DE69109398D1 - Turbomolekularpumpe. - Google Patents
Turbomolekularpumpe.Info
- Publication number
- DE69109398D1 DE69109398D1 DE69109398T DE69109398T DE69109398D1 DE 69109398 D1 DE69109398 D1 DE 69109398D1 DE 69109398 T DE69109398 T DE 69109398T DE 69109398 T DE69109398 T DE 69109398T DE 69109398 D1 DE69109398 D1 DE 69109398D1
- Authority
- DE
- Germany
- Prior art keywords
- turbomolecular pump
- turbomolecular
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/0408—Passive magnetic bearings
- F16C32/0423—Passive magnetic bearings with permanent magnets on both parts repelling each other
- F16C32/0425—Passive magnetic bearings with permanent magnets on both parts repelling each other for radial load mainly
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/0474—Active magnetic bearings for rotary movement
- F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
- F16C32/0478—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings with permanent magnets to support radial load
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C39/00—Relieving load on bearings
- F16C39/06—Relieving load on bearings using magnetic means
- F16C39/063—Permanent magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/08—Structural association with bearings
- H02K7/09—Structural association with bearings with magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C39/00—Relieving load on bearings
- F16C39/02—Relieving load on bearings using mechanical means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2210426A JPH04219493A (ja) | 1990-08-10 | 1990-08-10 | ターボ分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69109398D1 true DE69109398D1 (de) | 1995-06-08 |
DE69109398T2 DE69109398T2 (de) | 1996-01-18 |
Family
ID=16589120
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69109398T Expired - Fee Related DE69109398T2 (de) | 1990-08-10 | 1991-08-09 | Turbomolekularpumpe. |
Country Status (4)
Country | Link |
---|---|
US (1) | US5152679A (de) |
EP (1) | EP0470637B1 (de) |
JP (1) | JPH04219493A (de) |
DE (1) | DE69109398T2 (de) |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2715201B1 (fr) * | 1994-01-19 | 1996-02-09 | Inst Nat Polytech Grenoble | Palier magnétique et ensemble comportant une partie statorique et une partie rotorique suspendue par un tel palier. |
ES2138060T3 (es) * | 1994-07-25 | 2000-01-01 | Sulzer Pumpen Ag | Bomba centrifuga con un dispositivo de elevacion. |
FR2723767B1 (fr) * | 1994-08-19 | 1997-01-03 | Cit Alcatel | Pompe a vide turbomoleculaire |
US5808839A (en) * | 1994-09-13 | 1998-09-15 | Seagate Technology, Inc. | Disc drive cartridge including magnetic bearings |
FR2728738B1 (fr) * | 1994-12-26 | 1997-01-31 | Cit Alcatel | Ensemble tournant comportant notamment des moyens de sustentation radiaux et une butee axiale magnetique |
JP3046533B2 (ja) * | 1995-10-11 | 2000-05-29 | 株式会社荏原製作所 | 軸受ユニット |
US5947703A (en) * | 1996-01-31 | 1999-09-07 | Ntn Corporation | Centrifugal blood pump assembly |
JP3114085B2 (ja) * | 1996-01-31 | 2000-12-04 | セイコー精機株式会社 | 半径方向位置修正電磁石付磁気軸受装置 |
US5924847A (en) * | 1997-08-11 | 1999-07-20 | Mainstream Engineering Corp. | Magnetic bearing centrifugal refrigeration compressor and refrigerant having minimum specific enthalpy rise |
KR100296583B1 (ko) * | 1998-07-01 | 2001-11-15 | 윤종용 | 레이저프린터의스캐닝유니트및이에적용되는자기베어링장치 |
US6416215B1 (en) | 1999-12-14 | 2002-07-09 | University Of Kentucky Research Foundation | Pumping or mixing system using a levitating magnetic element |
US6188813B1 (en) * | 1999-02-10 | 2001-02-13 | Waters Investments Limited | Flow cell, analyte measurement apparatus and methods related thereto |
JP3215842B2 (ja) | 1999-03-29 | 2001-10-09 | セイコーインスツルメンツ株式会社 | 磁気軸受保護装置及びターボ分子ポンプ |
JP3877912B2 (ja) | 1999-05-25 | 2007-02-07 | 株式会社荏原製作所 | 放電励起エキシマレーザ装置 |
US6412173B1 (en) | 1999-07-26 | 2002-07-02 | Phoenix Analysis And Design Technologies, Inc. | Miniature turbomolecular pump |
US6758593B1 (en) | 2000-10-09 | 2004-07-06 | Levtech, Inc. | Pumping or mixing system using a levitating magnetic element, related system components, and related methods |
US6498410B1 (en) * | 2000-03-28 | 2002-12-24 | Ibiden Co., Ltd. | Motor and pressure generating apparatus incorporating the motor |
DE10022061A1 (de) | 2000-05-06 | 2001-11-08 | Leybold Vakuum Gmbh | Magnetlagerung mit Dämpfung |
DE10043235A1 (de) * | 2000-09-02 | 2002-03-14 | Leybold Vakuum Gmbh | Vakuumpumpe |
US6448679B1 (en) * | 2000-12-14 | 2002-09-10 | Joseph Imlach | Passive magnetic support and damping system |
US6700259B1 (en) | 2003-02-20 | 2004-03-02 | Industrial Technology Research Institute | Magnetic repulsion-actuated magnetic bearing |
DE10321925B4 (de) * | 2003-05-15 | 2008-10-02 | Vacuumschmelze Gmbh & Co. Kg | Radiales Magnetlager, Verfahren zum Zusammenbau eines Magnetlagers sowie Rotationsmaschine mit einem radialen Magnetlager |
CN1651780B (zh) * | 2004-02-03 | 2011-02-09 | 台达电子工业股份有限公司 | 磁浮轴承系统 |
DE102005036942A1 (de) * | 2005-08-05 | 2007-02-15 | Leybold Vacuum Gmbh | Turbomaschine |
US20070081893A1 (en) * | 2005-10-06 | 2007-04-12 | The Boc Group, Inc. | Pump apparatus for semiconductor processing |
DE102007036692A1 (de) * | 2006-09-22 | 2008-03-27 | Ebm-Papst St. Georgen Gmbh & Co. Kg | Lüfter |
US7710081B2 (en) | 2006-10-27 | 2010-05-04 | Direct Drive Systems, Inc. | Electromechanical energy conversion systems |
DE102007019667B4 (de) * | 2007-04-26 | 2019-12-19 | Pfeiffer Vacuum Gmbh | Lagervorrichtung |
US20090324383A1 (en) * | 2008-06-26 | 2009-12-31 | Ed Mazur | Wind compressor |
US8513826B2 (en) * | 2008-06-26 | 2013-08-20 | Ed Mazur | Wind turbine |
US8253298B2 (en) | 2008-07-28 | 2012-08-28 | Direct Drive Systems, Inc. | Slot configuration of an electric machine |
JP5312876B2 (ja) * | 2008-08-28 | 2013-10-09 | バキュームプロダクツ株式会社 | 回転部の軸受け装置及びそれを用いたポンプ |
DE102008060569A1 (de) | 2008-12-04 | 2010-06-10 | Schaeffler Kg | Lageranordnung mit Magnetlagerabschnitt sowie Verfahren zur Regelung einer oder der Lageranordnung |
ES2398835B1 (es) * | 2010-02-02 | 2013-11-11 | Ramón FERREIRO GARCÍA | Cojinete magnético pasivo de repulsión inversa. |
FR2974175B1 (fr) * | 2011-04-14 | 2013-10-11 | Mecanique Magnetique Sa | Dispositif de detection de la position axiale d'un arbre tournant et application a une pompe turbo-moleculaire |
