AT251924B - Hochvakuumpumpe - Google Patents

Hochvakuumpumpe

Info

Publication number
AT251924B
AT251924B AT244165A AT244165A AT251924B AT 251924 B AT251924 B AT 251924B AT 244165 A AT244165 A AT 244165A AT 244165 A AT244165 A AT 244165A AT 251924 B AT251924 B AT 251924B
Authority
AT
Austria
Prior art keywords
vacuum pump
high vacuum
pump
vacuum
Prior art date
Application number
AT244165A
Other languages
English (en)
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Application granted granted Critical
Publication of AT251924B publication Critical patent/AT251924B/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0005—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Jet Pumps And Other Pumps (AREA)
AT244165A 1964-04-17 1965-03-18 Hochvakuumpumpe AT251924B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH499864A CH419428A (de) 1964-04-17 1964-04-17 Einrichtung zur Erzeugung bzw. Aufrechterhaltung eines Vakuums in einem Raum

Publications (1)

Publication Number Publication Date
AT251924B true AT251924B (de) 1967-01-25

Family

ID=4286176

Family Applications (1)

Application Number Title Priority Date Filing Date
AT244165A AT251924B (de) 1964-04-17 1965-03-18 Hochvakuumpumpe

Country Status (7)

Country Link
US (1) US3263434A (de)
AT (1) AT251924B (de)
CH (1) CH419428A (de)
DE (1) DE1276284B (de)
GB (1) GB1048332A (de)
NL (1) NL6406151A (de)
SE (1) SE355216B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3488978A (en) * 1965-09-29 1970-01-13 Getters Spa Cryopumping,particularly for hydrogen
SU1698482A1 (ru) * 1988-01-08 1991-12-15 Институт Анатилического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный конденсационный насос
US5009073A (en) * 1990-05-01 1991-04-23 Marin Tek, Inc. Fast cycle cryogenic flex probe
KR20170011237A (ko) * 2015-07-22 2017-02-02 한국항공우주연구원 저온 펌프의 온도 제어 장치 및 방법

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2939316A (en) * 1958-03-14 1960-06-07 Nat Res Corp High vacuum device
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3103108A (en) * 1961-07-17 1963-09-10 Gen Electric Shielded thermal gradient member
US3144200A (en) * 1962-10-17 1964-08-11 Clyde E Taylor Process and device for cryogenic adsorption pumping

Also Published As

Publication number Publication date
DE1276284B (de) 1968-08-29
NL6406151A (de) 1965-10-18
CH419428A (de) 1966-08-31
GB1048332A (en) 1966-11-16
US3263434A (en) 1966-08-02
SE355216B (de) 1973-04-09

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