DE3770367D1 - Turbomolekularpumpe. - Google Patents

Turbomolekularpumpe.

Info

Publication number
DE3770367D1
DE3770367D1 DE8787306857T DE3770367T DE3770367D1 DE 3770367 D1 DE3770367 D1 DE 3770367D1 DE 8787306857 T DE8787306857 T DE 8787306857T DE 3770367 T DE3770367 T DE 3770367T DE 3770367 D1 DE3770367 D1 DE 3770367D1
Authority
DE
Germany
Prior art keywords
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787306857T
Other languages
English (en)
Inventor
Masaharu Miki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16171801&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE3770367(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Application granted granted Critical
Publication of DE3770367D1 publication Critical patent/DE3770367D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE8787306857T 1986-08-07 1987-08-03 Turbomolekularpumpe. Expired - Fee Related DE3770367D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61185497A JPS6341695A (ja) 1986-08-07 1986-08-07 タ−ボ分子ポンプ

Publications (1)

Publication Number Publication Date
DE3770367D1 true DE3770367D1 (de) 1991-07-04

Family

ID=16171801

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787306857T Expired - Fee Related DE3770367D1 (de) 1986-08-07 1987-08-03 Turbomolekularpumpe.

Country Status (4)

Country Link
US (1) US4826393A (de)
EP (1) EP0256739B1 (de)
JP (1) JPS6341695A (de)
DE (1) DE3770367D1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2556320B2 (ja) * 1987-03-18 1996-11-20 セイコ−精機株式会社 真空ポンプ
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
DE3891201T1 (de) * 1988-01-05 1990-01-11 Valerij Borisovic Solochov Vakuum-molekularpumpe
US5052887A (en) * 1988-02-26 1991-10-01 Novikov Nikolai M Turbomolecular vacuum pump
JPH07117067B2 (ja) * 1988-12-30 1995-12-18 株式会社島津製作所 分子ポンプ
JPH03222895A (ja) * 1990-01-26 1991-10-01 Hitachi Koki Co Ltd ねじ溝真空ポンプ
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
JPH0475196U (de) * 1990-11-09 1992-06-30
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
JP3047292B1 (ja) * 1998-11-24 2000-05-29 セイコー精機株式会社 ターボ分子ポンプ及び真空装置
US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
US6514035B2 (en) 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
US6302641B1 (en) * 2000-01-07 2001-10-16 Kashiyama Kougyou Industry Co., Ltd. Multiple type vacuum pump
JP2002070787A (ja) * 2000-08-25 2002-03-08 Kashiyama Kogyo Kk 真空ポンプ
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
GB0322883D0 (en) 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB2482861B (en) 2010-07-30 2014-12-17 Hivis Pumps As Pump/motor assembly
US8936430B2 (en) * 2011-04-19 2015-01-20 Halliburton Energy Services, Inc. Submersible centrifugal pump for solids-laden fluid
CN104019043A (zh) * 2014-06-20 2014-09-03 李晨 鼠笼螺杆式复合分子泵
JP2022143507A (ja) * 2021-03-17 2022-10-03 エドワーズ株式会社 真空ポンプ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2362922A (en) * 1942-10-16 1944-11-14 Stewart Warner Corp Rotary pump
JPS4733446B1 (de) * 1969-04-28 1972-08-25
DE2118738C3 (de) * 1971-04-17 1974-11-14 Dornier Dmbh, 7990 Friedrichshafen Molekularpumpe, bestehend aus einem mit Innengewinde versehenen zylindrischen Stator
FR2224009A5 (de) * 1973-03-30 1974-10-25 Cit Alcatel
SU737653A1 (ru) * 1976-08-02 1980-05-30 Предприятие П/Я А-3226 Лабиринтный насос
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
JPS60125795A (ja) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS60182394A (ja) * 1984-02-29 1985-09-17 Shimadzu Corp タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS61247893A (ja) * 1985-04-26 1986-11-05 Hitachi Ltd 真空ポンプ
JPS60243394A (ja) * 1985-04-30 1985-12-03 Shimadzu Corp ターボ分子ポンプ
JPH06172896A (ja) * 1992-12-04 1994-06-21 Nikko Kinzoku Kk 高力高導電性銅合金

Also Published As

Publication number Publication date
EP0256739A1 (de) 1988-02-24
EP0256739B1 (de) 1991-05-29
US4826393A (en) 1989-05-02
JPS6341695A (ja) 1988-02-22

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8327 Change in the person/name/address of the patent owner

Owner name: SEIKO INSTRUMENTS INC., CHIBA, JP

8339 Ceased/non-payment of the annual fee