IT1399567B1 - Smorzatore di vibrazioni per pompe di vuoto - Google Patents

Smorzatore di vibrazioni per pompe di vuoto

Info

Publication number
IT1399567B1
IT1399567B1 ITTO2010A000313A ITTO20100313A IT1399567B1 IT 1399567 B1 IT1399567 B1 IT 1399567B1 IT TO2010A000313 A ITTO2010A000313 A IT TO2010A000313A IT TO20100313 A ITTO20100313 A IT TO20100313A IT 1399567 B1 IT1399567 B1 IT 1399567B1
Authority
IT
Italy
Prior art keywords
vibration damper
vacuum pumps
pumps
vacuum
damper
Prior art date
Application number
ITTO2010A000313A
Other languages
English (en)
Inventor
Silvio Giors
Carmelo Quartarone
Luca Bonmassar
Vincenzo Pandolfo
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=43216324&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IT1399567(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian Spa filed Critical Varian Spa
Priority to ITTO2010A000313A priority Critical patent/IT1399567B1/it
Priority to EP11155766.6A priority patent/EP2410184B1/en
Priority to JP2011045140A priority patent/JP2011226466A/ja
Priority to US13/072,997 priority patent/US8794678B2/en
Publication of ITTO20100313A1 publication Critical patent/ITTO20100313A1/it
Application granted granted Critical
Publication of IT1399567B1 publication Critical patent/IT1399567B1/it
Priority to US14/228,137 priority patent/US9995421B2/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • F16L55/02Energy absorbers; Noise absorbers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/66Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00Springs
    • F16F1/36Springs made of rubber or other material having high internal friction, e.g. thermoplastic elastomers
    • F16F1/373Springs made of rubber or other material having high internal friction, e.g. thermoplastic elastomers characterised by having a particular shape
    • F16F1/3732Springs made of rubber or other material having high internal friction, e.g. thermoplastic elastomers characterised by having a particular shape having an annular or the like shape, e.g. grommet-type resilient mountings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L25/00Constructive types of pipe joints not provided for in groups F16L13/00 - F16L23/00 ; Details of pipe joints not otherwise provided for, e.g. electrically conducting or insulating means
    • F16L25/12Joints for pipes being spaced apart axially

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Vibration Prevention Devices (AREA)
  • Pipe Accessories (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
ITTO2010A000313A 2010-04-16 2010-04-16 Smorzatore di vibrazioni per pompe di vuoto IT1399567B1 (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
ITTO2010A000313A IT1399567B1 (it) 2010-04-16 2010-04-16 Smorzatore di vibrazioni per pompe di vuoto
EP11155766.6A EP2410184B1 (en) 2010-04-16 2011-02-24 Vibration damper for vacuum pumps
JP2011045140A JP2011226466A (ja) 2010-04-16 2011-03-02 真空ポンプ用の振動減衰器
US13/072,997 US8794678B2 (en) 2010-04-16 2011-03-28 Vibration damper for vacuum pumps
US14/228,137 US9995421B2 (en) 2010-04-16 2014-03-27 Vibration damper for vacuum pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2010A000313A IT1399567B1 (it) 2010-04-16 2010-04-16 Smorzatore di vibrazioni per pompe di vuoto

Publications (2)

Publication Number Publication Date
ITTO20100313A1 ITTO20100313A1 (it) 2011-10-17
IT1399567B1 true IT1399567B1 (it) 2013-04-19

Family

ID=43216324

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2010A000313A IT1399567B1 (it) 2010-04-16 2010-04-16 Smorzatore di vibrazioni per pompe di vuoto

Country Status (4)

