FR2810375B1 - Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide - Google Patents
Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de videInfo
- Publication number
- FR2810375B1 FR2810375B1 FR0007627A FR0007627A FR2810375B1 FR 2810375 B1 FR2810375 B1 FR 2810375B1 FR 0007627 A FR0007627 A FR 0007627A FR 0007627 A FR0007627 A FR 0007627A FR 2810375 B1 FR2810375 B1 FR 2810375B1
- Authority
- FR
- France
- Prior art keywords
- generating device
- vacuum generating
- pump body
- flow control
- thermal conduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
- Sampling And Sample Adjustment (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0007627A FR2810375B1 (fr) | 2000-06-15 | 2000-06-15 | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
PCT/FR2001/001866 WO2001096744A1 (fr) | 2000-06-15 | 2001-06-15 | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
AT01945446T ATE391237T1 (de) | 2000-06-15 | 2001-06-15 | Temperaturregelung für eine vakuumvorrichtung |
US10/049,132 US6679676B2 (en) | 2000-06-15 | 2001-06-15 | Temperature control with constant cooling flow and temperature for vacuum generating device |
DE60133459T DE60133459D1 (de) | 2000-06-15 | 2001-06-15 | Temperaturregelung für eine vakuumvorrichtung |
JP2002510839A JP2004503713A (ja) | 2000-06-15 | 2001-06-15 | 一定の冷却流および温度による真空発生装置の温度制御 |
EP01945446A EP1290346B1 (fr) | 2000-06-15 | 2001-06-15 | Regulation thermique pour dispositif de generation de vide |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0007627A FR2810375B1 (fr) | 2000-06-15 | 2000-06-15 | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2810375A1 FR2810375A1 (fr) | 2001-12-21 |
FR2810375B1 true FR2810375B1 (fr) | 2002-11-29 |
Family
ID=8851283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0007627A Expired - Fee Related FR2810375B1 (fr) | 2000-06-15 | 2000-06-15 | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide |
Country Status (7)
Country | Link |
---|---|
US (1) | US6679676B2 (fr) |
EP (1) | EP1290346B1 (fr) |
JP (1) | JP2004503713A (fr) |
AT (1) | ATE391237T1 (fr) |
DE (1) | DE60133459D1 (fr) |
FR (1) | FR2810375B1 (fr) |
WO (1) | WO2001096744A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5172615B2 (ja) * | 2008-11-12 | 2013-03-27 | Ckd株式会社 | 温度制御装置 |
CN103149949B (zh) * | 2013-01-09 | 2016-08-03 | 上海空间推进研究所 | 一种基于帕尔贴效应的气体微流量控制器 |
CN117846931B (zh) * | 2024-03-08 | 2024-05-14 | 江苏纬恩复材科技有限公司 | 一种真空泵管道连接结构、热压罐及其工作方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61236123A (ja) * | 1985-04-12 | 1986-10-21 | Hitachi Ltd | 真空処理装置 |
JPS648388A (en) * | 1987-06-30 | 1989-01-12 | Oki Electric Ind Co Ltd | Vacuum pump device |
JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
FR2634829B1 (fr) * | 1988-07-27 | 1990-09-14 | Cit Alcatel | Pompe a vide |
KR950007378B1 (ko) * | 1990-04-06 | 1995-07-10 | 가부시끼 가이샤 히다찌 세이사꾸쇼 | 진공펌프 |
JPH04164188A (ja) * | 1990-10-26 | 1992-06-09 | Hitachi Ltd | 半導体製造装置排気用ターボ分子ポンプ |
JPH05118296A (ja) * | 1991-10-25 | 1993-05-14 | Hitachi Ltd | ドライ真空ポンプ |
DE59305085D1 (de) * | 1992-06-19 | 1997-02-20 | Leybold Ag | Gasreibungsvakuumpumpe |
JPH07174099A (ja) * | 1992-08-14 | 1995-07-11 | Hitachi Ltd | 真空ポンプの冷却装置 |
JP3831113B2 (ja) * | 1998-03-31 | 2006-10-11 | 大晃機械工業株式会社 | 真空ポンプ |
-
2000
- 2000-06-15 FR FR0007627A patent/FR2810375B1/fr not_active Expired - Fee Related
-
2001
- 2001-06-15 DE DE60133459T patent/DE60133459D1/de not_active Expired - Lifetime
- 2001-06-15 WO PCT/FR2001/001866 patent/WO2001096744A1/fr active IP Right Grant
- 2001-06-15 EP EP01945446A patent/EP1290346B1/fr not_active Expired - Lifetime
- 2001-06-15 AT AT01945446T patent/ATE391237T1/de not_active IP Right Cessation
- 2001-06-15 JP JP2002510839A patent/JP2004503713A/ja not_active Withdrawn
- 2001-06-15 US US10/049,132 patent/US6679676B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
WO2001096744A1 (fr) | 2001-12-20 |
JP2004503713A (ja) | 2004-02-05 |
EP1290346B1 (fr) | 2008-04-02 |
FR2810375A1 (fr) | 2001-12-21 |
DE60133459D1 (de) | 2008-05-15 |
EP1290346A1 (fr) | 2003-03-12 |
US20020106285A1 (en) | 2002-08-08 |
US6679676B2 (en) | 2004-01-20 |
ATE391237T1 (de) | 2008-04-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Nikolayev et al. | Experimental evidence of the vapor recoil mechanism in the boiling crisis | |
DE60112477D1 (de) | Proportionalventil mit einem formgedächtnislegierungsantrieb | |
CA2519399A1 (fr) | Chauffage de fluide | |
JP2001523149A (ja) | 洗濯物アイロン掛け装置 | |
US5921098A (en) | Process for the control of a refrigeration system as well as a refrigeration system and expansion valve | |
US20070108304A1 (en) | Hot water supply device | |
AU722139B2 (en) | Process for the control of a refrigeration system, as well as a refrigeration system and expansion valve | |
JP3748984B2 (ja) | 熱駆動式液圧発生装置 | |
KR20200100295A (ko) | 온도 반응 가변식 워터펌프 및 엔진 냉각 시스템 | |
FR2810375B1 (fr) | Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide | |
KR20140078438A (ko) | 차량용 전자식 서모스탯 | |
KR101066026B1 (ko) | 특정한 융해 유닛의 융해 챔버와 냉각수 시스템 내에서압력을 균일하게 하기 위한 방법 및 장치 | |
CN213854471U (zh) | 易控型水浴加热玻璃制反应容器 | |
CN207561787U (zh) | 智能温控系统及管线泡茶机 | |
KR20200073565A (ko) | 엔진 냉각시스템의 써모스탯 | |
JP4199694B2 (ja) | 複合給湯熱源システム | |
JP2004503713A5 (fr) | ||
ITMI982628A1 (it) | Valvola di lavaggio mobile termostaticamente | |
SU646315A1 (ru) | Регул тор расхода | |
KR102495572B1 (ko) | 순간 냉온수기 및 이를 포함하는 수처리장치 | |
WO2001001053A1 (fr) | Systeme d'electrovanne a dilatation electrothermique | |
SU1095007A1 (ru) | Криогенный трубопровод | |
SU787874A1 (ru) | Теплопередающее устройство | |
GB663479A (en) | Improvements relating to heating and cooling metal moulds | |
SU848957A1 (ru) | Теплообменник |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
CD | Change of name or company name | ||
ST | Notification of lapse |
Effective date: 20100226 |