DE19882986T1 - Trockenvakuumpumpe - Google Patents

Trockenvakuumpumpe

Info

Publication number
DE19882986T1
DE19882986T1 DE19882986T DE19882986T DE19882986T1 DE 19882986 T1 DE19882986 T1 DE 19882986T1 DE 19882986 T DE19882986 T DE 19882986T DE 19882986 T DE19882986 T DE 19882986T DE 19882986 T1 DE19882986 T1 DE 19882986T1
Authority
DE
Germany
Prior art keywords
vacuum pump
dry vacuum
dry
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
DE19882986T
Other languages
English (en)
Other versions
DE19882986B4 (de
Inventor
Masaru Mito
Masashi Yoshimura
Masaaki Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TAIKO KIKAI IND CO
Original Assignee
TAIKO KIKAI IND CO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP07422898A external-priority patent/JP3831108B2/ja
Priority claimed from JP09322098A external-priority patent/JP3831115B2/ja
Priority claimed from JP09322198A external-priority patent/JP3831116B2/ja
Application filed by TAIKO KIKAI IND CO filed Critical TAIKO KIKAI IND CO
Publication of DE19882986T1 publication Critical patent/DE19882986T1/de
Application granted granted Critical
Publication of DE19882986B4 publication Critical patent/DE19882986B4/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/005—Means for transmitting movement from the prime mover to driven parts of the pump, e.g. clutches, couplings, transmissions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F04C13/001—Pumps for particular liquids
    • F04C13/002—Pumps for particular liquids for homogeneous viscous liquids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0003—Sealing arrangements in rotary-piston machines or pumps
    • F04C15/0034—Sealing arrangements in rotary-piston machines or pumps for other than the working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C15/0038—Shaft sealings specially adapted for rotary-piston machines or pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0088—Lubrication
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
    • F04C15/0096—Heating; Cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/082—Details specially related to intermeshing engagement type machines or pumps
    • F04C2/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2/00—Rotary-piston machines or pumps
    • F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C2/18—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0466—Nickel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2203/00—Non-metallic inorganic materials
    • F05C2203/08—Ceramics; Oxides
    • F05C2203/0804—Non-oxide ceramics
    • F05C2203/0808—Carbon, e.g. graphite

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
DE19882986T 1998-03-23 1998-06-26 Trockenvakuumpumpe Expired - Fee Related DE19882986B4 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP10/74228 1998-03-23
JP07422898A JP3831108B2 (ja) 1998-03-23 1998-03-23 ドライ真空ポンプ
JP10/93220 1998-04-06
JP09322098A JP3831115B2 (ja) 1998-04-06 1998-04-06 ドライ真空ポンプ
JP09322198A JP3831116B2 (ja) 1998-04-06 1998-04-06 ドライ真空ポンプ
JP10/93221 1998-04-06
PCT/JP1998/002864 WO1999049220A1 (fr) 1998-03-23 1998-06-26 Pompe d'aspiration de matieres seches

Publications (2)

Publication Number Publication Date
DE19882986T1 true DE19882986T1 (de) 2001-03-29
DE19882986B4 DE19882986B4 (de) 2007-12-27

Family

ID=27301446

Family Applications (1)

Application Number Title Priority Date Filing Date
DE19882986T Expired - Fee Related DE19882986B4 (de) 1998-03-23 1998-06-26 Trockenvakuumpumpe

Country Status (5)

Country Link
US (2) US6371744B1 (de)
KR (1) KR100386753B1 (de)
DE (1) DE19882986B4 (de)
TW (1) TW483986B (de)
WO (1) WO1999049220A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1388693A3 (de) * 2002-08-09 2004-05-26 LEDERLE GmbH PUMPEN- UND MASCHINENFABRIK Wellendichtung

