GB1021064A - Improvements in or relating to vacuum ion pumps - Google Patents

Improvements in or relating to vacuum ion pumps

Info

Publication number
GB1021064A
GB1021064A GB44173/63A GB4417363A GB1021064A GB 1021064 A GB1021064 A GB 1021064A GB 44173/63 A GB44173/63 A GB 44173/63A GB 4417363 A GB4417363 A GB 4417363A GB 1021064 A GB1021064 A GB 1021064A
Authority
GB
United Kingdom
Prior art keywords
anode
spacing
cathodes
titanium
increase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB44173/63A
Inventor
Roy Robert Bannock
Otto Pressel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Components Ltd
Original Assignee
Mullard Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mullard Ltd filed Critical Mullard Ltd
Priority to GB44173/63A priority Critical patent/GB1021064A/en
Priority to DEN25774A priority patent/DE1238608B/en
Priority to CH1433664A priority patent/CH427128A/en
Priority to FR994307A priority patent/FR1413662A/en
Priority to US409653A priority patent/US3307774A/en
Publication of GB1021064A publication Critical patent/GB1021064A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Particle Accelerators (AREA)

Abstract

1,021,064. Ion pumps. MULLARD Ltd. Sept. 8, 1964 [Nov. 8, 1963], No. 44173/63. Heading H1D. A vacuum ion pump of the Renning type and having a cellular anode or anodes has the spacing between at least one anode 5 and an associated cathode 4 tapered in a direction which provides spring which increases towards an exhaust port 7 for communication to an atmosphere to be pumped. Cathodes 4 are of titanium and are on a stainless steel housing 3 with magnetic polepieces 1, 2. Anode 5 is of titanium and is held by rods 6 which also serve as terminals and which are insulated from housing 3 by insulators 8. Sputter guards 17 are provided. Alternatively the anode may be stepped to increase the spacing (Fig. 2, not shown). In an alternative embodiment (Fig. 3, not shown) the anode surfaces are parallel and the cathodes slanted to increase the spacing.
GB44173/63A 1963-11-08 1963-11-08 Improvements in or relating to vacuum ion pumps Expired GB1021064A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB44173/63A GB1021064A (en) 1963-11-08 1963-11-08 Improvements in or relating to vacuum ion pumps
DEN25774A DE1238608B (en) 1963-11-08 1964-11-04 Ion getter pump
CH1433664A CH427128A (en) 1963-11-08 1964-11-05 Ion pump
FR994307A FR1413662A (en) 1963-11-08 1964-11-09 Ion pump
US409653A US3307774A (en) 1963-11-08 1964-11-09 Vacuum ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB44173/63A GB1021064A (en) 1963-11-08 1963-11-08 Improvements in or relating to vacuum ion pumps

Publications (1)

Publication Number Publication Date
GB1021064A true GB1021064A (en) 1966-02-23

Family

ID=10432108

Family Applications (1)

Application Number Title Priority Date Filing Date
GB44173/63A Expired GB1021064A (en) 1963-11-08 1963-11-08 Improvements in or relating to vacuum ion pumps

Country Status (4)

Country Link
US (1) US3307774A (en)
CH (1) CH427128A (en)
DE (1) DE1238608B (en)
GB (1) GB1021064A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4936452A (en) * 1989-06-05 1990-06-26 Pauley Helena R Bathroom tissue container
US7456634B2 (en) * 2006-10-26 2008-11-25 Brooks Automation, Inc. Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
DE102010055420A1 (en) * 2010-12-21 2012-06-21 Vacom Vakuum Komponenten & Messtechnik Gmbh Electrode device for use in e.g. sorption pump utilized for generating low pressures in specific range, has anode including structure that is recessed and articulated from single block for forming open and closed penning cells
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL243654A (en) * 1958-09-25
DE1228750B (en) * 1961-04-01 1966-11-17 Leybolds Nachfolger E Atomizing ion getter pump

Also Published As

Publication number Publication date
CH427128A (en) 1966-12-31
US3307774A (en) 1967-03-07
DE1238608B (en) 1967-04-13

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