FR2668209B1 - Pompe d'aspiration moleculaire. - Google Patents

Pompe d'aspiration moleculaire.

Info

Publication number
FR2668209B1
FR2668209B1 FR909012905A FR9012905A FR2668209B1 FR 2668209 B1 FR2668209 B1 FR 2668209B1 FR 909012905 A FR909012905 A FR 909012905A FR 9012905 A FR9012905 A FR 9012905A FR 2668209 B1 FR2668209 B1 FR 2668209B1
Authority
FR
France
Prior art keywords
suction pump
molecular suction
molecular
pump
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR909012905A
Other languages
English (en)
Other versions
FR2668209A1 (fr
Inventor
Takeshi Toyoshima
Mitsuo Ogura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koki Holdings Co Ltd
Original Assignee
Hitachi Koki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Koki Co Ltd filed Critical Hitachi Koki Co Ltd
Priority to FR909012905A priority Critical patent/FR2668209B1/fr
Priority to US07/599,853 priority patent/US5120208A/en
Publication of FR2668209A1 publication Critical patent/FR2668209A1/fr
Application granted granted Critical
Publication of FR2668209B1 publication Critical patent/FR2668209B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
FR909012905A 1990-10-18 1990-10-18 Pompe d'aspiration moleculaire. Expired - Lifetime FR2668209B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR909012905A FR2668209B1 (fr) 1990-10-18 1990-10-18 Pompe d'aspiration moleculaire.
US07/599,853 US5120208A (en) 1990-10-18 1990-10-19 Molecular drag pump with rotors moving in same direction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR909012905A FR2668209B1 (fr) 1990-10-18 1990-10-18 Pompe d'aspiration moleculaire.

Publications (2)

Publication Number Publication Date
FR2668209A1 FR2668209A1 (fr) 1992-04-24
FR2668209B1 true FR2668209B1 (fr) 1994-11-18

Family

ID=9401362

Family Applications (1)

Application Number Title Priority Date Filing Date
FR909012905A Expired - Lifetime FR2668209B1 (fr) 1990-10-18 1990-10-18 Pompe d'aspiration moleculaire.

Country Status (2)

Country Link
US (1) US5120208A (fr)
FR (1) FR2668209B1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374173A (en) * 1992-09-04 1994-12-20 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus with sealing arrangement
JP3593365B2 (ja) * 1994-08-19 2004-11-24 大亜真空株式会社 ねじれ角可変型歯車
EP0733804B1 (fr) * 1995-03-20 2002-12-18 Ebara Corporation Pompe à vide
DE59609957D1 (de) * 1995-12-11 2003-01-16 Busch Sa Atel Zwillingsschraubensatz
DE19809957A1 (de) * 1998-03-07 1999-09-09 Pfeiffer Vacuum Gmbh Mehrwellenvakuumpumpe
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
JP3026217B1 (ja) * 1998-10-28 2000-03-27 セイコー精機株式会社 真空ポンプ
US6244844B1 (en) * 1999-03-31 2001-06-12 Emerson Electric Co. Fluid displacement apparatus with improved helical rotor structure
DE19941787B4 (de) * 1999-09-02 2011-06-16 Leybold Vakuum Gmbh Schraubenvakuumpumpe mit Schraubengängen mit sich verändernder Steigung
US6632145B2 (en) * 2000-02-14 2003-10-14 Arthur Vanmoor Fluid displacement pump with backpressure stop
ATE377709T1 (de) * 2001-08-27 2007-11-15 Arthur Vanmoor Verdrängerpumpe mit gegendruckverhinderung
US7008201B2 (en) * 2001-10-19 2006-03-07 Imperial Research Llc Gapless screw rotor device
US6599112B2 (en) 2001-10-19 2003-07-29 Imperial Research Llc Offset thread screw rotor device
GB0614928D0 (en) * 2006-07-27 2006-09-06 Boc Group Plc Molecular Drag Pumping Mechanism
DE202009003981U1 (de) 2009-03-24 2010-08-19 Vacuubrand Gmbh + Co Kg Antrieb für eine Vakuumpumpe
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
DE202013001817U1 (de) * 2013-02-26 2014-06-04 Vemag Maschinenbau Gmbh Anordnung von dichtschließenden Förderschnecken

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE109663C (fr) * 1898-09-02 1900-02-27
GB109663A (en) * 1916-09-25 1917-09-25 Rowland William Easton Improvements in Presses and Pumps.
US1991541A (en) * 1933-09-19 1935-02-19 Cannizzaro Joseph Combined velocity and displacement pump or compressor
NL285314A (fr) * 1961-11-22 1900-01-01
US3198582A (en) * 1962-09-12 1965-08-03 Warren Pumps Inc Screw pump
SU1160119A1 (ru) * 1984-01-25 1985-06-07 МВТУ им.Н.Э.Баумана Молекул рный вакуумный насос
JPS6316185A (ja) * 1986-07-08 1988-01-23 Mazda Motor Corp 軸流式エアポンプ
US4782802A (en) * 1987-01-20 1988-11-08 General Motors Corporation Positive displacement rotary mechanism
JPS6480786A (en) * 1987-09-21 1989-03-27 Hitachi Ltd Vacuum pump
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ

Also Published As

Publication number Publication date
US5120208A (en) 1992-06-09
FR2668209A1 (fr) 1992-04-24

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