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3668616B2 (ja) * 1998-09-17 2005-07-06 株式会社日立産機システム オイルフリースクリュー圧縮機
JP2002206493A (ja) 2000-11-10 2002-07-26 Ebara Corp スクリュー式ドライ真空ポンプ
KR100424795B1 (ko) * 2001-08-09 2004-03-30 코웰정밀주식회사 자체순환 냉각시스템 진공펌프
TWI277694B (en) * 2002-02-28 2007-04-01 Teijin Seiki Co Ltd Vacuum exhausting apparatus
WO2005124155A1 (ja) * 2004-06-18 2005-12-29 Tohoku University スクリュー真空ポンプ
DE102005022470B4 (de) * 2005-05-14 2015-04-02 Pfeiffer Vacuum Gmbh Rotorpaar für Schraubenverdichter
JP2008088912A (ja) * 2006-10-03 2008-04-17 Tohoku Univ メカニカルポンプおよびその製造方法
FR2939483A1 (fr) * 2008-12-08 2010-06-11 Alcatel Lucent Pompe a vide de type seche, pignon de synchronisation et procede de montage associes
GB0907298D0 (en) * 2009-04-29 2009-06-10 Edwards Ltd Vacuum pump
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
JP5698039B2 (ja) * 2011-03-11 2015-04-08 株式会社神戸製鋼所 水噴射式スクリュ圧縮機
KR101315842B1 (ko) * 2011-12-06 2013-10-08 주식회사 베큐마이즈 스크류 로터를 구비하는 진공 펌프
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
CN102644601B (zh) * 2012-04-16 2014-12-17 北京朗禾众鑫真空科技有限公司 新型立式无油泵
WO2014138519A1 (en) * 2013-03-07 2014-09-12 Ti Group Automotive Systems, L.L.C. Coupling element for a screw pump
WO2016022392A1 (en) * 2014-08-08 2016-02-11 Eaton Corporation Energy recovery device with heat dissipation mechanisms
GB2533621B (en) 2014-12-23 2019-04-17 Edwards Ltd Rotary screw vacuum pumps
CN104632639B (zh) * 2014-12-30 2017-01-18 中国矿业大学 一种全壁面加热双速螺旋假塑性流体泵送装置及方法
DE102015101443B3 (de) * 2015-02-02 2016-05-12 Leistritz Pumpen Gmbh Kraftstoffpumpe
JP6391171B2 (ja) * 2015-09-07 2018-09-19 東芝メモリ株式会社 半導体製造システムおよびその運転方法
FR3051852B1 (fr) * 2016-05-24 2018-06-15 Pfeiffer Vacuum Stator, arbre rotatif, pompe a vide de type seche et procedes de fabrication associes
JP2019049229A (ja) * 2017-09-11 2019-03-28 株式会社Ｓｏｋｅｎ スクリュポンプ
WO2019148007A1 (en) * 2018-01-26 2019-08-01 Waterblasting, Llc Pump for melted thermoplastic materials
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置
DE102019103470A1 (de) 2019-02-12 2020-08-13 Nidec Gpm Gmbh Elektrische Schraubenspindel-Kühlmittelpumpe
CN110552879B (zh) * 2019-09-29 2024-05-24 陈行 一种四螺杆泵
EP4103841A1 (de) 2020-02-12 2022-12-21 Nova Rotors Srl Verdrängerpumpe
CN111502999B (zh) * 2020-05-11 2022-02-08 台州学院 一种干式螺杆真空泵及其螺杆转子

Family Cites Families (12)

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Publication number Priority date Publication date Assignee Title
DE594691C (de) * 1933-01-04 1934-03-21 Aeg Schraubenverdichter, bestehend aus rechts- und linksgaengigen, miteinander in Eingriff stehenden, durch Zahnraeder gekuppelten Schrauben
DE1800326U (de) * 1956-02-17 1959-11-19 Heraeus Gmbh W C Korrosionsfeste vakuum-rootspumpe.
JPS5991490U (ja) * 1982-12-13 1984-06-21 日本ピストンリング株式会社 回転圧縮機
JPS60142081A (ja) 1983-12-29 1985-07-27 Hitachi Ltd 圧縮機
JPS60142081U (ja) * 1984-02-29 1985-09-20 株式会社小松製作所 油圧ブレ−カのチゼル
JP2622684B2 (ja) 1987-04-28 1997-06-18 株式会社日立製作所 圧縮機用複合スクリューロータの製造法
JP2515831B2 (ja) * 1987-12-18 1996-07-10 株式会社日立製作所 スクリユ―真空ポンプ
US5154595A (en) * 1989-01-31 1992-10-13 Aisin Seiki Kabushiki Kaisha Fixing mechanism for a timing gear system
JP2534167Y2 (ja) 1990-10-25 1997-04-30 石川島播磨重工業株式会社 タイミングギアの固定装置
JPH04203386A (ja) 1990-11-30 1992-07-23 Hitachi Ltd スクリユー真空ポンプ
US5443644A (en) * 1994-03-15 1995-08-22 Kashiyama Industry Co., Ltd. Gas exhaust system and pump cleaning system for a semiconductor manufacturing apparatus
JP2904719B2 (ja) * 1995-04-05 1999-06-14 株式会社荏原製作所 スクリューロータ及びその歯形の軸直角断面形状を決定する方法並びにスクリュー機械

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1388693A3 (de) * 2002-08-09 2004-05-26 LEDERLE GmbH PUMPEN- UND MASCHINENFABRIK Wellendichtung

Also Published As

Publication number Publication date
US20020131884A1 (en) 2002-09-19
WO1999049220A1 (fr) 1999-09-30
TW483986B (en) 2002-04-21
US6371744B1 (en) 2002-04-16
KR20010024955A (ko) 2001-03-26
KR100386753B1 (ko) 2003-06-09
US6554593B2 (en) 2003-04-29
DE19882986B4 (de) 2007-12-27

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