GB1048332A - Improvements in and relating to high vacuum pumps - Google Patents

Improvements in and relating to high vacuum pumps

Info

Publication number
GB1048332A
GB1048332A GB14016/65A GB1401665A GB1048332A GB 1048332 A GB1048332 A GB 1048332A GB 14016/65 A GB14016/65 A GB 14016/65A GB 1401665 A GB1401665 A GB 1401665A GB 1048332 A GB1048332 A GB 1048332A
Authority
GB
United Kingdom
Prior art keywords
gas
compressor
shell
chamber
engine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB14016/65A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1048332A publication Critical patent/GB1048332A/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0005Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
  • Jet Pumps And Other Pumps (AREA)

Abstract

1,048,332. Vacuum pumps. BALZERS PATENT-UND LIZENZ-ANSTALT. April 2, 1965 [April 17, 1964], No. 14016/65. Heading F1N. [Also in Division F4] In a vacuum pump, Fig. 2 (not shown), wherein gas to be evacuated from a receptacle 20 is condensed on the exterior surfaces of a closed metal shell 19, the shell is cooled by a closed circuit gas refrigerating plant disposed therein and comprising a compressor 21 supplying compressed gas through heat exchanger tubing 36, 40 to an expansion engine 24 which delivers cold low pressure gas to a chamber 43 located at the bottom of the shell. After taking up the heat of the condensing gases the gas e.g. helium, neon or hydrogen in the chamber 43 flows past the heat exchanger tubing 40 to the compressor inlet 46. The tubing 36 is cooled by liquefied air in a surrounding bath 35. The compressor 21 has a piston 22 driven partly by the working piston 27 of the expansion engine 24 and partly by an electric motor 33 disposed outside the shell 19. The compressor and expansion engine may be driven separately and the compressor may be mounted outside the shell. In a second construction part of the gas is expanded in the engine and part is expanded by passage through an expansion valve leading to the chamber 43 where it collects in liquefied form.
GB14016/65A 1964-04-17 1965-04-02 Improvements in and relating to high vacuum pumps Expired GB1048332A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH499864A CH419428A (en) 1964-04-17 1964-04-17 Device for generating or maintaining a vacuum in a room

Publications (1)

Publication Number Publication Date
GB1048332A true GB1048332A (en) 1966-11-16

Family

ID=4286176

Family Applications (1)

Application Number Title Priority Date Filing Date
GB14016/65A Expired GB1048332A (en) 1964-04-17 1965-04-02 Improvements in and relating to high vacuum pumps

Country Status (7)

Country Link
US (1) US3263434A (en)
AT (1) AT251924B (en)
CH (1) CH419428A (en)
DE (1) DE1276284B (en)
GB (1) GB1048332A (en)
NL (1) NL6406151A (en)
SE (1) SE355216B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0459019A2 (en) * 1990-05-01 1991-12-04 Polycold Systems International Fast cycle cryogenic flex probe

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3488978A (en) * 1965-09-29 1970-01-13 Getters Spa Cryopumping,particularly for hydrogen
SU1698482A1 (en) * 1988-01-08 1991-12-15 Институт Анатилического Приборостроения Научно-Технического Объединения Ан Ссср Cryogenic condensate extraction pump
KR20170011237A (en) * 2015-07-22 2017-02-02 한국항공우주연구원 Apparatus and method for controlling temperature of cryopump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2939316A (en) * 1958-03-14 1960-06-07 Nat Res Corp High vacuum device
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3103108A (en) * 1961-07-17 1963-09-10 Gen Electric Shielded thermal gradient member
US3144200A (en) * 1962-10-17 1964-08-11 Clyde E Taylor Process and device for cryogenic adsorption pumping

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0459019A2 (en) * 1990-05-01 1991-12-04 Polycold Systems International Fast cycle cryogenic flex probe
EP0459019A3 (en) * 1990-05-01 1992-09-23 Marin Tek, Inc. Fast cycle cryogenic flex probe

Also Published As

Publication number Publication date
AT251924B (en) 1967-01-25
SE355216B (en) 1973-04-09
NL6406151A (en) 1965-10-18
US3263434A (en) 1966-08-02
CH419428A (en) 1966-08-31
DE1276284B (en) 1968-08-29

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