JP7141332B2 - 真空ポンプ装置 - Google Patents
真空ポンプ装置 Download PDFInfo
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- JP7141332B2 JP7141332B2 JP2018247321A JP2018247321A JP7141332B2 JP 7141332 B2 JP7141332 B2 JP 7141332B2 JP 2018247321 A JP2018247321 A JP 2018247321A JP 2018247321 A JP2018247321 A JP 2018247321A JP 7141332 B2 JP7141332 B2 JP 7141332B2
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- pair
- vacuum pump
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- 239000007789 gas Substances 0.000 claims description 32
- 239000007787 solid Substances 0.000 claims description 13
- 238000005086 pumping Methods 0.000 claims description 11
- 210000000078 claw Anatomy 0.000 claims description 8
- 239000010687 lubricating oil Substances 0.000 description 69
- 230000002093 peripheral effect Effects 0.000 description 37
- 238000000034 method Methods 0.000 description 13
- 238000001816 cooling Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000000717 retained effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000001050 lubricating effect Effects 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/02—Arrangements of bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/0085—Prime movers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2210/00—Fluid
- F04C2210/22—Fluid gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/50—Bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/19—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/70—Safety, emergency conditions or requirements
- F04C2270/701—Cold start
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2280/00—Arrangements for preventing or removing deposits or corrosion
- F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2240/00—Components
- F05B2240/50—Bearings
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Description
一態様では、前記真空ポンプ装置は、前記モータに電気的に接続された運転制御装置を備えており、前記運転制御装置は、前記モータの起動および停止を繰り返すことによって、前記真空ポンプ装置の運転を完全に停止する前に、前記ポンプロータの回転および停止動作を実行する。
一態様では、前記真空ポンプ装置は、前記一対のポンプロータが収容されるポンプケーシングと、前記ポンプケーシングの外面に取り付けられた温度センサと、を備えており、前記運転制御装置は、前記温度センサによって測定された前記ポンプケーシングの温度変化に基づいて、前記モータの起動および停止を繰り返す。
2 吸気ポート
4 排気ポート
5 ポンプケーシング
6a,6b,6c,6d ポンプロータ
8 軸
10 モータ
12 運転制御装置
13 軸受(自由側軸受)
15 軸受装置
20,21 軸受(固定側軸受)
25 タイミングギヤ
26 ギヤカバー
30 モータロータ
31 モータステータ
32 モータフレーム
35 気体流路
40 軸受ハウジング
41 スペーサ
42 固定具
43 シール部材
45 回転円筒
45a 外周面
45b 上端
45c 下端
46 軸受ケーシング
50 サイドカバー
50a 貫通穴
51 ケース部材
51a 上端壁
52 軸受サポート部材
52a 流通穴
55 ピストンリング
56 内周壁
57 外周壁
58 底壁
59 貫通穴
60 湾曲部
61 テーパー部
64 ハウジング本体
65 受け皿
65a 貫通穴
66 内側環状突起
67 外側環状突起
68 接続部位
70 スロープ
70a 上端部
70b 下端部
70c すくい上げ面
71 内側円筒部
72 外側円筒部
73 環状リング部
74 圧力調整穴
75 内側下向きリブ
75a 下端
76 中間側下向きリブ
76a 下端
77 外側下向きリブ
77a 下端
80 内側上向きリブ
80a 通過部
81 外側上向きリブ
81a 通過部
85,86 接触シール
90 水冷ジャケット
100 軸受支持部材
Claims (4)
- 凝縮により固形物となる可能性があるガスを排気する真空ポンプ装置であって、
互いに対向して配置され、かつルーツロータまたはクローロータである、一対のポンプロータと、
前記一対のポンプロータが収容されるポンプケーシングと、
前記一対のポンプロータが固定された、鉛直方向に延びる一対の軸と、
前記一対のポンプロータを回転させるモータと、
前記モータに電気的に接続された運転制御装置と、
前記一対の軸に固定され、かつ互いに噛み合う一対のタイミングギヤと、
前記一対のポンプロータの上方に配置された、前記軸の軸線方向への移動が制限された固定側軸受と、
前記固定側軸受とともに、前記軸を支持する、前記軸の軸線方向への移動が可能な自由側軸受と、を備え、
前記ポンプケーシングは、前記ポンプケーシングに収容された前記一対のポンプロータとの間に、前記軸の軸線方向に対して垂直な方向における横方向隙間を形成しており、
前記運転制御装置は、前記モータの起動および停止を繰り返すことによって、前記真空ポンプ装置の運転を完全に停止する前に、かつ前記モータが駆動できなくなる程に前記軸の上方向への圧縮力が大きくなる前に、前記ポンプロータの回転および停止動作を実行する、真空ポンプ装置。 - 前記モータは、前記一対のポンプロータの上方に配置されている、請求項1に記載の真空ポンプ装置。
- 前記運転制御装置は、所定の時間間隔で、前記モータの起動および停止を繰り返す、請求項1に記載の真空ポンプ装置。
- 前記真空ポンプ装置は、前記ポンプケーシングの外面に取り付けられた温度センサを備えており、
前記運転制御装置は、前記温度センサによって測定された前記ポンプケーシングの温度変化に基づいて、前記モータの起動および停止を繰り返す、請求項1に記載の真空ポンプ装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018247321A JP7141332B2 (ja) | 2018-12-28 | 2018-12-28 | 真空ポンプ装置 |
KR1020190169397A KR20200083239A (ko) | 2018-12-28 | 2019-12-18 | 진공 펌프 장치 |
