DE3770367D1 - Turbomolekularpumpe. - Google Patents
Turbomolekularpumpe.Info
- Publication number
- DE3770367D1 DE3770367D1 DE8787306857T DE3770367T DE3770367D1 DE 3770367 D1 DE3770367 D1 DE 3770367D1 DE 8787306857 T DE8787306857 T DE 8787306857T DE 3770367 T DE3770367 T DE 3770367T DE 3770367 D1 DE3770367 D1 DE 3770367D1
- Authority
- DE
- Germany
- Prior art keywords
- turbomolecular pump
- turbomolecular
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61185497A JPS6341695A (ja) | 1986-08-07 | 1986-08-07 | タ−ボ分子ポンプ |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3770367D1 true DE3770367D1 (de) | 1991-07-04 |
Family
ID=16171801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787306857T Expired - Fee Related DE3770367D1 (de) | 1986-08-07 | 1987-08-03 | Turbomolekularpumpe. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4826393A (de) |
EP (1) | EP0256739B1 (de) |
JP (1) | JPS6341695A (de) |
DE (1) | DE3770367D1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2556320B2 (ja) * | 1987-03-18 | 1996-11-20 | セイコ−精機株式会社 | 真空ポンプ |
DE3728154C2 (de) * | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Mehrstufige Molekularpumpe |
DE3891201T1 (de) * | 1988-01-05 | 1990-01-11 | Valerij Borisovic Solochov | Vakuum-molekularpumpe |
US5052887A (en) * | 1988-02-26 | 1991-10-01 | Novikov Nikolai M | Turbomolecular vacuum pump |
JPH07117067B2 (ja) * | 1988-12-30 | 1995-12-18 | 株式会社島津製作所 | 分子ポンプ |
JPH03222895A (ja) * | 1990-01-26 | 1991-10-01 | Hitachi Koki Co Ltd | ねじ溝真空ポンプ |
US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
JPH0475196U (de) * | 1990-11-09 | 1992-06-30 | ||
DE4216237A1 (de) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gasreibungsvakuumpumpe |
DE29516599U1 (de) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Reibungsvakuumpumpe mit Zwischeneinlaß |
JP3047292B1 (ja) * | 1998-11-24 | 2000-05-29 | セイコー精機株式会社 | ターボ分子ポンプ及び真空装置 |
US6328527B1 (en) * | 1999-01-08 | 2001-12-11 | Fantom Technologies Inc. | Prandtl layer turbine |
US6514035B2 (en) | 2000-01-07 | 2003-02-04 | Kashiyama Kougyou Industry Co., Ltd. | Multiple-type pump |
US6302641B1 (en) * | 2000-01-07 | 2001-10-16 | Kashiyama Kougyou Industry Co., Ltd. | Multiple type vacuum pump |
JP2002070787A (ja) * | 2000-08-25 | 2002-03-08 | Kashiyama Kogyo Kk | 真空ポンプ |
US6607351B1 (en) * | 2002-03-12 | 2003-08-19 | Varian, Inc. | Vacuum pumps with improved impeller configurations |
GB0322883D0 (en) | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB2482861B (en) | 2010-07-30 | 2014-12-17 | Hivis Pumps As | Pump/motor assembly |
US8936430B2 (en) * | 2011-04-19 | 2015-01-20 | Halliburton Energy Services, Inc. | Submersible centrifugal pump for solids-laden fluid |
CN104019043A (zh) * | 2014-06-20 | 2014-09-03 | 李晨 | 鼠笼螺杆式复合分子泵 |
JP2022143507A (ja) * | 2021-03-17 | 2022-10-03 | エドワーズ株式会社 | 真空ポンプ |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2362922A (en) * | 1942-10-16 | 1944-11-14 | Stewart Warner Corp | Rotary pump |
JPS4733446B1 (de) * | 1969-04-28 | 1972-08-25 | ||
DE2118738C3 (de) * | 1971-04-17 | 1974-11-14 | Dornier Dmbh, 7990 Friedrichshafen | Molekularpumpe, bestehend aus einem mit Innengewinde versehenen zylindrischen Stator |
FR2224009A5 (de) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
SU737653A1 (ru) * | 1976-08-02 | 1980-05-30 | Предприятие П/Я А-3226 | Лабиринтный насос |
FR2446934A1 (fr) * | 1979-01-19 | 1980-08-14 | Cit Alcatel | Pompe rotative a vide eleve |
JPS60125795A (ja) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPS60182394A (ja) * | 1984-02-29 | 1985-09-17 | Shimadzu Corp | タ−ボ分子ポンプ |
DE3410905A1 (de) * | 1984-03-24 | 1985-10-03 | Leybold-Heraeus GmbH, 5000 Köln | Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken |
JPS61247893A (ja) * | 1985-04-26 | 1986-11-05 | Hitachi Ltd | 真空ポンプ |
JPS60243394A (ja) * | 1985-04-30 | 1985-12-03 | Shimadzu Corp | ターボ分子ポンプ |
JPH06172896A (ja) * | 1992-12-04 | 1994-06-21 | Nikko Kinzoku Kk | 高力高導電性銅合金 |
-
1986
- 1986-08-07 JP JP61185497A patent/JPS6341695A/ja active Pending
-
1987
- 1987-08-03 DE DE8787306857T patent/DE3770367D1/de not_active Expired - Fee Related
- 1987-08-03 EP EP87306857A patent/EP0256739B1/de not_active Expired
- 1987-08-07 US US07/083,692 patent/US4826393A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0256739A1 (de) | 1988-02-24 |
EP0256739B1 (de) | 1991-05-29 |
US4826393A (en) | 1989-05-02 |
JPS6341695A (ja) | 1988-02-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8365 | Fully valid after opposition proceedings | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: SEIKO INSTRUMENTS INC., CHIBA, JP |
|
8339 | Ceased/non-payment of the annual fee |