GB2490863B (en) * | 2011-05-06 | 2018-04-18 | Edwards Ltd | Magnetic bearing assembly |
CN102322436B (zh) * | 2011-08-23 | 2014-04-30 | 北京中科科仪股份有限公司 | 磁悬浮分子泵径向振动控制方法 |
CN102995250A (zh) * | 2012-10-18 | 2013-03-27 | 吴江市元通纺织品有限公司 | 一种织机卷取保护机构 |
EP2749780A1 (de) * | 2012-12-26 | 2014-07-02 | Skf Magnetic Mechatronics | Hybride magnetische Lagerung eines Rotors |
JP5563112B2 (ja) * | 2013-02-15 | 2014-07-30 | バキュームプロダクツ株式会社 | 回転部の軸受け装置及びそれを用いたポンプ |
US10125814B2 (en) * | 2013-10-24 | 2018-11-13 | Raymond James Walsh | Passive magnetic bearing |
EP2784326B1 (de) * | 2013-03-25 | 2020-05-06 | Skf Magnetic Mechatronics | Kompakte Turbomaschine mit Magnetlagern und Hilfslagern |
US10208759B2 (en) | 2014-03-25 | 2019-02-19 | Skf Magnetic Mechatronics | Compact turbomachine with magnetic bearings and auxiliary bearings |
GB201408899D0 (en) | 2014-05-20 | 2014-07-02 | Edwards Ltd | Magnetic bearing |
EP3135932B1 (de) * | 2015-08-24 | 2018-10-31 | Pfeiffer Vacuum Gmbh | Vakuumpumpe und permanentmagnetlager |
DE202016003991U1 (de) * | 2016-06-29 | 2017-10-02 | Leybold Gmbh | Vakuumpumpe |
CN109281863A (zh) * | 2018-11-21 | 2019-01-29 | 珠海格力电器股份有限公司 | 一种新型磁悬浮压缩机结构 |
JP2020128745A (ja) * | 2019-02-01 | 2020-08-27 | ホワイト ナイト フルイド ハンドリング インコーポレーテッドWhite Knight Fluid Handling Inc. | ロータを支承し、当該ロータを磁気的に軸線方向に位置決めするための磁石を有するポンプ、及びこれに関連する方法 |
GB2588146A (en) * | 2019-10-09 | 2021-04-21 | Edwards Ltd | Vacuum pump |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2108590A1 (de) * | 1971-02-23 | 1972-09-07 | Siemens Ag | Anordnung zur Lagerung einer hochtourig, insbesondere elektromotorisch angetriebenen Welle |
DE2337226A1 (de) * | 1973-07-21 | 1975-02-06 | Maschf Augsburg Nuernberg Ag | Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer |
DE2457783C2 (de) * | 1974-12-06 | 1986-10-09 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Magnetische Lagerung |
US3958842A (en) * | 1975-02-03 | 1976-05-25 | Hughes Aircraft Company | Radial magnetic bearing |
US4355785A (en) * | 1981-02-23 | 1982-10-26 | Westinghouse Electric Corp. | Electrically driven sheave |
JPS5841296A (ja) * | 1981-09-04 | 1983-03-10 | Seiko Instr & Electronics Ltd | 磁気軸受を応用した小型軸流分子ポンプ |
DE3239328C2 (de) * | 1982-10-23 | 1993-12-23 | Pfeiffer Vakuumtechnik | Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung |
JPS6011746A (ja) * | 1983-06-30 | 1985-01-22 | Toshiba Corp | フライホイ−ル装置 |
DE3410905A1 (de) * | 1984-03-24 | 1985-10-03 | Leybold-Heraeus GmbH, 5000 Köln | Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken |
DE8703108U1 (de) * | 1987-02-28 | 1988-03-31 | Leybold AG, 5000 Köln | Vakuumpumpe mit einer Einrichtung zur Drehzahlmessung |
-
1990
- 1990-08-10 JP JP2210426A patent/JPH04219493A/ja active Pending
-
1991
- 1991-08-06 US US07/740,779 patent/US5152679A/en not_active Expired - Lifetime
- 1991-08-09 DE DE69109398T patent/DE69109398T2/de not_active Expired - Fee Related
- 1991-08-09 EP EP91113414A patent/EP0470637B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0470637B1 (de) | 1995-05-03 |
US5152679A (en) | 1992-10-06 |
DE69109398T2 (de) | 1996-01-18 |
JPH04219493A (ja) | 1992-08-10 |
EP0470637A1 (de) | 1992-02-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |