DE602005014706D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE602005014706D1
DE602005014706D1 DE602005014706T DE602005014706T DE602005014706D1 DE 602005014706 D1 DE602005014706 D1 DE 602005014706D1 DE 602005014706 T DE602005014706 T DE 602005014706T DE 602005014706 T DE602005014706 T DE 602005014706T DE 602005014706 D1 DE602005014706 D1 DE 602005014706D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005014706T
Other languages
English (en)
Inventor
Manabu Nonaka
Akihiko Wada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of DE602005014706D1 publication Critical patent/DE602005014706D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F04D29/30—Vanes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0466—Nickel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2210/00—Working fluids
    • F05D2210/10—Kind or type
    • F05D2210/12—Kind or type gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/90—Coating; Surface treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/95—Preventing corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/16—Other metals not provided for in groups F05D2300/11 - F05D2300/15
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/172—Copper alloys
    • F05D2300/1723—Nickel-Copper alloy, e.g. Monel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F05D2300/21—Oxide ceramics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611—Coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S415/00—Rotary kinetic fluid motors or pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
DE602005014706T 2004-05-10 2005-03-22 Vakuumpumpe Active DE602005014706D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004139331A JP2005320905A (ja) 2004-05-10 2004-05-10 真空ポンプ

Publications (1)

Publication Number Publication Date
DE602005014706D1 true DE602005014706D1 (de) 2009-07-16

Family

ID=34940612

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005014706T Active DE602005014706D1 (de) 2004-05-10 2005-03-22 Vakuumpumpe

Country Status (5)

Country Link
US (1) US7572096B2 (de)
EP (1) EP1596068B1 (de)
JP (1) JP2005320905A (de)
KR (1) KR101175362B1 (de)
DE (1) DE602005014706D1 (de)

Families Citing this family (32)

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Publication number Priority date Publication date Assignee Title
GB0502149D0 (en) 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
CN100445421C (zh) * 2005-07-08 2008-12-24 清华大学 溅射离子泵
US20080206079A1 (en) * 2007-02-27 2008-08-28 Jtekt Corporation Turbo-molecular pump and touchdown bearing device
US20090068008A1 (en) * 2007-09-07 2009-03-12 Shimadzu Corporation Fastening structure and rotary vacuum pump
CN101251125B (zh) * 2008-04-03 2010-10-27 湖北同方高科泵业有限公司 一种耐腐蚀水环真空泵
US20110200460A1 (en) * 2008-08-19 2011-08-18 Manabu Nonaka Vacuum pump
IT1397705B1 (it) * 2009-07-15 2013-01-24 Nuovo Pignone Spa Metodo di produzione di uno strato di rivestimento per un componente di una turbomacchina, il componente stesso e la relativa macchina
CN102597527B (zh) * 2009-08-26 2015-06-24 株式会社岛津制作所 涡轮分子泵及转子的制造方法
WO2012105116A1 (ja) * 2011-02-04 2012-08-09 エドワーズ株式会社 真空ポンプの回転体と、これに対向設置する固定部材、及び、これらを備えた真空ポンプ
US9759233B2 (en) 2011-10-31 2017-09-12 Edwards Japan Limited Stator member and vacuum pump
JP5768670B2 (ja) * 2011-11-09 2015-08-26 株式会社島津製作所 ターボ分子ポンプ装置
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
US10100414B2 (en) 2012-01-30 2018-10-16 General Electric Company Surface modified magnetic material
JP5977583B2 (ja) * 2012-05-29 2016-08-24 株式会社日本マイクロニクス 接合パッド、プローブ組立体及び接合パッドの製造方法
JP5549986B2 (ja) * 2012-07-06 2014-07-16 株式会社大阪真空機器製作所 分子ポンプ
JP6069981B2 (ja) * 2012-09-10 2017-02-01 株式会社島津製作所 ターボ分子ポンプ
JP6289148B2 (ja) * 2014-02-14 2018-03-07 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる断熱スペーサ
JP6398337B2 (ja) * 2014-06-04 2018-10-03 株式会社島津製作所 ターボ分子ポンプ
JP6391171B2 (ja) * 2015-09-07 2018-09-19 東芝メモリ株式会社 半導体製造システムおよびその運転方法
JP6981748B2 (ja) * 2016-11-24 2021-12-17 エドワーズ株式会社 真空ポンプとその回転体と静翼およびその製造方法
JP6906941B2 (ja) * 2016-12-16 2021-07-21 エドワーズ株式会社 真空ポンプとこれに用いられるステータコラムとその製造方法
JP7096006B2 (ja) * 2018-02-16 2022-07-05 エドワーズ株式会社 真空ポンプと真空ポンプの制御装置
JP7088688B2 (ja) * 2018-02-16 2022-06-21 エドワーズ株式会社 真空ポンプと真空ポンプの制御装置
JP2020023949A (ja) * 2018-08-08 2020-02-13 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる円筒部、並びにベース部
JP7292881B2 (ja) 2019-01-10 2023-06-19 エドワーズ株式会社 真空ポンプ
JP2020112080A (ja) 2019-01-10 2020-07-27 エドワーズ株式会社 真空ポンプ
JP7347964B2 (ja) * 2019-05-30 2023-09-20 エドワーズ株式会社 真空ポンプ及び該真空ポンプに備えられた保護部
JP7371852B2 (ja) * 2019-07-17 2023-10-31 エドワーズ株式会社 真空ポンプ
US11255220B1 (en) * 2019-10-02 2022-02-22 Battelle Memorial Institute Heating assemblies, heat exchange assemblies, methods for providing and/or exchanging heat, turbine combustion engines, and methods for powering turbine combustion engines
JP2022127116A (ja) * 2021-02-19 2022-08-31 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ用回転体
JP2023000161A (ja) * 2021-06-17 2023-01-04 エドワーズ株式会社 希ガス回収システム、及び、希ガス回収方法

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JPH11257276A (ja) 1998-03-09 1999-09-21 Shimadzu Corp 真空ポンプ
JP2000161286A (ja) * 1998-11-25 2000-06-13 Shimadzu Corp ターボ分子ポンプ
JP2000205181A (ja) * 1999-01-11 2000-07-25 Shimadzu Corp 真空ポンプ
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JP2001193686A (ja) * 2000-01-14 2001-07-17 Shimadzu Corp 真空ポンプ
JP2003021092A (ja) * 2001-07-03 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP4027642B2 (ja) * 2001-11-08 2007-12-26 日本パーカライジング株式会社 樹脂との耐熱接着性に優れたニッケル系表面処理皮膜
JP3974772B2 (ja) * 2001-11-16 2007-09-12 Ｂｏｃエドワーズ株式会社 真空ポンプ
JP2003254285A (ja) * 2002-02-28 2003-09-10 Boc Edwards Technologies Ltd ポンプ装置

Also Published As

Publication number Publication date
JP2005320905A (ja) 2005-11-17
KR20060047176A (ko) 2006-05-18
EP1596068A3 (de) 2007-01-10
US20050249618A1 (en) 2005-11-10
EP1596068A2 (de) 2005-11-16
EP1596068B1 (de) 2009-06-03
KR101175362B1 (ko) 2012-08-20
US7572096B2 (en) 2009-08-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition