DE19882987T1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
DE19882987T1
DE19882987T1 DE19882987T DE19882987T DE19882987T1 DE 19882987 T1 DE19882987 T1 DE 19882987T1 DE 19882987 T DE19882987 T DE 19882987T DE 19882987 T DE19882987 T DE 19882987T DE 19882987 T1 DE19882987 T1 DE 19882987T1
Authority
DE
Germany
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19882987T
Other languages
English (en)
Other versions
DE19882987C2 (de
Inventor
Toshiyasu Hoshi
Masashi Yoshimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAIKO KIKAI IND CO
Original Assignee
TAIKO KIKAI IND CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TAIKO KIKAI IND CO filed Critical TAIKO KIKAI IND CO
Publication of DE19882987T1 publication Critical patent/DE19882987T1/de
Application granted granted Critical
Publication of DE19882987C2 publication Critical patent/DE19882987C2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Jet Pumps And Other Pumps (AREA)
DE19882987T 1998-03-31 1998-04-30 Vakuumpumpe Expired - Fee Related DE19882987C2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP08753798A JP3831113B2 (ja) 1998-03-31 1998-03-31 真空ポンプ
PCT/JP1998/001981 WO1999050561A1 (fr) 1998-03-31 1998-04-30 Pompe a vide

Publications (2)

Publication Number Publication Date
DE19882987T1 true DE19882987T1 (de) 2001-04-12
DE19882987C2 DE19882987C2 (de) 2002-11-07

Family

ID=13917744

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19882987T Expired - Fee Related DE19882987C2 (de) 1998-03-31 1998-04-30 Vakuumpumpe

Country Status (6)

Country Link
US (1) US6315535B1 (de)
JP (1) JP3831113B2 (de)
KR (1) KR100347228B1 (de)
DE (1) DE19882987C2 (de)
TW (1) TW362137B (de)
WO (1) WO1999050561A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001271777A (ja) * 2000-03-27 2001-10-05 Toyota Autom Loom Works Ltd 真空ポンプにおける冷却装置
FR2810375B1 (fr) * 2000-06-15 2002-11-29 Cit Alcatel Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
BE1013944A3 (nl) 2001-03-06 2003-01-14 Atlas Copco Airpower Nv Watergeinjecteerde schroefcompressor.
KR100424795B1 (ko) * 2001-08-09 2004-03-30 코웰정밀주식회사 자체순환 냉각시스템 진공펌프
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
GB0510892D0 (en) * 2005-05-27 2005-07-06 Boc Group Plc Vacuum pump
DE102008049238A1 (de) * 2008-05-30 2009-12-03 Wabco Gmbh Vorrichtung zum Betreiben eines Hilfsaggregates eines Fahrzeuges, insbesondere Nutzfahrzeuges
KR101173168B1 (ko) * 2010-11-17 2012-08-16 데이비드 김 다단형 건식 진공펌프
KR101333056B1 (ko) 2012-01-20 2013-11-26 주식회사 코디박 냉각 기능을 갖는 모터 내장형 스크루 로터 타입 진공펌프
EP3263903B1 (de) * 2015-02-25 2020-11-04 Hitachi Industrial Equipment Systems Co., Ltd. Ölfreier verdichter
KR101712962B1 (ko) * 2015-09-24 2017-03-07 이인철 냉각장치를 갖춘 진공펌프
DE102018130472A1 (de) * 2018-11-30 2020-06-04 Nidec Gpm Gmbh Schraubenspindelpumpe
FR3128745A1 (fr) * 2021-10-29 2023-05-05 Pfeiffer Vacuum Pompe à vide sèche
CN116428157A (zh) * 2023-04-13 2023-07-14 北京通嘉宏瑞科技有限公司 气体加热控制系统及气体加热控制方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61152992A (ja) 1984-12-26 1986-07-11 Hitachi Ltd スクリユ−流体機械
ES2028944T3 (es) * 1988-06-01 1992-07-16 Leybold Aktiengesellschaft Procedimiento para la vigilancia de una bomba de vacio lubrificada con aceite.
JPH02149795A (ja) * 1988-11-30 1990-06-08 Hitachi Ltd 無給油式スクリュー圧縮機
JPH0440186U (de) * 1990-03-17 1992-04-06
JPH0419385A (ja) * 1990-05-14 1992-01-23 Anlet Co Ltd 圧縮ガス流配管内蔵型まゆ型２軸多段式真空ポンプの冷却装置
JPH0440186A (ja) 1990-06-06 1992-02-10 Fujitsu Ltd 静止画像伝送方法

Also Published As

Publication number Publication date
JP3831113B2 (ja) 2006-10-11
DE19882987C2 (de) 2002-11-07
KR20010042294A (ko) 2001-05-25
KR100347228B1 (ko) 2002-08-03
TW362137B (en) 1999-06-21
JPH11280681A (ja) 1999-10-15
WO1999050561A1 (fr) 1999-10-07
US6315535B1 (en) 2001-11-13

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Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
8607 Notification of search results after publication
D2 Grant after examination
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee