FR1523039A - Pompe à vide poussé - Google Patents

Pompe à vide poussé

Info

Publication number
FR1523039A
FR1523039A FR106739A FR106739A FR1523039A FR 1523039 A FR1523039 A FR 1523039A FR 106739 A FR106739 A FR 106739A FR 106739 A FR106739 A FR 106739A FR 1523039 A FR1523039 A FR 1523039A
Authority
FR
France
Prior art keywords
vacuum pump
high vacuum
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR106739A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Application granted granted Critical
Publication of FR1523039A publication Critical patent/FR1523039A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
FR106739A 1966-05-18 1967-05-18 Pompe à vide poussé Expired FR1523039A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH736266A CH442600A (de) 1966-05-18 1966-05-18 Hochvakuumpumpe

Publications (1)

Publication Number Publication Date
FR1523039A true FR1523039A (fr) 1968-04-02

Family

ID=4323938

Family Applications (1)

Application Number Title Priority Date Filing Date
FR106739A Expired FR1523039A (fr) 1966-05-18 1967-05-18 Pompe à vide poussé

Country Status (6)

Country Link
US (1) US3428241A (fr)
CH (1) CH442600A (fr)
DE (1) DE1539152A1 (fr)
FR (1) FR1523039A (fr)
GB (1) GB1140798A (fr)
NL (1) NL6610157A (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2907055A1 (de) * 1979-02-23 1980-08-28 Kernforschungsanlage Juelich Waermestrahlungsschild fuer kryopumpen
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
JP2001332209A (ja) * 2000-03-13 2001-11-30 Ulvac Japan Ltd スパッタイオンポンプ
GB0319171D0 (en) 2003-08-15 2003-09-17 Boc Group Plc Purifier/getter for vacuum and uhp gas applications
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
CN111344489B (zh) * 2017-07-11 2023-05-16 斯坦福研究院 紧凑型静电离子泵

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump

Also Published As

Publication number Publication date
GB1140798A (en) 1969-01-22
NL6610157A (fr) 1967-11-20
US3428241A (en) 1969-02-18
CH442600A (de) 1967-08-31
DE1539152A1 (de) 1970-02-19

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