GB1140798A - Improvements in and relating to high vacuum pumps - Google Patents

Improvements in and relating to high vacuum pumps

Info

Publication number
GB1140798A
GB1140798A GB12530/67A GB1253067A GB1140798A GB 1140798 A GB1140798 A GB 1140798A GB 12530/67 A GB12530/67 A GB 12530/67A GB 1253067 A GB1253067 A GB 1253067A GB 1140798 A GB1140798 A GB 1140798A
Authority
GB
United Kingdom
Prior art keywords
anode
arrangement
vessel
coil
superconductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB12530/67A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1140798A publication Critical patent/GB1140798A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

1,140,798. Ion pumps. BALZERS PATENTUND BETEILIGUNGS-A.G. 17 March, 1967 [18 May, 1966], No. 12530/67. Heading H1D. [Also in Division F1] An electrode of a getter-ion pump operating with a magnetic field is maintained at a temperature below 20‹ K during operation. Cryogenic pumping is thus obtained in the absence of applied potentials. The anode of the pump shown is formed by annular discs 4 and part of the wall of a steel vessel 1 containing liquid helium and supported by a tube 2 from the wall 3 of a receptacle to be evacuated. Sheets 5 of getter metal Ti, Mo or Zr form cathodes which may be of multi-cellular construction and are supported by leads 6 and 7. A magnet coil 8 of superconductive wire or strip is located in the vessel 1 and supplied with current through leads 9 and 10 to establish the field which may then be maintained by a superconductive shunt. Modifications comprise: Superconductive concentrators e.g. of Nb-Zr or Nb-Ti alloys to concentrate the stray field of the magnet coil in the anode/cathode gap (Figs. 2a and 2b, not shown); an anode vessel consisting of three sections each containing a magnet coil, with cathodes mounted between the anode sections and the whole arrangement surrounded by a system of baffles allowing the passage of gas but screening the arrangement from heat radiation. The baffles may be cooled by liquid air while charging the anode vessel with liquid helium (Figs. 3a and 3b, not shown); a cylindrical arrangement of an annular anode containing a coil and surrounding a cylindrical cathode (Fig. 4, not shown); an arrangement of curved cathodes between radial anode chambers each containing a coil (Figs. 5a, 5b and 5c, not shown).
GB12530/67A 1966-05-18 1967-03-17 Improvements in and relating to high vacuum pumps Expired GB1140798A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH736266A CH442600A (en) 1966-05-18 1966-05-18 High vacuum pump

Publications (1)

Publication Number Publication Date
GB1140798A true GB1140798A (en) 1969-01-22

Family

ID=4323938

Family Applications (1)

Application Number Title Priority Date Filing Date
GB12530/67A Expired GB1140798A (en) 1966-05-18 1967-03-17 Improvements in and relating to high vacuum pumps

Country Status (6)

Country Link
US (1) US3428241A (en)
CH (1) CH442600A (en)
DE (1) DE1539152A1 (en)
FR (1) FR1523039A (en)
GB (1) GB1140798A (en)
NL (1) NL6610157A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2449806A1 (en) * 1979-02-23 1980-09-19 Kernforschungsanlage Juelich SCREEN AGAINST THERMAL RADIATION FOR CRYOPUMPS
US7943095B2 (en) 2003-08-15 2011-05-17 Edwards Limited Purifier

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1255438B (en) * 1992-07-17 1995-10-31 Getters Spa NON-EVAPORABLE GETTER PUMP
WO2001069645A1 (en) * 2000-03-13 2001-09-20 Ulvac, Inc. Spatter ion pump
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
CN111344489B (en) * 2017-07-11 2023-05-16 斯坦福研究院 Compact electrostatic ion pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3117247A (en) * 1961-05-29 1964-01-07 Varian Associates Vacuum pump
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2449806A1 (en) * 1979-02-23 1980-09-19 Kernforschungsanlage Juelich SCREEN AGAINST THERMAL RADIATION FOR CRYOPUMPS
US7943095B2 (en) 2003-08-15 2011-05-17 Edwards Limited Purifier

Also Published As

Publication number Publication date
DE1539152A1 (en) 1970-02-19
CH442600A (en) 1967-08-31
NL6610157A (en) 1967-11-20
US3428241A (en) 1969-02-18
FR1523039A (en) 1968-04-02

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