DE60237942D1 - Vakuumpumpe - Google Patents
VakuumpumpeInfo
- Publication number
- DE60237942D1 DE60237942D1 DE60237942T DE60237942T DE60237942D1 DE 60237942 D1 DE60237942 D1 DE 60237942D1 DE 60237942 T DE60237942 T DE 60237942T DE 60237942 T DE60237942 T DE 60237942T DE 60237942 D1 DE60237942 D1 DE 60237942D1
- Authority
- DE
- Germany
- Prior art keywords
- vacuum pump
- vacuum
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001189448A JP4250353B2 (ja) | 2001-06-22 | 2001-06-22 | 真空ポンプ |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60237942D1 true DE60237942D1 (de) | 2010-11-25 |
Family
ID=19028364
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60237942T Expired - Lifetime DE60237942D1 (de) | 2001-06-22 | 2002-06-18 | Vakuumpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US6840736B2 (de) |
EP (1) | EP1270949B1 (de) |
JP (1) | JP4250353B2 (de) |
KR (1) | KR100732281B1 (de) |
DE (1) | DE60237942D1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0309830D0 (en) | 2003-04-29 | 2003-06-04 | Boc Group Plc | A vacuum pump |
GB0402625D0 (en) | 2004-02-06 | 2004-03-10 | Boc Group Plc | Vibration damper |
JP5046647B2 (ja) * | 2004-10-15 | 2012-10-10 | エドワーズ株式会社 | ダンパおよび真空ポンプ |
DE102005052792B4 (de) * | 2004-11-24 | 2017-12-14 | Pfeiffer Vacuum Gmbh | Splitterschutz für Vakuumpumpe mit schnelldrehendem Rotor |
JP2006144783A (ja) | 2004-11-24 | 2006-06-08 | Pfeiffer Vacuum Gmbh | 高速回転ロータを有する真空ポンプのフランジと結合可能な破損防止装置 |
MX2008012328A (es) * | 2006-03-28 | 2008-10-09 | Procter & Gamble | Sales de malato, y polimorfos de acido (3s,5s)-7-[3-amino-5-metil- piperidinil]-1-ciclopropil-1,4-dihidro-8-metoxi-4-oxo-3-quinolinc arboxilico. |
KR101084521B1 (ko) * | 2006-03-28 | 2011-11-18 | 워너 칠콧 컴퍼니 엘엘씨 | 퀴놀론 중간체를 제조하기 위한 커플링 방법 |
CA2647457C (en) * | 2006-03-28 | 2011-05-24 | The Procter & Gamble Company | A hydride reduction process for preparing quinolone intermediates |
DE102007008859A1 (de) * | 2007-02-23 | 2008-08-28 | Oerlikon Leybold Vacuum Gmbh | Vakuumleitung |
DE202008011489U1 (de) * | 2008-08-28 | 2010-01-07 | Oerlikon Leybold Vacuum Gmbh | Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe |
JP5483684B2 (ja) * | 2009-09-03 | 2014-05-07 | 株式会社大阪真空機器製作所 | 分子ポンプ |
IT1399567B1 (it) * | 2010-04-16 | 2013-04-19 | Varian Spa | Smorzatore di vibrazioni per pompe di vuoto |
KR20120003368A (ko) * | 2010-07-02 | 2012-01-10 | 무라텍 오토메이션 가부시키가이샤 | 천정 반송차의 그리퍼 장치 및 천정 반송차 |
WO2012018111A1 (ja) * | 2010-08-06 | 2012-02-09 | 株式会社島津製作所 | 真空ポンプ |
US9816530B2 (en) | 2010-11-24 | 2017-11-14 | Edwards Japan Limited | Splinter shield for vacuum pump, and vacuum pump with the splinter shield |
WO2013151015A1 (ja) * | 2012-04-04 | 2013-10-10 | 株式会社島津製作所 | 真空ポンプ |
JP6735058B2 (ja) * | 2013-07-31 | 2020-08-05 | エドワーズ株式会社 | 真空ポンプ |
DE102013110251A1 (de) * | 2013-09-17 | 2015-03-19 | Pfeiffer Vacuum Gmbh | Anordnung mit einer Vakuumpumpe sowie Verfahren zur Kompensation eines Magnetfeldes wenigstens eines in einer Vakuumpumpe angeordneten, ein magnetisches Störfeld erzeugenden Bauteiles |
