IT9067113A0 - Statore per pompa turbomolecolare. - Google Patents
Statore per pompa turbomolecolare.Info
- Publication number
- IT9067113A0 IT9067113A0 IT9067113A IT6711390A IT9067113A0 IT 9067113 A0 IT9067113 A0 IT 9067113A0 IT 9067113 A IT9067113 A IT 9067113A IT 6711390 A IT6711390 A IT 6711390A IT 9067113 A0 IT9067113 A0 IT 9067113A0
- Authority
- IT
- Italy
- Prior art keywords
- stator
- turbomolecular pump
- turbomolecular
- pump
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S415/00—Rotary kinetic fluid motors or pumps
- Y10S415/914—Device to control boundary layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T403/00—Joints and connections
- Y10T403/65—Scarf
- Y10T403/655—Mirror images
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT67113A IT1241177B (it) | 1990-02-16 | 1990-02-16 | Statore per pompa turbomolecolare. |
ES91200172T ES2050498T3 (es) | 1990-02-16 | 1991-01-29 | Estator para bomba turbo-molecular. |
AT91200172T ATE103374T1 (de) | 1990-02-16 | 1991-01-29 | Stator fuer eine turbomolekularpumpe. |
DE69101455T DE69101455T2 (de) | 1990-02-16 | 1991-01-29 | Stator für eine Turbomolekularpumpe. |
EP91200172A EP0442556B1 (en) | 1990-02-16 | 1991-01-29 | A stator for a turbo-molecular pump |
US07/656,361 US5158426A (en) | 1990-02-16 | 1991-02-15 | Stator assembly for a turbomolecular pump |
JP3022212A JPH0826876B2 (ja) | 1990-02-16 | 1991-02-15 | ターボ分子ポンプ用固定子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT67113A IT1241177B (it) | 1990-02-16 | 1990-02-16 | Statore per pompa turbomolecolare. |
Publications (3)
Publication Number | Publication Date |
---|---|
IT9067113A0 true IT9067113A0 (it) | 1990-02-16 |
IT9067113A1 IT9067113A1 (it) | 1991-08-16 |
IT1241177B IT1241177B (it) | 1993-12-29 |
Family
ID=11299682
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT67113A IT1241177B (it) | 1990-02-16 | 1990-02-16 | Statore per pompa turbomolecolare. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5158426A (it) |
EP (1) | EP0442556B1 (it) |
JP (1) | JPH0826876B2 (it) |
AT (1) | ATE103374T1 (it) |
DE (1) | DE69101455T2 (it) |
ES (1) | ES2050498T3 (it) |
IT (1) | IT1241177B (it) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1250804B (it) * | 1991-07-10 | 1995-04-21 | Varian Spa | Stadio di pompaggio per pompa turbomolecolare |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
JP3013083B2 (ja) | 1998-06-23 | 2000-02-28 | セイコー精機株式会社 | ターボ分子ポンプ |
US6508631B1 (en) | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
DE10046766A1 (de) | 2000-09-21 | 2002-04-11 | Leybold Vakuum Gmbh | Compound-Reibungsvakuumpumpe |
EP1249613B1 (en) * | 2001-03-15 | 2004-01-28 | VARIAN S.p.A. | Turbine pump with a stator stage integrated with a spacer ring |
FR2850714B1 (fr) * | 2003-02-03 | 2005-04-29 | Cit Alcatel | Pompe turbomoleculaire a entretoises multietagees de stator |
JP3734816B2 (ja) | 2003-03-25 | 2006-01-11 | 株式会社リコー | 光情報記録装置、光情報記録媒体、光情報記録方法、プログラム、及び記憶媒体 |
JP4676731B2 (ja) * | 2004-09-10 | 2011-04-27 | エドワーズ株式会社 | ターボ分子ポンプ固定翼及び真空ポンプ |
DE102005027097A1 (de) * | 2005-06-11 | 2006-12-14 | Pfeiffer Vacuum Gmbh | Statorscheibe für Turbomolekularpumpe |
JP2007309245A (ja) * | 2006-05-19 | 2007-11-29 | Boc Edwards Kk | 真空ポンプ |
US7866949B2 (en) * | 2006-08-24 | 2011-01-11 | General Electric Company | Methods and apparatus for fabricating a rotor for a steam turbine |
DE102006050565A1 (de) * | 2006-10-26 | 2008-04-30 | Pfeiffer Vacuum Gmbh | Statorscheibe für eine Turbomolekularpumpe |
