CH442600A - Hochvakuumpumpe - Google Patents

Hochvakuumpumpe

Info

Publication number
CH442600A
CH442600A CH736266A CH736266A CH442600A CH 442600 A CH442600 A CH 442600A CH 736266 A CH736266 A CH 736266A CH 736266 A CH736266 A CH 736266A CH 442600 A CH442600 A CH 442600A
Authority
CH
Switzerland
Prior art keywords
vacuum pump
high vacuum
pump
vacuum
Prior art date
Application number
CH736266A
Other languages
German (de)
English (en)
Inventor
Eder Franz Xaver Dr Prof
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH736266A priority Critical patent/CH442600A/de
Priority to NL6610157A priority patent/NL6610157A/xx
Priority to GB12530/67A priority patent/GB1140798A/en
Priority to DE19671539152 priority patent/DE1539152A1/de
Priority to US638801A priority patent/US3428241A/en
Priority to FR106739A priority patent/FR1523039A/fr
Publication of CH442600A publication Critical patent/CH442600A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
CH736266A 1966-05-18 1966-05-18 Hochvakuumpumpe CH442600A (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CH736266A CH442600A (de) 1966-05-18 1966-05-18 Hochvakuumpumpe
NL6610157A NL6610157A (xx) 1966-05-18 1966-07-19
GB12530/67A GB1140798A (en) 1966-05-18 1967-03-17 Improvements in and relating to high vacuum pumps
DE19671539152 DE1539152A1 (de) 1966-05-18 1967-04-13 Hochvakuumpumpe
US638801A US3428241A (en) 1966-05-18 1967-05-16 High vacuum pump
FR106739A FR1523039A (fr) 1966-05-18 1967-05-18 Pompe à vide poussé

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH736266A CH442600A (de) 1966-05-18 1966-05-18 Hochvakuumpumpe

Publications (1)

Publication Number Publication Date
CH442600A true CH442600A (de) 1967-08-31

Family

ID=4323938

Family Applications (1)

Application Number Title Priority Date Filing Date
CH736266A CH442600A (de) 1966-05-18 1966-05-18 Hochvakuumpumpe

Country Status (6)

Country Link
US (1) US3428241A (xx)
CH (1) CH442600A (xx)
DE (1) DE1539152A1 (xx)
FR (1) FR1523039A (xx)
GB (1) GB1140798A (xx)
NL (1) NL6610157A (xx)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2907055A1 (de) * 1979-02-23 1980-08-28 Kernforschungsanlage Juelich Waermestrahlungsschild fuer kryopumpen
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
US6616417B2 (en) * 2000-03-13 2003-09-09 Ulvac, Inc. Spatter ion pump
GB0319171D0 (en) 2003-08-15 2003-09-17 Boc Group Plc Purifier/getter for vacuum and uhp gas applications
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
US11569077B2 (en) * 2017-07-11 2023-01-31 Sri International Compact electrostatic ion pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump

Also Published As

Publication number Publication date
FR1523039A (fr) 1968-04-02
NL6610157A (xx) 1967-11-20
US3428241A (en) 1969-02-18
DE1539152A1 (de) 1970-02-19
GB1140798A (en) 1969-01-22

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