BE790969A - Pivot pour pompes moleculaires rotatives - Google Patents
Pivot pour pompes moleculaires rotativesInfo
- Publication number
- BE790969A BE790969A BE790969DA BE790969A BE 790969 A BE790969 A BE 790969A BE 790969D A BE790969D A BE 790969DA BE 790969 A BE790969 A BE 790969A
- Authority
- BE
- Belgium
- Prior art keywords
- pivot
- molecular pumps
- rotary molecular
- rotary
- pumps
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/057—Bearings hydrostatic; hydrodynamic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/10—Shaft sealings
- F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
- F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
- F16C35/08—Rigid support of bearing units; Housings, e.g. caps, covers for spindles
- F16C35/10—Rigid support of bearing units; Housings, e.g. caps, covers for spindles with sliding-contact bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7140995A FR2161180A5 (fr) | 1971-11-16 | 1971-11-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE790969A true BE790969A (fr) | 1973-05-07 |
Family
ID=9085846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE790969D BE790969A (fr) | 1971-11-16 | Pivot pour pompes moleculaires rotatives |
Country Status (8)
Country | Link |
---|---|
US (1) | US3832084A (fr) |
BE (1) | BE790969A (fr) |
CH (1) | CH564691A5 (fr) |
DE (1) | DE2255618C2 (fr) |
FR (1) | FR2161180A5 (fr) |
GB (1) | GB1359920A (fr) |
IT (1) | IT970919B (fr) |
NL (1) | NL7215491A (fr) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2224009A5 (fr) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
DE2359456A1 (de) * | 1973-11-29 | 1975-06-05 | Leybold Heraeus Gmbh & Co Kg | Turbomolekularvakuumpumpe mit gasgelagertem rotor |
DE2512828C3 (de) * | 1975-03-22 | 1978-11-16 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Turbomolekularpumpe |
FR2446934A1 (fr) * | 1979-01-19 | 1980-08-14 | Cit Alcatel | Pompe rotative a vide eleve |
DE3032967A1 (de) * | 1980-09-02 | 1982-04-15 | Leybold-Heraeus GmbH, 5000 Köln | Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem |
NL8105614A (nl) * | 1981-12-14 | 1983-07-01 | Ultra Centrifuge Nederland Nv | Hoog-vacuum moleculair pomp. |
FR2521650A1 (fr) * | 1982-02-16 | 1983-08-19 | Cit Alcatel | Pompe rotative a vide eleve |
US4767265A (en) * | 1983-10-07 | 1988-08-30 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
US4674952A (en) * | 1983-10-07 | 1987-06-23 | Sargent-Welch Scientific Company | Turbo molecular pump with improved bearing assembly |
DE3410905A1 (de) * | 1984-03-24 | 1985-10-03 | Leybold-Heraeus GmbH, 5000 Köln | Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken |
FR2567208B1 (fr) * | 1984-07-05 | 1988-12-09 | Cit Alcatel | Pompe rotative a vide eleve |
DE3600124A1 (de) * | 1986-01-04 | 1987-07-16 | Fortuna Werke Maschf Ag | Geblaese zum umwaelzen grosser gasmengen, insbesondere fuer hochleistungs-laser |
DE3705912A1 (de) * | 1987-02-24 | 1988-09-01 | Alcatel Hochvakuumtechnik Gmbh | Hochvakuumpumpe mit einem glockenfoermigen rotor |
DE3728154C2 (de) * | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Mehrstufige Molekularpumpe |
GB2232205B (en) * | 1987-12-25 | 1991-11-13 | Sholokhov Valery B | Molecular vacuum pump |
DE3891201T1 (de) * | 1988-01-05 | 1990-01-11 | Valerij Borisovic Solochov | Vakuum-molekularpumpe |
JPH02503702A (ja) * | 1988-02-26 | 1990-11-01 | ノヴィコフ ニコライ ミハイロヴィチ | ターボ分子真空ポンプ |
WO1989009341A1 (fr) * | 1988-03-30 | 1989-10-05 | Sergeev Vladimir P | Pompe a vide turbomoleculaire |
US5049168A (en) * | 1988-09-12 | 1991-09-17 | Philip Danielson | Helium leak detection method and system |
US6022195A (en) * | 1988-09-13 | 2000-02-08 | Helix Technology Corporation | Electronically controlled vacuum pump with control module |
