DE60101368D1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE60101368D1
DE60101368D1 DE60101368T DE60101368T DE60101368D1 DE 60101368 D1 DE60101368 D1 DE 60101368D1 DE 60101368 T DE60101368 T DE 60101368T DE 60101368 T DE60101368 T DE 60101368T DE 60101368 D1 DE60101368 D1 DE 60101368D1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60101368T
Other languages
English (en)
Other versions
DE60101368T2 (de
Inventor
Roberto Cerruti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of DE60101368D1 publication Critical patent/DE60101368D1/de
Application granted granted Critical
Publication of DE60101368T2 publication Critical patent/DE60101368T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/02—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid
    • F04F5/04—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being liquid displacing elastic fluids
DE2001601368 2001-02-22 2001-02-22 Vakuumpumpe Expired - Lifetime DE60101368T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20010830121 EP1234982B1 (de) 2001-02-22 2001-02-22 Vakuumpumpe

Publications (2)

Publication Number Publication Date
DE60101368D1 true DE60101368D1 (de) 2004-01-15
DE60101368T2 DE60101368T2 (de) 2004-10-14

Family

ID=8184417

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2001601368 Expired - Lifetime DE60101368T2 (de) 2001-02-22 2001-02-22 Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP1234982B1 (de)
DE (1) DE60101368T2 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0201335L (sv) * 2002-05-03 2003-03-25 Piab Ab Vakuumpump och sätt att tillhandahålla undertryck
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
JP2004263635A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi 真空装置および真空ポンプ
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
DE102012220442A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
EP3267040B1 (de) 2016-07-04 2023-12-20 Pfeiffer Vacuum Gmbh Turbomolekularpumpe

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784871B2 (ja) * 1986-06-12 1995-09-13 株式会社日立製作所 真空排気装置
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.

Also Published As

Publication number Publication date
EP1234982A1 (de) 2002-08-28
DE60101368T2 (de) 2004-10-14
EP1234982B1 (de) 2003-12-03

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition