (en) * 2018-12-13 2021-07-14 Edwards Ltd Vacuum pump with variable axial position
KR102231059B1 (ko) * 2019-03-19 2021-03-24 엘지전자 주식회사 공기조화기
KR102279938B1 (ko) * 2019-03-19 2021-07-22 엘지전자 주식회사 공기조화기
US20220205449A1 (en) * 2019-04-25 2022-06-30 Shimadzu Corporation Vacuum Pump
JP7347964B2 (ja) * 2019-05-30 2023-09-20 エドワーズ株式会社 真空ポンプ及び該真空ポンプに備えられた保護部
JP7371852B2 (ja) * 2019-07-17 2023-10-31 エドワーズ株式会社 真空ポンプ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2709002C3 (de) * 1977-03-02 1980-09-11 Danfoss A/S, Nordborg (Daenemark) Verdichteraggregat, insbesondere für Kältemaschinen
DE2847930A1 (de) * 1978-11-04 1980-05-14 Teldix Gmbh Magnetische lagereinrichtung
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPS61294191A (ja) 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
DE3537822A1 (de) 1985-10-24 1987-04-30 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe mit gehaeuse und rotor
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
FR2659395B1 (fr) 1990-03-07 1992-05-15 Cit Alcatel Pompe a vide a suspension magnetique.
JP3046533B2 (ja) 1995-10-11 2000-05-29 株式会社荏原製作所 軸受ユニット

Also Published As

Publication number Publication date
EP1118774B1 (de) 2006-09-20
US20010012488A1 (en) 2001-08-09
KR100732275B1 (ko) 2007-06-25
JP2001241393A (ja) 2001-09-07
EP1118774A3 (de) 2002-10-30
US6575713B2 (en) 2003-06-10
EP1118774A2 (de) 2001-07-25
DE60030833T2 (de) 2007-03-29
KR20010062597A (ko) 2001-07-07

Similar Documents

Publication Publication Date Title
DE60030833D1 (de) Vakuumpumpe
DE69821453D1 (de) Vakuumpumpen
DE60226377D1 (de) Vakuumpumpe
DE69924558D1 (de) Vakuumpumpe
DE69920428D1 (de) Ansaugleitung
DE60237942D1 (de) Vakuumpumpe
DE60234987D1 (de) Vakuumpumpe
DE69925989D1 (de) Kompaktpumpe
DE50010984D1 (de) Membranpumpe
DE59902761D1 (de) Vacuumpumpe
DE59805694D1 (de) Vakuumpumpe
DE19981942D2 (de) Vakuumpumpe
DE59911747D1 (de) Sauganlage
DE59909305D1 (de) Sauganlage
DE59914882D1 (de) Pumpenaggregat
DE50005187D1 (de) Flügelzellenvakuumpumpe
DE60044132D1 (de) Achslose rohrpumpe
DE19882987T1 (de) Vakuumpumpe
DE69820824D1 (de) Vakuumpumpen
NO20004623L (no) Vakuumavløpssystem
DE69928172D1 (de) Vacuumpumpe
ITMI991726A0 (it) Pompa sottovuoto
DE60233458D1 (de) Vakuumpumpe
DE50208630D1 (de) Vakuumpumpe
DE60101368D1 (de) Vakuumpumpe

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., TOKIO, JP

8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP