DE69109398D1 - Turbomolekularpumpe. - Google Patents

Turbomolekularpumpe.

Info

Publication number
DE69109398D1
DE69109398D1 DE69109398T DE69109398T DE69109398D1 DE 69109398 D1 DE69109398 D1 DE 69109398D1 DE 69109398 T DE69109398 T DE 69109398T DE 69109398 T DE69109398 T DE 69109398T DE 69109398 D1 DE69109398 D1 DE 69109398D1
Authority
DE
Germany
Prior art keywords
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69109398T
Other languages
English (en)
Other versions
DE69109398T2 (de
Inventor
Yoichi Kanemitsu
Yuji Shirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69109398D1 publication Critical patent/DE69109398D1/de
Publication of DE69109398T2 publication Critical patent/DE69109398T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0423—Passive magnetic bearings with permanent magnets on both parts repelling each other
    • F16C32/0425—Passive magnetic bearings with permanent magnets on both parts repelling each other for radial load mainly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F16C32/0478—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings with permanent magnets to support radial load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/06—Relieving load on bearings using magnetic means
    • F16C39/063—Permanent magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE69109398T 1990-08-10 1991-08-09 Turbomolekularpumpe. Expired - Fee Related DE69109398T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2210426A JPH04219493A (ja) 1990-08-10 1990-08-10 ターボ分子ポンプ

Publications (2)

Publication Number Publication Date
DE69109398D1 true DE69109398D1 (de) 1995-06-08
DE69109398T2 DE69109398T2 (de) 1996-01-18

Family

ID=16589120

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69109398T Expired - Fee Related DE69109398T2 (de) 1990-08-10 1991-08-09 Turbomolekularpumpe.

Country Status (4)

Country Link
US (1) US5152679A (de)
EP (1) EP0470637B1 (de)
JP (1) JPH04219493A (de)
DE (1) DE69109398T2 (de)

Families Citing this family (49)

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FR2715201B1 (fr) * 1994-01-19 1996-02-09 Inst Nat Polytech Grenoble Palier magnétique et ensemble comportant une partie statorique et une partie rotorique suspendue par un tel palier.
DE59408753D1 (de) * 1994-07-25 1999-10-21 Sulzer Pumpen Ag Winterthur Kreiselpumpe mit einer Abhebevorrichtung
FR2723767B1 (fr) * 1994-08-19 1997-01-03 Cit Alcatel Pompe a vide turbomoleculaire
US5808839A (en) * 1994-09-13 1998-09-15 Seagate Technology, Inc. Disc drive cartridge including magnetic bearings
FR2728738B1 (fr) * 1994-12-26 1997-01-31 Cit Alcatel Ensemble tournant comportant notamment des moyens de sustentation radiaux et une butee axiale magnetique
JP3046533B2 (ja) * 1995-10-11 2000-05-29 株式会社荏原製作所 軸受ユニット
JP3114085B2 (ja) * 1996-01-31 2000-12-04 セイコー精機株式会社 半径方向位置修正電磁石付磁気軸受装置
US5947703A (en) * 1996-01-31 1999-09-07 Ntn Corporation Centrifugal blood pump assembly
US5924847A (en) * 1997-08-11 1999-07-20 Mainstream Engineering Corp. Magnetic bearing centrifugal refrigeration compressor and refrigerant having minimum specific enthalpy rise
KR100296583B1 (ko) * 1998-07-01 2001-11-15 윤종용 레이저프린터의스캐닝유니트및이에적용되는자기베어링장치
US6416215B1 (en) 1999-12-14 2002-07-09 University Of Kentucky Research Foundation Pumping or mixing system using a levitating magnetic element
US6188813B1 (en) * 1999-02-10 2001-02-13 Waters Investments Limited Flow cell, analyte measurement apparatus and methods related thereto
JP3215842B2 (ja) 1999-03-29 2001-10-09 セイコーインスツルメンツ株式会社 磁気軸受保護装置及びターボ分子ポンプ
JP3877912B2 (ja) 1999-05-25 2007-02-07 株式会社荏原製作所 放電励起エキシマレーザ装置
US6412173B1 (en) 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
US6758593B1 (en) * 2000-10-09 2004-07-06 Levtech, Inc. Pumping or mixing system using a levitating magnetic element, related system components, and related methods
US6498410B1 (en) * 2000-03-28 2002-12-24 Ibiden Co., Ltd. Motor and pressure generating apparatus incorporating the motor
DE10022061A1 (de) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Magnetlagerung mit Dämpfung
DE10043235A1 (de) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
US6448679B1 (en) * 2000-12-14 2002-09-10 Joseph Imlach Passive magnetic support and damping system
US6700259B1 (en) 2003-02-20 2004-03-02 Industrial Technology Research Institute Magnetic repulsion-actuated magnetic bearing
DE10321925B4 (de) * 2003-05-15 2008-10-02 Vacuumschmelze Gmbh & Co. Kg Radiales Magnetlager, Verfahren zum Zusammenbau eines Magnetlagers sowie Rotationsmaschine mit einem radialen Magnetlager
CN1651780B (zh) * 2004-02-03 2011-02-09 台达电子工业股份有限公司 磁浮轴承系统
DE102005036942A1 (de) * 2005-08-05 2007-02-15 Leybold Vacuum Gmbh Turbomaschine
US20070081893A1 (en) * 2005-10-06 2007-04-12 The Boc Group, Inc. Pump apparatus for semiconductor processing
DE102007036692A1 (de) * 2006-09-22 2008-03-27 Ebm-Papst St. Georgen Gmbh & Co. Kg Lüfter
US7710081B2 (en) 2006-10-27 2010-05-04 Direct Drive Systems, Inc. Electromechanical energy conversion systems
DE102007019667B4 (de) * 2007-04-26 2019-12-19 Pfeiffer Vacuum Gmbh Lagervorrichtung
US8513826B2 (en) * 2008-06-26 2013-08-20 Ed Mazur Wind turbine
US20090324383A1 (en) * 2008-06-26 2009-12-31 Ed Mazur Wind compressor
US8237320B2 (en) 2008-07-28 2012-08-07 Direct Drive Systems, Inc. Thermally matched composite sleeve
JP5312876B2 (ja) * 2008-08-28 2013-10-09 バキュームプロダクツ株式会社 回転部の軸受け装置及びそれを用いたポンプ
DE102008060569A1 (de) * 2008-12-04 2010-06-10 Schaeffler Kg Lageranordnung mit Magnetlagerabschnitt sowie Verfahren zur Regelung einer oder der Lageranordnung
ES2398835B1 (es) * 2010-02-02 2013-11-11 Ramón FERREIRO GARCÍA Cojinete magnético pasivo de repulsión inversa.
FR2974175B1 (fr) 2011-04-14 2013-10-11 Mecanique Magnetique Sa Dispositif de detection de la position axiale d'un arbre tournant et application a une pompe turbo-moleculaire
GB2490863B (en) * 2011-05-06 2018-04-18 Edwards Ltd Magnetic bearing assembly
CN102322436B (zh) * 2011-08-23 2014-04-30 北京中科科仪股份有限公司 磁悬浮分子泵径向振动控制方法
CN102995250A (zh) * 2012-10-18 2013-03-27 吴江市元通纺织品有限公司 一种织机卷取保护机构
EP2749780A1 (de) * 2012-12-26 2014-07-02 Skf Magnetic Mechatronics Hybride magnetische Lagerung eines Rotors
JP5563112B2 (ja) * 2013-02-15 2014-07-30 バキュームプロダクツ株式会社 回転部の軸受け装置及びそれを用いたポンプ
US10125814B2 (en) * 2013-10-24 2018-11-13 Raymond James Walsh Passive magnetic bearing
EP2784326B1 (de) * 2013-03-25 2020-05-06 Skf Magnetic Mechatronics Kompakte Turbomaschine mit Magnetlagern und Hilfslagern
US10208759B2 (en) 2014-03-25 2019-02-19 Skf Magnetic Mechatronics Compact turbomachine with magnetic bearings and auxiliary bearings
GB201408899D0 (en) 2014-05-20 2014-07-02 Edwards Ltd Magnetic bearing
EP3135932B1 (de) * 2015-08-24 2018-10-31 Pfeiffer Vacuum Gmbh Vakuumpumpe und permanentmagnetlager
DE202016003991U1 (de) * 2016-06-29 2017-10-02 Leybold Gmbh Vakuumpumpe
CN109281863A (zh) 2018-11-21 2019-01-29 珠海格力电器股份有限公司 一种新型磁悬浮压缩机结构
JP2020128745A (ja) * 2019-02-01 2020-08-27 ホワイト ナイト フルイド ハンドリング インコーポレーテッドＷｈｉｔｅ Ｋｎｉｇｈｔ Ｆｌｕｉｄ Ｈａｎｄｌｉｎｇ Ｉｎｃ． ロータを支承し、当該ロータを磁気的に軸線方向に位置決めするための磁石を有するポンプ、及びこれに関連する方法
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2108590A1 (de) * 1971-02-23 1972-09-07 Siemens Ag Anordnung zur Lagerung einer hochtourig, insbesondere elektromotorisch angetriebenen Welle
DE2337226A1 (de) * 1973-07-21 1975-02-06 Maschf Augsburg Nuernberg Ag Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer
DE2457783C2 (de) * 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
US3958842A (en) * 1975-02-03 1976-05-25 Hughes Aircraft Company Radial magnetic bearing
US4355785A (en) * 1981-02-23 1982-10-26 Westinghouse Electric Corp. Electrically driven sheave
JPS5841296A (ja) * 1981-09-04 1983-03-10 Seiko Instr & Electronics Ltd 磁気軸受を応用した小型軸流分子ポンプ
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPS6011746A (ja) * 1983-06-30 1985-01-22 Toshiba Corp フライホイ−ル装置
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
DE8703108U1 (de) * 1987-02-28 1988-03-31 Leybold AG, 5000 Köln Vakuumpumpe mit einer Einrichtung zur Drehzahlmessung

Also Published As

Publication number Publication date
DE69109398T2 (de) 1996-01-18
EP0470637B1 (de) 1995-05-03
US5152679A (en) 1992-10-06
EP0470637A1 (de) 1992-02-12
JPH04219493A (ja) 1992-08-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee