DE60300490D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE60300490D1
DE60300490D1 DE60300490T DE60300490T DE60300490D1 DE 60300490 D1 DE60300490 D1 DE 60300490D1 DE 60300490 T DE60300490 T DE 60300490T DE 60300490 T DE60300490 T DE 60300490T DE 60300490 D1 DE60300490 D1 DE 60300490D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60300490T
Other languages
English (en)
Other versions
DE60300490T2 (de
Inventor
Satoshi Okudera
Yoshiyuki Sakaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Edwards Japan Ltd filed Critical BOC Edwards Japan Ltd
Application granted granted Critical
Publication of DE60300490D1 publication Critical patent/DE60300490D1/de
Publication of DE60300490T2 publication Critical patent/DE60300490T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
DE60300490T 2002-03-12 2003-03-05 Vakuumpumpe Expired - Lifetime DE60300490T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002066845 2002-03-12
JP2002066845A JP4147042B2 (ja) 2002-03-12 2002-03-12 真空ポンプ

Publications (2)

Publication Number Publication Date
DE60300490D1 true DE60300490D1 (de) 2005-05-19
DE60300490T2 DE60300490T2 (de) 2005-09-15

Family

ID=27764489

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60300490T Expired - Lifetime DE60300490T2 (de) 2002-03-12 2003-03-05 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6866472B2 (de)
EP (1) EP1344939B1 (de)
JP (1) JP4147042B2 (de)
KR (1) KR20030074301A (de)
DE (1) DE60300490T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
JP2007309245A (ja) * 2006-05-19 2007-11-29 Boc Edwards Kk 真空ポンプ
JP4935509B2 (ja) * 2007-06-05 2012-05-23 株式会社島津製作所 ターボ分子ポンプ
WO2011024528A1 (ja) * 2009-08-28 2011-03-03 エドワーズ株式会社 真空ポンプ及び真空ポンプに使用される部材
JP6009193B2 (ja) * 2012-03-30 2016-10-19 株式会社荏原製作所 真空排気装置
JP6692635B2 (ja) * 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
JP7306845B2 (ja) * 2019-03-26 2023-07-11 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品
CN115875280A (zh) * 2021-09-29 2023-03-31 株式会社岛津制作所 真空泵

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3879169B2 (ja) * 1997-03-31 2007-02-07 株式会社島津製作所 ターボ分子ポンプ
US6332752B2 (en) * 1997-06-27 2001-12-25 Ebara Corporation Turbo-molecular pump
JP4447684B2 (ja) * 1999-01-13 2010-04-07 株式会社島津製作所 ターボ分子ポンプ
JP2000220596A (ja) * 1999-02-03 2000-08-08 Osaka Vacuum Ltd 分子ポンプ
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
JP2002155891A (ja) * 2000-11-22 2002-05-31 Seiko Instruments Inc 真空ポンプ

Also Published As

Publication number Publication date
EP1344939B1 (de) 2005-04-13
US6866472B2 (en) 2005-03-15
DE60300490T2 (de) 2005-09-15
EP1344939A1 (de) 2003-09-17
US20030175115A1 (en) 2003-09-18
KR20030074301A (ko) 2003-09-19
JP2003269371A (ja) 2003-09-25
JP4147042B2 (ja) 2008-09-10

Similar Documents

Publication Publication Date Title
DE60226377D1 (de) Vakuumpumpe
DE60237942D1 (de) Vakuumpumpe
DE60234987D1 (de) Vakuumpumpe
DE602005014706D1 (de) Vakuumpumpe
NL1022738A1 (nl) Stofzuiger.
NL1022601A1 (nl) Stofzuiger.
DE10393279D2 (de) Vakuumpumpe
DE50312630D1 (de) Turbomolekularvakuumpumpe
DE60314930D1 (de) Vakuumpumpe
DE602004029470D1 (de) Vakuumpumpe
DE50308541D1 (de) Vakuumpumpe
DE60228765D1 (de) Flügelzellenvakuumpumpe
DE60210287D1 (de) Pumpenanordnung
DE60233458D1 (de) Vakuumpumpe
DE602004011583D1 (de) Kompakte Vakuumpumpe
DE60214270T8 (de) Pumpeinheit
DE602004007325D1 (de) Vakuumpumpgerät
DE50208630D1 (de) Vakuumpumpe
GB0322883D0 (en) Vacuum pump
DE60101368D1 (de) Vakuumpumpe
DE60300490D1 (de) Vakuumpumpe
DE50305737D1 (de) Vakuumpumpe
DE50212916D1 (de) Vakuumpumpe
DE50304462D1 (de) Pumpenaggregat
DE50214282D1 (de) Turbomolekularpumpe

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., TOKIO, JP

8327 Change in the person/name/address of the patent owner

Owner name: EDWARDS JAPAN LTD., YACHIYO, CHIBA, JP