FR81075E - Pompe à vide turbomoléculaire perfectionnée - Google Patents

Pompe à vide turbomoléculaire perfectionnée

Info

Publication number
FR81075E
FR81075E FR885623A FR885623A FR81075E FR 81075 E FR81075 E FR 81075E FR 885623 A FR885623 A FR 885623A FR 885623 A FR885623 A FR 885623A FR 81075 E FR81075 E FR 81075E
Authority
FR
France
Prior art keywords
advanced
vacuum pump
turbomolecular vacuum
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR885623A
Other languages
English (en)
Inventor
Henri Louis Garnier
Leonide Rubet
Louis Jacques Desroches
Louis Paul Henri Meulien
Raymond Hippolyte Firm Marchal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Aircraft Engines SAS
Original Assignee
Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA
SNECMA SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA, SNECMA SAS filed Critical Societe Nationale dEtude et de Construction de Moteurs dAviation SNECMA
Priority to FR885623A priority Critical patent/FR81075E/fr
Priority to BE619944A priority patent/BE619944A/fr
Priority to CH838362A priority patent/CH465124A/fr
Priority to LU42063D priority patent/LU42063A1/xx
Priority to US213414A priority patent/US3168977A/en
Priority to DE19621428239 priority patent/DE1428239C3/de
Priority to DE19621728487 priority patent/DE1728487C3/de
Priority to GB29691/62A priority patent/GB1019273A/en
Application granted granted Critical
Publication of FR81075E publication Critical patent/FR81075E/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0653—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the motor having a plane air gap, e.g. disc-type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/06—Lubrication
    • F04D29/063—Lubrication specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/60—Shafts
    • F05D2240/61—Hollow

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
FR885623A 1961-08-04 1962-01-23 Pompe à vide turbomoléculaire perfectionnée Expired FR81075E (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR885623A FR81075E (fr) 1962-01-23 1962-01-23 Pompe à vide turbomoléculaire perfectionnée
BE619944A BE619944A (fr) 1961-08-04 1962-07-09 Pompe à vide turbomoleculaire perfectionnée
CH838362A CH465124A (fr) 1961-08-04 1962-07-12 Pompe à vide turbomoléculaire
LU42063D LU42063A1 (fr) 1961-08-04 1962-07-14
US213414A US3168977A (en) 1962-01-23 1962-07-30 Turbomolecular vacuum pump
DE19621428239 DE1428239C3 (de) 1961-08-04 1962-08-01 Axialdurchströmte Turbomolekularpumpe
DE19621728487 DE1728487C3 (de) 1962-01-23 1962-08-01 Axialdurchströmte Turbomolekularpumpe
GB29691/62A GB1019273A (en) 1961-08-04 1962-08-02 Improved rotary molecular vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR885623A FR81075E (fr) 1962-01-23 1962-01-23 Pompe à vide turbomoléculaire perfectionnée

Publications (1)

Publication Number Publication Date
FR81075E true FR81075E (fr) 1963-07-26

Family

ID=8771023

Family Applications (1)

Application Number Title Priority Date Filing Date
FR885623A Expired FR81075E (fr) 1961-08-04 1962-01-23 Pompe à vide turbomoléculaire perfectionnée

Country Status (2)

Country Link
US (1) US3168977A (fr)
FR (1) FR81075E (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2526090A1 (fr) * 1982-05-03 1983-11-04 Pfeiffer Vakuumtechnik Dispositif de chauffage pour une turbopompe moleculaire
EP0352688A1 (fr) * 1988-07-27 1990-01-31 Alcatel Cit Pompe à vide

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1503704C3 (de) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar Schaufelkranz fuer ein lauf und oder leitrad einer turbomolekularpumpe
US3535052A (en) * 1967-08-18 1970-10-20 Pfeiffer Vakuumtechnik Electrically driven vacuum pump
BE757353A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Perfectionnements aux pompes a vide
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2138152C3 (de) * 1971-07-30 1974-05-09 W.C. Heraeus Gmbh, 6450 Hanau Lageranordnung für den Läufer einer Turbomolekularpumpe
BE790969A (fr) * 1971-11-16 1973-05-07 Cit Alcatel Pivot pour pompes moleculaires rotatives
FR2224009A5 (fr) * 1973-03-30 1974-10-25 Cit Alcatel
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2359456A1 (de) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit gasgelagertem rotor
CH583856A5 (fr) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
US4116592A (en) * 1976-08-20 1978-09-26 Viktor Yakovlevich Cherny Turbomolecular high-vacuum pulp
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
DE3317868A1 (de) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln Reibungspumpe
US4674952A (en) * 1983-10-07 1987-06-23 Sargent-Welch Scientific Company Turbo molecular pump with improved bearing assembly
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
DE102007053979A1 (de) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Schmiermittelpumpe
DE202012000611U1 (de) * 2012-01-21 2013-04-23 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
JP6433812B2 (ja) * 2015-02-25 2018-12-05 エドワーズ株式会社 アダプタ及び真空ポンプ
KR102499085B1 (ko) * 2016-05-04 2023-02-10 삼성전자주식회사 진공 펌프
GB2578431B (en) * 2018-10-25 2021-09-22 Edwards Ltd Oil feed for a vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2918208A (en) * 1956-02-02 1959-12-22 Becker Willi Molecular pump
US2888193A (en) * 1957-02-14 1959-05-26 Garrett Corp Motor driven compressor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2526090A1 (fr) * 1982-05-03 1983-11-04 Pfeiffer Vakuumtechnik Dispositif de chauffage pour une turbopompe moleculaire
EP0352688A1 (fr) * 1988-07-27 1990-01-31 Alcatel Cit Pompe à vide
FR2634829A1 (fr) * 1988-07-27 1990-02-02 Cit Alcatel Pompe a vide

Also Published As

Publication number Publication date
US3168977A (en) 1965-02-09
DE1728487B2 (de) 1974-02-07
DE1728487A1 (de) 1973-04-26

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