GB797232A - Improvements in or relating to high vacuum ion pumps - Google Patents

Improvements in or relating to high vacuum ion pumps

Info

Publication number
GB797232A
GB797232A GB6097/56A GB609756A GB797232A GB 797232 A GB797232 A GB 797232A GB 6097/56 A GB6097/56 A GB 6097/56A GB 609756 A GB609756 A GB 609756A GB 797232 A GB797232 A GB 797232A
Authority
GB
United Kingdom
Prior art keywords
discharge
anode
cathode
tor
established
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB6097/56A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB797232A publication Critical patent/GB797232A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

797,232. Obtaining high vacua. ARDENNE, M. VON. Feb. 28, 1956 [July 11, 1955], No. 6097/56. Class 8(1). [Also in Group XL(a)] A high vacuum ion pump in which ionization of the gas takes place in a cold cathode Penning discharge has an anode of grid formation through which the ions are shot by means of an electrostatic screening field into a layer of metal condensate which is constantly renewed by cathode atomization. The Penning discharge is established in the magnetic field of a magnet 1 and yoke 2 at discharge potentials of 400-1800 volts and discharge currents of 0À2 to 2 amps and is maintainable at pressures of less than 10-5 Tor. The initial vacuum of about 10-3-10-4 Tor is established by an auxiliary pump connected at 6. The grid anode 3 is made of tungsten or molybdenum and the cold cathode 4, cooled by coils 5, of titanium or magnesium, which is atomized during the discharge and condensed on electrodes 9, 10 maintained at -500 volts relative to the anode. The non-rare gas components are gettered on the vaporized cathode metal and together with the rare gas components are removed from the system and deposited with the condensate on the collectors 9, 10.
GB6097/56A 1955-07-11 1956-02-28 Improvements in or relating to high vacuum ion pumps Expired GB797232A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE797232X 1955-07-11

Publications (1)

Publication Number Publication Date
GB797232A true GB797232A (en) 1958-06-25

Family

ID=6711124

Family Applications (1)

Application Number Title Priority Date Filing Date
GB6097/56A Expired GB797232A (en) 1955-07-11 1956-02-28 Improvements in or relating to high vacuum ion pumps

Country Status (1)

Country Link
GB (1) GB797232A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3070283A (en) * 1959-06-15 1962-12-25 Ultek Corp Vacuum pump
US3080104A (en) * 1958-09-25 1963-03-05 Gen Electric Ionic pump
US3093298A (en) * 1960-06-21 1963-06-11 Gen Electric Ionic pump
US3112863A (en) * 1960-10-06 1963-12-03 Cons Vacuum Corp Ion pump
US3149774A (en) * 1961-01-27 1964-09-22 Varian Associates Getter ion pump method and apparatus
US3150819A (en) * 1962-06-07 1964-09-29 Varian Associates High vacuum apparatus and method
US3174678A (en) * 1960-12-01 1965-03-23 Thomson Houston Comp Francaise Vacuum pumps
US3204860A (en) * 1958-04-16 1965-09-07 Csf High-vacuum pump
US3214086A (en) * 1961-12-15 1965-10-26 Compagnei Francaise Thomson Ho Vacuum pumps
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump
US3239133A (en) * 1961-04-01 1966-03-08 Leybold Holding A G E Pump
US3535055A (en) * 1959-05-25 1970-10-20 Bendix Corp Cold-cathode discharge ion pump
US3614264A (en) * 1958-06-06 1971-10-19 Siemens Ag Ionization getter pump

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3204860A (en) * 1958-04-16 1965-09-07 Csf High-vacuum pump
US3614264A (en) * 1958-06-06 1971-10-19 Siemens Ag Ionization getter pump
US3080104A (en) * 1958-09-25 1963-03-05 Gen Electric Ionic pump
US3535055A (en) * 1959-05-25 1970-10-20 Bendix Corp Cold-cathode discharge ion pump
US3070283A (en) * 1959-06-15 1962-12-25 Ultek Corp Vacuum pump
US3093298A (en) * 1960-06-21 1963-06-11 Gen Electric Ionic pump
US3112863A (en) * 1960-10-06 1963-12-03 Cons Vacuum Corp Ion pump
US3174678A (en) * 1960-12-01 1965-03-23 Thomson Houston Comp Francaise Vacuum pumps
US3149774A (en) * 1961-01-27 1964-09-22 Varian Associates Getter ion pump method and apparatus
US3239133A (en) * 1961-04-01 1966-03-08 Leybold Holding A G E Pump
US3214086A (en) * 1961-12-15 1965-10-26 Compagnei Francaise Thomson Ho Vacuum pumps
US3150819A (en) * 1962-06-07 1964-09-29 Varian Associates High vacuum apparatus and method
US3216652A (en) * 1962-09-10 1965-11-09 Hughes Aircraft Co Ionic vacuum pump

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