DE102014103510B4 (de) | 2014-03-14 | 2016-02-25 | Pfeiffer Vacuum Gmbh | Vakuumpumpen-Dämpfer |
DE202015008803U1 (de) * | 2015-12-23 | 2017-03-24 | Leybold Gmbh | Verbindungseinrichtung |
JP6834845B2 (ja) * | 2017-08-15 | 2021-02-24 | 株式会社島津製作所 | ターボ分子ポンプ |
EP3447298B1 (de) * | 2017-08-21 | 2022-02-09 | Pfeiffer Vacuum Gmbh | Dämpfungskörper zur verbindung eine vakuumpumpe |
JP7009274B2 (ja) | 2018-03-20 | 2022-01-25 | エドワーズ株式会社 | 真空ポンプ及び真空ポンプ用ダンパ |
JP6950962B2 (ja) * | 2018-07-25 | 2021-10-13 | 株式会社不二工機 | 排水ポンプ |
KR101991909B1 (ko) * | 2018-10-05 | 2019-06-24 | (주)오메가오토메이션 | 진공펌프의 수납조립체 |
CN112789408B (zh) * | 2018-10-05 | 2023-09-22 | 欧米茄自动化有限公司 | 水环式真空泵的收纳组件 |
GB2579791B (en) * | 2018-12-13 | 2021-07-14 | Edwards Ltd | Vacuum pump with variable axial position |
JP7378697B2 (ja) * | 2019-03-26 | 2023-11-14 | エドワーズ株式会社 | 真空ポンプ |
WO2020195942A1 (ja) * | 2019-03-26 | 2020-10-01 | エドワーズ株式会社 | 真空ポンプ、ケーシング及び吸気口フランジ |
JP7052920B2 (ja) * | 2019-04-25 | 2022-04-12 | 株式会社島津製作所 | 真空ポンプ |
JP2021161917A (ja) * | 2020-03-31 | 2021-10-11 | エドワーズ株式会社 | 真空ポンプおよび真空ポンプの配管構造部 |
GB2598762B (en) * | 2020-09-11 | 2024-01-31 | Thermo Fisher Scient Bremen Gmbh | Coupling for connecting analytical systems with vibrational isolation |
TW202421923A (zh) * | 2020-09-30 | 2024-06-01 | 荷蘭商Asml荷蘭公司 | 真空系統及在幫浦失效之事件中緩解損害及安全風險之系統 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3239328C2 (de) * | 1982-10-23 | 1993-12-23 | Pfeiffer Vakuumtechnik | Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung |
DE3537822A1 (de) * | 1985-10-24 | 1987-04-30 | Leybold Heraeus Gmbh & Co Kg | Vakuumpumpe mit gehaeuse und rotor |
US4926648A (en) * | 1988-03-07 | 1990-05-22 | Toshiba Corp. | Turbomolecular pump and method of operating the same |
JP2662341B2 (ja) * | 1992-05-20 | 1997-10-08 | 浜松ホトニクス株式会社 | 電子増倍管 |
JP3046533B2 (ja) * | 1995-10-11 | 2000-05-29 | 株式会社荏原製作所 | 軸受ユニット |
US6213737B1 (en) * | 1997-04-18 | 2001-04-10 | Ebara Corporation | Damper device and turbomolecular pump with damper device |
IT1297347B1 (it) * | 1997-12-24 | 1999-09-01 | Varian Spa | Pompa da vuoto. |
JP2001241393A (ja) | 1999-12-21 | 2001-09-07 | Seiko Seiki Co Ltd | 真空ポンプ |
-
2001
- 2001-06-22 JP JP2001189448A patent/JP4250353B2/ja not_active Expired - Lifetime
-
2002
- 2002-06-18 EP EP02254241A patent/EP1270949B1/de not_active Expired - Lifetime
- 2002-06-18 DE DE60237942T patent/DE60237942D1/de not_active Expired - Lifetime
- 2002-06-21 KR KR1020020034932A patent/KR100732281B1/ko active IP Right Grant
- 2002-06-21 US US10/177,834 patent/US6840736B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20030007862A1 (en) | 2003-01-09 |
KR100732281B1 (ko) | 2007-06-25 |
EP1270949A1 (de) | 2003-01-02 |
JP2003003988A (ja) | 2003-01-08 |
EP1270949B1 (de) | 2010-10-13 |
JP4250353B2 (ja) | 2009-04-08 |
US6840736B2 (en) | 2005-01-11 |
KR20030001300A (ko) | 2003-01-06 |
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