GB1228207A - - Google Patents

Info

Publication number
GB1228207A
GB1228207A GB1228207DA GB1228207A GB 1228207 A GB1228207 A GB 1228207A GB 1228207D A GB1228207D A GB 1228207DA GB 1228207 A GB1228207 A GB 1228207A
Authority
GB
United Kingdom
Prior art keywords
apertured
ion
sept
strips
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1228207A publication Critical patent/GB1228207A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)

Abstract

1,228,207. Ion pumps. VARIAN ASSOCIATES. 16 Sept., 1968 [19 Sept., 1967], No. 43986/68. Heading H1D. An ion pump comprises an apertured electrode 5 disposed between an apertured anode 4 and an apertured sputter cathode 6. In the arrangement shown an earthed casing 1 encloses a sputter cathode 6 comprising a tantalum plate 10, with apertures of approximately the same diameter as the stainless steel anode cells 4, in contact with a series of strips 12 spaced so that each aperture is traversed by at least three strips. The aperture in the tantalum ion collector 5 are three-quarters of the diameter of the anode cells. A magnetic field Ho is provided by magnets 7. The pump components may be inserted directly into a chamber to be evacuated, in which case an earthed plate is provided. The construction results in a buildup of sputtered material on both surfaces of the ion collector 5 with consequently improved argon pumping.
GB1228207D 1967-09-19 1968-09-16 Expired GB1228207A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66883967A 1967-09-19 1967-09-19

Publications (1)

Publication Number Publication Date
GB1228207A true GB1228207A (en) 1971-04-15

Family

ID=24683943

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1228207D Expired GB1228207A (en) 1967-09-19 1968-09-16

Country Status (4)

Country Link
US (1) US3452923A (en)
DE (1) DE1764917A1 (en)
FR (1) FR1586208A (en)
GB (1) GB1228207A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107808810A (en) * 2016-09-08 2018-03-16 爱德华兹真空泵有限责任公司 Ion trajectory in ionic pump manipulates construction

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6004104A (en) * 1997-07-14 1999-12-21 Duniway Stockroom Corp. Cathode structure for sputter ion pump
US6228149B1 (en) 1999-01-20 2001-05-08 Patterson Technique, Inc. Method and apparatus for moving, filtering and ionizing air
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10665437B2 (en) * 2015-02-10 2020-05-26 Hamilton Sundstrand Corporation System and method for enhanced ion pump lifespan

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1289986A (en) * 1960-05-27 1962-04-06 Varian Associates Fragrance device
US3292844A (en) * 1962-05-23 1966-12-20 Robert A Cornog Vacuum pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107808810A (en) * 2016-09-08 2018-03-16 爱德华兹真空泵有限责任公司 Ion trajectory in ionic pump manipulates construction

Also Published As

Publication number Publication date
DE1764917A1 (en) 1971-12-02
US3452923A (en) 1969-07-01
FR1586208A (en) 1970-02-13

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees