GB924918A - Electrical vacuum pump apparatus - Google Patents

Electrical vacuum pump apparatus

Info

Publication number
GB924918A
GB924918A GB31906/61A GB3190661A GB924918A GB 924918 A GB924918 A GB 924918A GB 31906/61 A GB31906/61 A GB 31906/61A GB 3190661 A GB3190661 A GB 3190661A GB 924918 A GB924918 A GB 924918A
Authority
GB
United Kingdom
Prior art keywords
cathodes
anodes
getter
titanium
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB31906/61A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US742274A external-priority patent/US3018944A/en
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB924918A publication Critical patent/GB924918A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

924,918. Ion-getter pumps. VARIAN ASSOCIATES. May 4, 1959 [June 16, 1958], No. 31906/61. Divided out of 883,214. Class 39 (1). In an ion-getter pump a cellular anode 7, Fig. 3, has a cathode plate on either side of it, at least one plate being apertured, and the apertures 38, Fig. 4, are arranged to be aligned with the outer parts of the glow discharge passing through each individual cell of the anode. A magnetic field is provided. As shown, the anodes and cathodes are arranged in the form of a stack within a stainless-steel envelope 21, Fig. 1, with pumping outlet 36 at one end. Two sets of rods 2, 11 in mutually perpendicular planes carry the cathodes and anodes respectively. Solenoid 26 is in two parts, interleaved with coolant tubes 29. The cathodes are of getter material such as titanium or chromium or many others which are specified and the anodes are of titanium.
GB31906/61A 1958-06-16 1959-05-04 Electrical vacuum pump apparatus Expired GB924918A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US742274A US3018944A (en) 1958-06-16 1958-06-16 Electrical vacuum pump apparatus
US151339A US3231175A (en) 1958-06-16 1961-11-09 Electrical vacuum pump

Publications (1)

Publication Number Publication Date
GB924918A true GB924918A (en) 1963-05-01

Family

ID=26848534

Family Applications (3)

Application Number Title Priority Date Filing Date
GB31907/61A Expired GB924919A (en) 1958-06-16 1959-05-04 Electrical vacuum pump apparatus
GB15199/59A Expired GB883214A (en) 1958-06-16 1959-05-04 Electrical vacuum pump apparatus
GB31906/61A Expired GB924918A (en) 1958-06-16 1959-05-04 Electrical vacuum pump apparatus

Family Applications Before (2)

Application Number Title Priority Date Filing Date
GB31907/61A Expired GB924919A (en) 1958-06-16 1959-05-04 Electrical vacuum pump apparatus
GB15199/59A Expired GB883214A (en) 1958-06-16 1959-05-04 Electrical vacuum pump apparatus

Country Status (4)

Country Link
US (1) US3231175A (en)
DE (1) DE1098668B (en)
FR (1) FR1227127A (en)
GB (3) GB924919A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3228589A (en) * 1963-10-16 1966-01-11 Gen Electric Ion pump having encapsulated internal magnet assemblies
US3368100A (en) * 1963-11-25 1968-02-06 Gen Electric Vacuum pump having a radially segmented, annular anode
US3377495A (en) * 1965-06-17 1968-04-09 Varian Associates Glow discharge apparatus having a stacked array of magnets
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
US6835048B2 (en) * 2002-12-18 2004-12-28 Varian, Inc. Ion pump having secondary magnetic field
EP2151849B1 (en) * 2008-08-08 2011-12-14 Agilent Technologies Italia S.p.A. Vacuum pumping system comprising a plurality of sputter ion pumps
US8439649B2 (en) * 2009-11-02 2013-05-14 Duniway Stockroom Corp. Sputter ion pump with enhanced anode
GB2627459A (en) * 2023-02-22 2024-08-28 Edwards Vacuum Llc Sputter Ion pump module and vacuum pump
GB2627461A (en) * 2023-02-22 2024-08-28 Edwards Vacuum Llc Sputter Ion pump module and vacuum pump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2808980A (en) * 1953-09-23 1957-10-08 Westinghouse Electric Corp Electrical vacuum pump

Also Published As

Publication number Publication date
DE1098668B (en) 1961-02-02
US3231175A (en) 1966-01-25
GB883214A (en) 1961-11-29
GB924919A (en) 1963-05-01
FR1227127A (en) 1960-08-18

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