GB942546A - Glow discharge vacuum getter pump apparatus - Google Patents
Glow discharge vacuum getter pump apparatusInfo
- Publication number
- GB942546A GB942546A GB7583/60A GB758360A GB942546A GB 942546 A GB942546 A GB 942546A GB 7583/60 A GB7583/60 A GB 7583/60A GB 758360 A GB758360 A GB 758360A GB 942546 A GB942546 A GB 942546A
- Authority
- GB
- United Kingdom
- Prior art keywords
- stainless steel
- cathode
- pump
- anode
- envelope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
Landscapes
- Electron Tubes For Measurement (AREA)
- Discharge Lamp (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
942,546. lon-geffer pumps. VARIAN ASSOCIATES. March 3, 1960 [March 23, 1959], No. 7583/60. Addition to 883,189. Heading H1D. In the ion-getter pump of the parent Specification (a) the cathodes are spaced apart by sheet metal spacers 25, Figs. 2, 4, with struck-out ears 26, and (b) the anode support rod 18, Figs. 3, 5, passes within an insulator 23 which is spaced a greater distance from rod portion 18<SP>1</SP> than from the rest of the rod, to increase the leakage path. The envelope 14 is made cup-shaped and closed by a flat member 15. There are two end cathode plates of TiCrZrGd or Fl, the anode and cathode preferably being made of the same material. Four cathode spacer plates 25, Fig. 3, of stainless steel have ears 26 struck therefrom and apertures 20 to permit easy evacuation. A sputter shield 27 of stainless steel protects the glazed alumina ceramic cylinder 23 from material sputtered from the cathode. The anode lead 18 and housing cylinder 19 are of Ni plated stainless steel and members 21, 22 are of "Kovar " (Registered Trade Mark). The envelope is made up of a cup 14 and plate 15 of stainless steel. A horseshoe permanent magnet 29 produces a magnetic field. The magnetic field may be unidirectional or alternating or time varying unidirectional e.g. a bevotron accelerator field. The pump electrodes are energized by D.C. or A.C. The pump may be used to evacuate linear accelerators and electron microscopes.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US673816A US2993638A (en) | 1957-07-24 | 1957-07-24 | Electrical vacuum pump apparatus and method |
| US801186A US3088657A (en) | 1957-07-24 | 1959-03-23 | Glow discharge vacuum pump apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB942546A true GB942546A (en) | 1963-11-27 |
Family
ID=27101017
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB21237/58A Expired GB883189A (en) | 1957-07-24 | 1958-07-02 | Electrical vacuum pump and vacuum gauge apparatus |
| GB13828/61A Expired GB883190A (en) | 1957-07-24 | 1958-07-02 | Electrical vacuum pump and vacuum gauge apparatus |
| GB7583/60A Expired GB942546A (en) | 1957-07-24 | 1960-03-03 | Glow discharge vacuum getter pump apparatus |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB21237/58A Expired GB883189A (en) | 1957-07-24 | 1958-07-02 | Electrical vacuum pump and vacuum gauge apparatus |
| GB13828/61A Expired GB883190A (en) | 1957-07-24 | 1958-07-02 | Electrical vacuum pump and vacuum gauge apparatus |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3088657A (en) |
| CH (2) | CH398868A (en) |
| DE (2) | DE1098667B (en) |
| FR (1) | FR1207893A (en) |
| GB (3) | GB883189A (en) |
| NL (3) | NL6504257A (en) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3107844A (en) * | 1959-11-12 | 1963-10-22 | Ultek Corp | Single cell vacuum apparatus |
| US3125283A (en) * | 1960-03-24 | 1964-03-17 | Vacuum pump | |
| FR1281403A (en) * | 1960-12-01 | 1962-01-12 | Thomson Houston Comp Francaise | Advanced Evaporative Ionization Type Vacuum Pump System |
| US3149774A (en) * | 1961-01-27 | 1964-09-22 | Varian Associates | Getter ion pump method and apparatus |
| US3107045A (en) * | 1961-02-02 | 1963-10-15 | Varian Associates | Getter ion pump apparatus |
| US3147910A (en) * | 1961-08-30 | 1964-09-08 | Varian Associates | Vacuum pump apparatus |
| US3224664A (en) * | 1962-08-08 | 1965-12-21 | Philips Corp | Ion pump |
| US3368100A (en) * | 1963-11-25 | 1968-02-06 | Gen Electric | Vacuum pump having a radially segmented, annular anode |
| US4687417A (en) * | 1985-12-19 | 1987-08-18 | Hughes Aircraft Company | High voltage feedthrough for ion pump |
| DE102009040356A1 (en) * | 2009-09-05 | 2011-03-17 | Schmidt, Linda | Electrode arrangement for ion getter pump, has cathode plates formed in inner space, where side of electrode arrangement is designed as gas inlet opening side, and field-optimized design is formed over entire height of anode element |
| US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
| US10550829B2 (en) * | 2016-09-08 | 2020-02-04 | Edwards Vacuum Llc | Ion trajectory manipulation architecture in an ion pump |
| US20180306175A1 (en) * | 2017-04-25 | 2018-10-25 | Edwards Vacuum Llc | Magnetic focusing in an ion pump using internal ferrous materials |
| CN108194314B (en) * | 2017-12-31 | 2024-02-20 | 中国电子科技集团公司第十二研究所 | Gas trapping vacuum pump and manufacturing method and using method thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2413653A (en) * | 1943-11-15 | 1946-12-31 | Gen Motors Corp | Refrigerant compressor valve arrangement |
| US2755014A (en) * | 1953-04-24 | 1956-07-17 | Gen Electric | Ionic vacuum pump device |
-
0
- NL NL131436D patent/NL131436C/xx active
- NL NL229703D patent/NL229703A/xx unknown
-
1958
- 1958-07-02 GB GB21237/58A patent/GB883189A/en not_active Expired
- 1958-07-02 GB GB13828/61A patent/GB883190A/en not_active Expired
- 1958-07-14 DE DEV14707A patent/DE1098667B/en active Pending
- 1958-07-16 CH CH1397063A patent/CH398868A/en unknown
- 1958-07-16 CH CH6184558A patent/CH379045A/en unknown
- 1958-07-23 FR FR1207893D patent/FR1207893A/en not_active Expired
-
1959
- 1959-03-23 US US801186A patent/US3088657A/en not_active Expired - Lifetime
-
1960
- 1960-03-03 GB GB7583/60A patent/GB942546A/en not_active Expired
- 1960-03-04 DE DEV21817A patent/DE1181364B/en active Pending
-
1965
- 1965-04-02 NL NL6504257A patent/NL6504257A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB883190A (en) | 1961-11-22 |
| NL229703A (en) | |
| NL131436C (en) | |
| FR1207893A (en) | 1960-02-19 |
| CH398868A (en) | 1966-03-15 |
| CH379045A (en) | 1964-06-30 |
| DE1181364B (en) | 1964-11-12 |
| US3088657A (en) | 1963-05-07 |
| NL6504257A (en) | 1965-06-25 |
| GB883189A (en) | 1961-11-22 |
| DE1098667B (en) | 1961-02-02 |
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