GB1021064A - Improvements in or relating to vacuum ion pumps - Google Patents
Improvements in or relating to vacuum ion pumpsInfo
- Publication number
- GB1021064A GB1021064A GB44173/63A GB4417363A GB1021064A GB 1021064 A GB1021064 A GB 1021064A GB 44173/63 A GB44173/63 A GB 44173/63A GB 4417363 A GB4417363 A GB 4417363A GB 1021064 A GB1021064 A GB 1021064A
- Authority
- GB
- United Kingdom
- Prior art keywords
- anode
- spacing
- cathodes
- titanium
- increase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
- Particle Accelerators (AREA)
Abstract
1,021,064. Ion pumps. MULLARD Ltd. Sept. 8, 1964 [Nov. 8, 1963], No. 44173/63. Heading H1D. A vacuum ion pump of the Renning type and having a cellular anode or anodes has the spacing between at least one anode 5 and an associated cathode 4 tapered in a direction which provides spring which increases towards an exhaust port 7 for communication to an atmosphere to be pumped. Cathodes 4 are of titanium and are on a stainless steel housing 3 with magnetic polepieces 1, 2. Anode 5 is of titanium and is held by rods 6 which also serve as terminals and which are insulated from housing 3 by insulators 8. Sputter guards 17 are provided. Alternatively the anode may be stepped to increase the spacing (Fig. 2, not shown). In an alternative embodiment (Fig. 3, not shown) the anode surfaces are parallel and the cathodes slanted to increase the spacing.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB44173/63A GB1021064A (en) | 1963-11-08 | 1963-11-08 | Improvements in or relating to vacuum ion pumps |
DEN25774A DE1238608B (en) | 1963-11-08 | 1964-11-04 | Ion getter pump |
CH1433664A CH427128A (en) | 1963-11-08 | 1964-11-05 | Ion pump |
US409653A US3307774A (en) | 1963-11-08 | 1964-11-09 | Vacuum ion pump |
FR994307A FR1413662A (en) | 1963-11-08 | 1964-11-09 | Ion pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB44173/63A GB1021064A (en) | 1963-11-08 | 1963-11-08 | Improvements in or relating to vacuum ion pumps |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1021064A true GB1021064A (en) | 1966-02-23 |
Family
ID=10432108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB44173/63A Expired GB1021064A (en) | 1963-11-08 | 1963-11-08 | Improvements in or relating to vacuum ion pumps |
Country Status (4)
Country | Link |
---|---|
US (1) | US3307774A (en) |
CH (1) | CH427128A (en) |
DE (1) | DE1238608B (en) |
GB (1) | GB1021064A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4936452A (en) * | 1989-06-05 | 1990-06-26 | Pauley Helena R | Bathroom tissue container |
US7456634B2 (en) | 2006-10-26 | 2008-11-25 | Brooks Automation, Inc. | Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments |
DE102010055420A1 (en) * | 2010-12-21 | 2012-06-21 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Electrode device for use in e.g. sorption pump utilized for generating low pressures in specific range, has anode including structure that is recessed and articulated from single block for forming open and closed penning cells |
US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL243654A (en) * | 1958-09-25 | |||
DE1228750B (en) * | 1961-04-01 | 1966-11-17 | Leybolds Nachfolger E | Atomizing ion getter pump |
-
1963
- 1963-11-08 GB GB44173/63A patent/GB1021064A/en not_active Expired
-
1964
- 1964-11-04 DE DEN25774A patent/DE1238608B/en active Pending
- 1964-11-05 CH CH1433664A patent/CH427128A/en unknown
- 1964-11-09 US US409653A patent/US3307774A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US3307774A (en) | 1967-03-07 |
DE1238608B (en) | 1967-04-13 |
CH427128A (en) | 1966-12-31 |
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