NL6610157A - - Google Patents
Info
- Publication number
- NL6610157A NL6610157A NL6610157A NL6610157A NL6610157A NL 6610157 A NL6610157 A NL 6610157A NL 6610157 A NL6610157 A NL 6610157A NL 6610157 A NL6610157 A NL 6610157A NL 6610157 A NL6610157 A NL 6610157A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH736266A CH442600A (de) | 1966-05-18 | 1966-05-18 | Hochvakuumpumpe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL6610157A true NL6610157A (xx) | 1967-11-20 |
Family
ID=4323938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL6610157A NL6610157A (xx) | 1966-05-18 | 1966-07-19 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3428241A (xx) |
| CH (1) | CH442600A (xx) |
| DE (1) | DE1539152A1 (xx) |
| FR (1) | FR1523039A (xx) |
| GB (1) | GB1140798A (xx) |
| NL (1) | NL6610157A (xx) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2907055A1 (de) * | 1979-02-23 | 1980-08-28 | Kernforschungsanlage Juelich | Waermestrahlungsschild fuer kryopumpen |
| IT1255438B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
| US6616417B2 (en) * | 2000-03-13 | 2003-09-09 | Ulvac, Inc. | Spatter ion pump |
| GB0319171D0 (en) | 2003-08-15 | 2003-09-17 | Boc Group Plc | Purifier/getter for vacuum and uhp gas applications |
| US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
| US10460917B2 (en) * | 2016-05-26 | 2019-10-29 | AOSense, Inc. | Miniature ion pump |
| CN111344489B (zh) * | 2017-07-11 | 2023-05-16 | 斯坦福研究院 | 紧凑型静电离子泵 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3117247A (en) * | 1961-05-29 | 1964-01-07 | Varian Associates | Vacuum pump |
| US3236442A (en) * | 1964-01-20 | 1966-02-22 | Morris Associates | Ionic vacuum pump |
-
1966
- 1966-05-18 CH CH736266A patent/CH442600A/de unknown
- 1966-07-19 NL NL6610157A patent/NL6610157A/xx unknown
-
1967
- 1967-03-17 GB GB12530/67A patent/GB1140798A/en not_active Expired
- 1967-04-13 DE DE19671539152 patent/DE1539152A1/de active Pending
- 1967-05-16 US US638801A patent/US3428241A/en not_active Expired - Lifetime
- 1967-05-18 FR FR106739A patent/FR1523039A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1140798A (en) | 1969-01-22 |
| US3428241A (en) | 1969-02-18 |
| DE1539152A1 (de) | 1970-02-19 |
| FR1523039A (fr) | 1968-04-02 |
| CH442600A (de) | 1967-08-31 |