Country Link
US (2) US8794678B2 (it)
EP (1) EP2410184B1 (it)
JP (1) JP2011226466A (it)
IT (1) IT1399567B1 (it)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1399567B1 (it) 2010-04-16 2013-04-19 Varian Spa Smorzatore di vibrazioni per pompe di vuoto
DE102012112492A1 (de) * 2012-12-18 2014-06-18 Pfeiffer Vacuum Gmbh Vakuumsystem
KR200475369Y1 (ko) 2013-07-01 2014-11-26 한국남부발전 주식회사 순환수펌프 축 정렬용 기구
DE102014103510B4 (de) * 2014-03-14 2016-02-25 Pfeiffer Vacuum Gmbh Vakuumpumpen-Dämpfer
DE202015008803U1 (de) 2015-12-23 2017-03-24 Leybold Gmbh Verbindungseinrichtung
CN107044430B (zh) * 2016-02-05 2021-10-15 埃地沃兹日本有限公司 真空泵及被用于其中的转子及定子
GB2552324B (en) * 2016-07-18 2019-06-12 Edwards Ltd Vibration damping connector systems
EP3318763B1 (de) * 2016-11-04 2020-07-01 Pfeiffer Vacuum Gmbh Vakuumdichtung, doppeldichtung, vakuumsystem und vakuumpumpe
IT201800002429A1 (it) * 2018-02-06 2019-08-06 Sapa S P A Dispositivo antivibrante per cover motore
JP7009274B2 (ja) * 2018-03-20 2022-01-25 エドワーズ株式会社 真空ポンプ及び真空ポンプ用ダンパ
GB2598762B (en) * 2020-09-11 2024-01-31 Thermo Fisher Scient Bremen Gmbh Coupling for connecting analytical systems with vibrational isolation
TW202421923A (zh) * 2020-09-30 2024-06-01 荷蘭商Asml荷蘭公司 真空系統及在幫浦失效之事件中緩解損害及安全風險之系統
CN112922908B (zh) * 2021-01-29 2022-08-26 安徽工程大学 一种运用在离心泵中的减振器
US11832728B2 (en) * 2021-08-24 2023-12-05 Sleep Number Corporation Controlling vibration transmission within inflation assemblies
CN113700966B (zh) * 2021-08-31 2022-11-08 厦门振为科技有限公司 一种基于粒子阻尼的法兰用减振连接装置
WO2023192181A1 (en) * 2022-03-28 2023-10-05 Baker Hughes Oilfield Operations Llc Particle damper for electric submersible pumps

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB454969A (en) 1935-04-12 1936-10-12 Lamson Pneumatic Tube Co Improvements in and relating to static vacuum or suction cleaning installations
US3189372A (en) * 1962-05-24 1965-06-15 Shell Oil Co Flexible pipe joint having deflection limiting means
US3590852A (en) 1968-04-08 1971-07-06 Kunio Yamane Air pump
US3517951A (en) * 1969-01-09 1970-06-30 Christy Metal Products Inc Pipe coupling
US4036512A (en) * 1974-10-01 1977-07-19 Robert Arthur Francis Pipe joints
US4332404A (en) * 1980-08-27 1982-06-01 Metal Bellows Corporation Flexible tubing coupling
US5516122A (en) * 1993-12-10 1996-05-14 Caffee; Barry K. Ultra high vacuum elastomer seal
JP4250353B2 (ja) 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
EP1533530B1 (en) * 2003-11-18 2006-04-26 VARIAN S.p.A. Vacuum pump provided with vibration damper
DE102004012677A1 (de) 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem
DE102004044775A1 (de) * 2004-09-16 2006-04-06 Leybold Vacuum Gmbh Vakuumpumpen-Schwingungsdämpfer
KR20070084156A (ko) 2004-12-20 2007-08-24 비오씨 에드워즈 가부시키가이샤 단부 간의 접속 구조 및 상기 구조를 적용한 진공 시스템
DE102005019054A1 (de) * 2005-04-23 2006-10-26 Pfeiffer Vacuum Gmbh Schwingungsreduzierendes Bauteil und damit ausgerüstetes Vakuumpumpsystem
WO2008111335A1 (ja) * 2007-03-13 2008-09-18 Edwards Japan Limited 真空ポンプ防振構造とその構造を備えた真空ポンプ
IT1399567B1 (it) 2010-04-16 2013-04-19 Varian Spa Smorzatore di vibrazioni per pompe di vuoto
JP5632992B2 (ja) * 2010-11-22 2014-12-03 日本電子株式会社 ターボ分子ポンプの接続装置

Also Published As

Publication number Publication date
ITTO20100313A1 (it) 2011-10-17
EP2410184B1 (en) 2013-05-01
US20140197627A1 (en) 2014-07-17
US20110254263A1 (en) 2011-10-20
JP2011226466A (ja) 2011-11-10
US8794678B2 (en) 2014-08-05
US9995421B2 (en) 2018-06-12
EP2410184A1 (en) 2012-01-25

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