EP19217767.3A EP3674551B1 (en) | 2018-12-28 | 2019-12-18 | Vacuum pump apparatus |
TW108146974A TWI826620B (zh) | 2018-12-28 | 2019-12-20 | 真空泵裝置 |
CN201911348087.0A CN111502954B (zh) | 2018-12-28 | 2019-12-24 | 真空泵装置 |
JP2022109672A JP2022128522A (ja) | 2018-12-28 | 2022-07-07 | 真空ポンプ装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018247321A JP7141332B2 (ja) | 2018-12-28 | 2018-12-28 | 真空ポンプ装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022109672A Division JP2022128522A (ja) | 2018-12-28 | 2022-07-07 | 真空ポンプ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020106005A JP2020106005A (ja) | 2020-07-09 |
JP7141332B2 true JP7141332B2 (ja) | 2022-09-22 |
Family
ID=69525985
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2018247321A Active JP7141332B2 (ja) | 2018-12-28 | 2018-12-28 | 真空ポンプ装置 |
JP2022109672A Pending JP2022128522A (ja) | 2018-12-28 | 2022-07-07 | 真空ポンプ装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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JP2022109672A Pending JP2022128522A (ja) | 2018-12-28 | 2022-07-07 | 真空ポンプ装置 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP3674551B1 (ja) |
JP (2) | JP7141332B2 (ja) |
KR (1) | KR20200083239A (ja) |
CN (1) | CN111502954B (ja) |
TW (1) | TWI826620B (ja) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006504033A (ja) | 2002-10-24 | 2006-02-02 | ザ ビーオーシー グループ ピーエルシー | 改良乾式ポンプ |
JP2009097349A (ja) | 2007-10-12 | 2009-05-07 | Ebara Corp | 真空ポンプの運転制御装置及び運転停止方法 |
WO2010061939A1 (ja) | 2008-11-25 | 2010-06-03 | 株式会社 荏原製作所 | ドライ真空ポンプユニット |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB809443A (en) * | 1954-02-27 | 1959-02-25 | Heraeus Gmbh W C | Improvements in or relating to rotary high-vacuum pumps |
JPS52139413U (ja) * | 1976-04-07 | 1977-10-22 | ||
DE3705912A1 (de) * | 1987-02-24 | 1988-09-01 | Alcatel Hochvakuumtechnik Gmbh | Hochvakuumpumpe mit einem glockenfoermigen rotor |
JPH0653793A (ja) | 1992-08-03 | 1994-02-25 | Matsushita Electric Ind Co Ltd | 位相比較器 |
JPH0653793U (ja) | 1992-09-19 | 1994-07-22 | 樫山工業株式会社 | 半導体製造用の排気系装置 |
KR100386753B1 (ko) * | 1998-03-23 | 2003-06-09 | 다이코 기카이 고교 가부시키가이샤 | 드라이 진공펌프 |
CN1399076A (zh) * | 2001-07-27 | 2003-02-26 | 大晃机械工业株式会社 | 真空泵 |
JP4702236B2 (ja) * | 2006-09-12 | 2011-06-15 | 株式会社豊田自動織機 | 真空ポンプの運転停止制御方法及び運転停止制御装置 |
JP5073754B2 (ja) * | 2007-11-14 | 2012-11-14 | 株式会社アルバック | 多段式ドライポンプ |
EP2532895B1 (de) * | 2011-06-06 | 2014-02-26 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe mit einseitiger Lagerung der Pumpenrotoren |
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2018
- 2018-12-28 JP JP2018247321A patent/JP7141332B2/ja active Active
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2019
- 2019-12-18 EP EP19217767.3A patent/EP3674551B1/en active Active
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- 2019-12-20 TW TW108146974A patent/TWI826620B/zh active
- 2019-12-24 CN CN201911348087.0A patent/CN111502954B/zh active Active
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2006504033A (ja) | 2002-10-24 | 2006-02-02 | ザ ビーオーシー グループ ピーエルシー | 改良乾式ポンプ |
JP2009097349A (ja) | 2007-10-12 | 2009-05-07 | Ebara Corp | 真空ポンプの運転制御装置及び運転停止方法 |
WO2010061939A1 (ja) | 2008-11-25 | 2010-06-03 | 株式会社 荏原製作所 | ドライ真空ポンプユニット |
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JP2020106005A (ja) | 2020-07-09 |
EP3674551B1 (en) | 2024-01-24 |
JP2022128522A (ja) | 2022-09-01 |
EP3674551A1 (en) | 2020-07-01 |
TWI826620B (zh) | 2023-12-21 |
CN111502954A (zh) | 2020-08-07 |
TW202032014A (zh) | 2020-09-01 |
CN111502954B (zh) | 2023-07-18 |
KR20200083239A (ko) | 2020-07-08 |
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