GB958423A - Getter ion pump method and apparatus - Google Patents

Getter ion pump method and apparatus

Info

Publication number
GB958423A
GB958423A GB3031/62A GB303162A GB958423A GB 958423 A GB958423 A GB 958423A GB 3031/62 A GB3031/62 A GB 3031/62A GB 303162 A GB303162 A GB 303162A GB 958423 A GB958423 A GB 958423A
Authority
GB
United Kingdom
Prior art keywords
anode
getter
jan
electrodes
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3031/62A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB958423A publication Critical patent/GB958423A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride

Abstract

958,423. Ion-getter pumps. VARIAN ASSOCIATES. Jan. 26, 1962 [Jan. 27, 1961], No. 3031/62. Heading H1D. An ion-getter pump comprises an anode 12, a reactive cathode 18, and a magnetic field directed between the anode and cathode, which electrodes are enclosed by a vacuum compartment 7 adapted to be connected to apparatus to be evacuated, the pump being cooled by cooling means 25 substantially enveloped by said vacuum compartment. The cooling means 25 preferably comprises a hollow pipe through which cooling liquid can be circulated, or, alternatively, an elongated metal member for conducting heat out of the compartment, and is preferably arranged in intimate contact with at least one of the electrodes and positioned between them. The anode, e.g. of titanium, is preferably of the cellular type and the direction of the magnetic field is parallel to the axis of individual cells.
GB3031/62A 1961-01-27 1962-01-26 Getter ion pump method and apparatus Expired GB958423A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US85355A US3149774A (en) 1961-01-27 1961-01-27 Getter ion pump method and apparatus

Publications (1)

Publication Number Publication Date
GB958423A true GB958423A (en) 1964-05-21

Family

ID=22191061

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3031/62A Expired GB958423A (en) 1961-01-27 1962-01-26 Getter ion pump method and apparatus

Country Status (4)

Country Link
US (1) US3149774A (en)
DE (1) DE1414572B2 (en)
FR (1) FR1312798A (en)
GB (1) GB958423A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3381890A (en) * 1964-12-30 1968-05-07 Nihon Shinku Gijitsu Kabushiki Vacuum apparatus
GB1095383A (en) * 1965-02-19
US3364370A (en) * 1966-08-17 1968-01-16 Rca Corp Tubular cell anode for sputter ion pumps
US3486213A (en) * 1968-08-27 1969-12-30 Norton Co Method of making or repairing a getter vacuum pump
US5655886A (en) * 1995-06-06 1997-08-12 Color Planar Displays, Inc. Vacuum maintenance device for high vacuum chambers
US20070286738A1 (en) * 2006-06-12 2007-12-13 Varian, Inc. Vacuum ion-getter pump with cryogenically cooled cathode
US8066433B2 (en) 2008-03-14 2011-11-29 Pro-Mart Industries, Inc. Valve for vacuum storage bag

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2103362A (en) * 1933-06-13 1937-12-28 Rca Corp Ultrahigh frequency magnetron oscillator
US2498841A (en) * 1945-06-01 1950-02-28 King L D Percival Ion source
GB797232A (en) * 1955-07-11 1958-06-25 Manfred Von Ardenne Improvements in or relating to high vacuum ion pumps
NL229703A (en) * 1957-07-24
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method

Also Published As

Publication number Publication date
DE1414572B2 (en) 1971-07-29
FR1312798A (en) 1962-12-21
US3149774A (en) 1964-09-22
DE1414572A1 (en) 1968-10-03

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