DE202010011790U1 (de) * | 2010-08-25 | 2011-12-05 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpen |
US9879553B2 (en) * | 2010-12-14 | 2018-01-30 | Edwards Japan Limited | Fixed blade assembly usable in exhaust pump, and exhaust pump provided with same |
GB2498816A (en) * | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
JP6236806B2 (ja) * | 2013-03-07 | 2017-11-29 | 株式会社島津製作所 | 真空ポンプ |
JP6241223B2 (ja) * | 2013-03-13 | 2017-12-06 | 株式会社島津製作所 | 真空ポンプ |
DE102013220879A1 (de) * | 2013-10-15 | 2015-04-16 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102014100207B4 (de) * | 2014-01-09 | 2020-07-09 | Pfeiffer Vacuum Gmbh | Statorscheibe |
EP3051140B1 (de) * | 2015-01-29 | 2018-01-10 | Pfeiffer Vacuum Gmbh | Statorscheibe für eine vakuumpumpe |
JP7049052B2 (ja) * | 2016-09-27 | 2022-04-06 | エドワーズ株式会社 | 真空ポンプ、および真空ポンプに備わる固定円板 |
JP2021173257A (ja) * | 2020-04-28 | 2021-11-01 | 株式会社島津製作所 | ターボ分子ポンプおよびターボ分子ポンプのステータ |
KR102669882B1 (ko) | 2022-02-08 | 2024-05-28 | (주)엘오티베큠 | 터보 분자 펌프 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US416592A (en) * | 1889-12-03 | Separable pulley | ||
US3004700A (en) * | 1959-08-18 | 1961-10-17 | Gen Electric | Turbine engine casing |
FR84100E (fr) * | 1963-08-02 | 1964-11-20 | Snecma | Pompe à vide turbomoléculaire perfectionnée |
DE1503704C3 (de) * | 1966-12-30 | 1972-03-23 | Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar | Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe |
FR1508546A (fr) * | 1967-01-18 | 1968-01-05 | Profils à emboîtement multiple | |
DE2214702A1 (de) * | 1972-03-25 | 1973-09-27 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularpumpe |
US3741680A (en) * | 1972-04-05 | 1973-06-26 | Avco Corp | Split housing piloting device |
DE2229724B2 (de) * | 1972-06-19 | 1980-06-04 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbomolekularpumpe |
DE2654055B2 (de) * | 1976-11-29 | 1979-11-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Rotor- und Statorscheibe für Turbomolekularpumpe |
JPS5743384U (it) * | 1980-08-26 | 1982-03-09 | ||
JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
JPS62173594U (it) * | 1986-03-22 | 1987-11-04 | ||
JPS62258187A (ja) * | 1986-05-02 | 1987-11-10 | Mitsubishi Heavy Ind Ltd | タ−ボ分子ポンプ用静翼板の成形方法 |
DE3722164C2 (de) * | 1987-07-04 | 1995-04-20 | Balzers Pfeiffer Gmbh | Turbomolekularpumpe |
JPS6449694U (it) * | 1987-09-24 | 1989-03-28 | ||
DE3931661A1 (de) * | 1989-08-25 | 1991-04-04 | Leybold Ag | Magnetgelagerte vakuumpumpe |
-
1990
- 1990-02-16 IT IT67113A patent/IT1241177B/it active IP Right Grant
-
1991
- 1991-01-29 DE DE69101455T patent/DE69101455T2/de not_active Expired - Fee Related
- 1991-01-29 AT AT91200172T patent/ATE103374T1/de not_active IP Right Cessation
- 1991-01-29 EP EP91200172A patent/EP0442556B1/en not_active Expired - Lifetime
- 1991-01-29 ES ES91200172T patent/ES2050498T3/es not_active Expired - Lifetime
- 1991-02-15 US US07/656,361 patent/US5158426A/en not_active Expired - Fee Related
- 1991-02-15 JP JP3022212A patent/JPH0826876B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69101455D1 (de) | 1994-04-28 |
IT1241177B (it) | 1993-12-29 |
DE69101455T2 (de) | 1994-07-14 |
EP0442556B1 (en) | 1994-03-23 |
IT9067113A1 (it) | 1991-08-16 |
JPH0826876B2 (ja) | 1996-03-21 |
EP0442556A1 (en) | 1991-08-21 |
ES2050498T3 (es) | 1994-05-16 |
US5158426A (en) | 1992-10-27 |
JPH04219495A (ja) | 1992-08-10 |
ATE103374T1 (de) | 1994-04-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970221 |