ATE391237T1 - Temperaturregelung für eine vakuumvorrichtung - Google Patents

Temperaturregelung für eine vakuumvorrichtung

Info

Publication number
ATE391237T1
ATE391237T1 AT01945446T AT01945446T ATE391237T1 AT E391237 T1 ATE391237 T1 AT E391237T1 AT 01945446 T AT01945446 T AT 01945446T AT 01945446 T AT01945446 T AT 01945446T AT E391237 T1 ATE391237 T1 AT E391237T1
Authority
AT
Austria
Prior art keywords
pump body
thermal conduction
exchange pipe
liquid
flows
Prior art date
Application number
AT01945446T
Other languages
English (en)
Inventor
Francois Houze
Original Assignee
Alcatel Lucent
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent filed Critical Alcatel Lucent
Application granted granted Critical
Publication of ATE391237T1 publication Critical patent/ATE391237T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
AT01945446T 2000-06-15 2001-06-15 Temperaturregelung für eine vakuumvorrichtung ATE391237T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0007627A FR2810375B1 (fr) 2000-06-15 2000-06-15 Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide

Publications (1)

Publication Number Publication Date
ATE391237T1 true ATE391237T1 (de) 2008-04-15

Family

ID=8851283

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01945446T ATE391237T1 (de) 2000-06-15 2001-06-15 Temperaturregelung für eine vakuumvorrichtung

Country Status (7)

Country Link
US (1) US6679676B2 (de)
EP (1) EP1290346B1 (de)
JP (1) JP2004503713A (de)
AT (1) ATE391237T1 (de)
DE (1) DE60133459D1 (de)
FR (1) FR2810375B1 (de)
WO (1) WO2001096744A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5172615B2 (ja) * 2008-11-12 2013-03-27 Ｃｋｄ株式会社 温度制御装置
CN103149949B (zh) * 2013-01-09 2016-08-03 上海空间推进研究所 一种基于帕尔贴效应的气体微流量控制器
CN114439725B (zh) * 2020-11-02 2025-11-07 上海海立电器有限公司 一种压缩机用油位控制系统、工况控制系统及其应用
CN117846931B (zh) * 2024-03-08 2024-05-14 江苏纬恩复材科技有限公司 一种真空泵管道连接结构、热压罐及其工作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236123A (ja) * 1985-04-12 1986-10-21 Hitachi Ltd 真空処理装置
JPS648388A (en) * 1987-06-30 1989-01-12 Oki Electric Ind Co Ltd Vacuum pump device
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JPH04164188A (ja) * 1990-10-26 1992-06-09 Hitachi Ltd 半導体製造装置排気用ターボ分子ポンプ
JPH05118296A (ja) * 1991-10-25 1993-05-14 Hitachi Ltd ドライ真空ポンプ
WO1994000694A1 (de) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Gasreibungsvakuumpumpe
JPH07174099A (ja) * 1992-08-14 1995-07-11 Hitachi Ltd 真空ポンプの冷却装置
JP3831113B2 (ja) * 1998-03-31 2006-10-11 大晃機械工業株式会社 真空ポンプ

Also Published As

Publication number Publication date
WO2001096744A1 (fr) 2001-12-20
FR2810375A1 (fr) 2001-12-21
EP1290346A1 (de) 2003-03-12
US6679676B2 (en) 2004-01-20
DE60133459D1 (de) 2008-05-15
FR2810375B1 (fr) 2002-11-29
EP1290346B1 (de) 2008-04-02
US20020106285A1 (en) 2002-08-08
JP2004503713A (ja) 2004-02-05

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Legal Events

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