US6318093B2 (en) | 1988-09-13 | 2001-11-20 | Helix Technology Corporation | Electronically controlled cryopump |
US5020969A (en) * | 1988-09-28 | 1991-06-04 | Hitachi, Ltd. | Turbo vacuum pump |
JP2928615B2 (ja) * | 1990-09-28 | 1999-08-03 | 株式会社日立製作所 | ターボ真空ポンプ |
US6902378B2 (en) * | 1993-07-16 | 2005-06-07 | Helix Technology Corporation | Electronically controlled vacuum pump |
WO1999020433A1 (fr) * | 1997-10-21 | 1999-04-29 | Multilevel Metals, Inc. | Turbopompe avec palier a gaz and passage d'interconnexion de palier a gaz |
DE19915983A1 (de) | 1999-04-09 | 2000-10-12 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Gaslagerung |
US6508631B1 (en) | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
GB0208556D0 (en) * | 2002-04-12 | 2002-05-22 | Advanced Fluid Systems Ltd | Magnetic seal and bearing arrangement |
EP1559915B1 (fr) * | 2004-01-29 | 2007-05-16 | Pfeiffer Vacuum GmbH | Pompe à effet visqueux |
GB2467168B (en) * | 2009-01-26 | 2011-03-16 | Air Bearings Ltd | Gas bearing and method of manufacturing the same |
DE102010001538A1 (de) * | 2010-02-03 | 2011-08-04 | Trumpf Maschinen Ag | Gaslaser mit Radial- und Axialgaslager |
DE102010021015A1 (de) | 2010-05-19 | 2011-11-24 | O3-innovation Ursula Bürger e.Kfr. | Wärmepumpe mit gewendelten Kolben gleichen Profilquerschnitts für die Erzeugung von Kälte und Wärme |
CN103016531B (zh) * | 2012-12-31 | 2015-02-25 | 浙江工业大学 | 无摩擦旋转供气气浮装置 |
JP6287475B2 (ja) * | 2014-03-28 | 2018-03-07 | 株式会社島津製作所 | 真空ポンプ |
JP2020186687A (ja) * | 2019-05-15 | 2020-11-19 | エドワーズ株式会社 | 真空ポンプとそのネジ溝ポンプ部の固定部品 |
CN112302990A (zh) * | 2019-07-30 | 2021-02-02 | 青岛海尔智能技术研发有限公司 | 静压轴承供气系统、制冷设备 |
CN111692340B (zh) * | 2020-06-12 | 2022-03-22 | 东台市岳东橡胶密封件厂 | 一种内藏浮动式伸缩密封件 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2730297A (en) * | 1950-04-12 | 1956-01-10 | Hartford Nat Bank & Trust Co | High-vacuum molecular pump |
DE1023679B (de) * | 1956-06-08 | 1958-01-30 | Messerschmitt Boelkow Blohm | Vorrichtung zum Regeln von Kennfeldern mit aehnlichen bzw. praktisch aehnlichen Niveaulinien |
FR1203718A (fr) * | 1958-03-28 | 1960-01-20 | Jansen Gmbh Th | Dépoussiéreur à brosses |
FR1284111A (fr) * | 1961-01-23 | 1962-02-09 | Bristol Siddeley Engines Ltd | Perfectionnements aux compresseurs |
FR1293546A (fr) * | 1961-02-09 | 1962-05-18 | Alsacienne Constr Meca | Perfectionnements aux pompes moléculaires rotatives |
FR81075E (fr) * | 1962-01-23 | 1963-07-26 | Snecma | Pompe à vide turbomoléculaire perfectionnée |
US3189264A (en) * | 1963-06-04 | 1965-06-15 | Arthur Pfeiffer Company | Vacuum pump drive and seal arrangement |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
US3999827A (en) * | 1975-10-10 | 1976-12-28 | Burroughs Corporation | Electrical connector for semiconductor device package |
-
0
- BE BE790969D patent/BE790969A/fr unknown
-
1971
- 1971-11-16 FR FR7140995A patent/FR2161180A5/fr not_active Expired
-
1972
- 1972-11-06 CH CH1610372A patent/CH564691A5/xx not_active IP Right Cessation
- 1972-11-13 DE DE2255618A patent/DE2255618C2/de not_active Expired
- 1972-11-14 GB GB5249872A patent/GB1359920A/en not_active Expired
- 1972-11-16 IT IT31717/72A patent/IT970919B/it active
- 1972-11-16 US US00307231A patent/US3832084A/en not_active Expired - Lifetime
- 1972-11-16 NL NL7215491A patent/NL7215491A/xx not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
CH564691A5 (fr) | 1975-07-31 |
FR2161180A5 (fr) | 1973-07-06 |
DE2255618C2 (de) | 1982-12-23 |
US3832084A (en) | 1974-08-27 |
IT970919B (it) | 1974-04-20 |
DE2255618A1 (de) | 1973-05-24 |
GB1359920A (en) | 1974-07-17 |
NL7215491A (fr) | 1973-05-18 |
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