GB1140798A - Improvements in and relating to high vacuum pumps - Google Patents
Improvements in and relating to high vacuum pumpsInfo
- Publication number
- GB1140798A GB1140798A GB12530/67A GB1253067A GB1140798A GB 1140798 A GB1140798 A GB 1140798A GB 12530/67 A GB12530/67 A GB 12530/67A GB 1253067 A GB1253067 A GB 1253067A GB 1140798 A GB1140798 A GB 1140798A
- Authority
- GB
- United Kingdom
- Prior art keywords
- anode
- arrangement
- vessel
- coil
- superconductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
1,140,798. Ion pumps. BALZERS PATENTUND BETEILIGUNGS-A.G. 17 March, 1967 [18 May, 1966], No. 12530/67. Heading H1D. [Also in Division F1] An electrode of a getter-ion pump operating with a magnetic field is maintained at a temperature below 20 K during operation. Cryogenic pumping is thus obtained in the absence of applied potentials. The anode of the pump shown is formed by annular discs 4 and part of the wall of a steel vessel 1 containing liquid helium and supported by a tube 2 from the wall 3 of a receptacle to be evacuated. Sheets 5 of getter metal Ti, Mo or Zr form cathodes which may be of multi-cellular construction and are supported by leads 6 and 7. A magnet coil 8 of superconductive wire or strip is located in the vessel 1 and supplied with current through leads 9 and 10 to establish the field which may then be maintained by a superconductive shunt. Modifications comprise: Superconductive concentrators e.g. of Nb-Zr or Nb-Ti alloys to concentrate the stray field of the magnet coil in the anode/cathode gap (Figs. 2a and 2b, not shown); an anode vessel consisting of three sections each containing a magnet coil, with cathodes mounted between the anode sections and the whole arrangement surrounded by a system of baffles allowing the passage of gas but screening the arrangement from heat radiation. The baffles may be cooled by liquid air while charging the anode vessel with liquid helium (Figs. 3a and 3b, not shown); a cylindrical arrangement of an annular anode containing a coil and surrounding a cylindrical cathode (Fig. 4, not shown); an arrangement of curved cathodes between radial anode chambers each containing a coil (Figs. 5a, 5b and 5c, not shown).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH736266A CH442600A (en) | 1966-05-18 | 1966-05-18 | High vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1140798A true GB1140798A (en) | 1969-01-22 |
Family
ID=4323938
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB12530/67A Expired GB1140798A (en) | 1966-05-18 | 1967-03-17 | Improvements in and relating to high vacuum pumps |
Country Status (6)
Country | Link |
---|---|
US (1) | US3428241A (en) |
CH (1) | CH442600A (en) |
DE (1) | DE1539152A1 (en) |
FR (1) | FR1523039A (en) |
GB (1) | GB1140798A (en) |
NL (1) | NL6610157A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2449806A1 (en) * | 1979-02-23 | 1980-09-19 | Kernforschungsanlage Juelich | SCREEN AGAINST THERMAL RADIATION FOR CRYOPUMPS |
US7943095B2 (en) | 2003-08-15 | 2011-05-17 | Edwards Limited | Purifier |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1255438B (en) * | 1992-07-17 | 1995-10-31 | Getters Spa | NON-EVAPORABLE GETTER PUMP |
CN1366706A (en) * | 2000-03-13 | 2002-08-28 | 爱发科股份有限公司 | Spatter ion pump |
US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
US10460917B2 (en) * | 2016-05-26 | 2019-10-29 | AOSense, Inc. | Miniature ion pump |
CN111344489B (en) * | 2017-07-11 | 2023-05-16 | 斯坦福研究院 | Compact electrostatic ion pump |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3117247A (en) * | 1961-05-29 | 1964-01-07 | Varian Associates | Vacuum pump |
US3236442A (en) * | 1964-01-20 | 1966-02-22 | Morris Associates | Ionic vacuum pump |
-
1966
- 1966-05-18 CH CH736266A patent/CH442600A/en unknown
- 1966-07-19 NL NL6610157A patent/NL6610157A/xx unknown
-
1967
- 1967-03-17 GB GB12530/67A patent/GB1140798A/en not_active Expired
- 1967-04-13 DE DE19671539152 patent/DE1539152A1/en active Pending
- 1967-05-16 US US638801A patent/US3428241A/en not_active Expired - Lifetime
- 1967-05-18 FR FR106739A patent/FR1523039A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2449806A1 (en) * | 1979-02-23 | 1980-09-19 | Kernforschungsanlage Juelich | SCREEN AGAINST THERMAL RADIATION FOR CRYOPUMPS |
US7943095B2 (en) | 2003-08-15 | 2011-05-17 | Edwards Limited | Purifier |
Also Published As
Publication number | Publication date |
---|---|
NL6610157A (en) | 1967-11-20 |
FR1523039A (en) | 1968-04-02 |
US3428241A (en) | 1969-02-18 |
DE1539152A1 (en) | 1970-02-19 |
CH442600A (en) | 1967-08-31 |
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