GB1053215A - - Google Patents

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Publication number
GB1053215A
GB1053215A GB1053215DA GB1053215A GB 1053215 A GB1053215 A GB 1053215A GB 1053215D A GB1053215D A GB 1053215DA GB 1053215 A GB1053215 A GB 1053215A
Authority
GB
United Kingdom
Prior art keywords
cathodes
anode
ion
cathode
working space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of GB1053215A publication Critical patent/GB1053215A/en
Active legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Abstract

1,053,215. Ion pumps; ion sources; electrode materials. GENERAL ELECTRIC CO. March 20, 1964 [April 15, 1963], No. 11955/64. Heading H1D. In an ion pump or manometer a Penning discharge is initiated at low pressure in a working space defined by an anode 33 and a pair of cathodes 34, 35 by firing into the space a burst of electrons from a temporarily energized thermionic cathode 38 located behind and adjacent a small aperture 37 in one of the cathodes. The magnetic field for the working space is produced by a cylindrical magnet 39; aperture 37 is off-centre to avoid the cathode region of maximum ion erosion; thermionic cathode 38 is of thoria coated irridium; and the anode may have circumferential apertures, not shown, to facilitate access of the gas molecules to the working space. The sensitivity of measurement may be increased, as shown, by permitting ions from the discharge to pass through a grid portion 36 of cathode 35, and a focusing cylinder 31, to impact an electron multiplier mounted at the opposite end of the tube. If employed as a manometer, the anode and cathodes are composed of platinum, copper, tungsten, or stainless steel; if used as a pump, an easily sputterable material, e.g. titanium, is employed. In a modified embodiment (Figs. 1 and 2, not shown) dispensing with the electron multiplier, the quartz envelope has plane portions parallel with the two cathodes, to permit the positioning of the polepieces of a magnet closely adjacent the cathodes.
GB1053215D 1963-04-15 Active GB1053215A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US272984A US3280365A (en) 1963-04-15 1963-04-15 Penning-type discharge ionization gauge with discharge initiation electron source

Publications (1)

Publication Number Publication Date
GB1053215A true GB1053215A (en)

Family

ID=23042070

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1053215D Active GB1053215A (en) 1963-04-15

Country Status (3)

Country Link
US (1) US3280365A (en)
DE (1) DE1265338B (en)
GB (1) GB1053215A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3378712A (en) * 1966-11-18 1968-04-16 Gen Electric Field emission ionization gauge with restricted line of sight between field emissionanode and ion collector
US4270091A (en) * 1978-01-25 1981-05-26 Varian Associates, Inc. Apparatus and method for measuring pressures and indicating leaks with optical analysis
US4380720A (en) * 1979-11-20 1983-04-19 Fleck Carl M Apparatus for producing a directed flow of a gaseous medium utilizing the electric wind principle
US5157333A (en) * 1991-03-12 1992-10-20 Mks Instruments, Inc. Discharge initiating means for cold cathode discharge ionization gauge
US5198772A (en) * 1991-03-12 1993-03-30 Mks Instruments, Inc. Removable discharge initiating means for cold cathode discharge ionization gauge
US9484176B2 (en) * 2012-09-10 2016-11-01 Thomas Schenkel Advanced penning ion source

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2081429A (en) * 1933-06-03 1937-05-25 Gaede Wolfgang Electron tube and method of operating the same
NL50072C (en) * 1935-12-28
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device
US2757306A (en) * 1955-02-23 1956-07-31 Nat Res Dev Ionisation gauge
DE1089112B (en) * 1958-02-13 1960-09-15 Thomson Houston Comp Francaise Vacuum pump
US3204860A (en) * 1958-04-16 1965-09-07 Csf High-vacuum pump
DE1089505B (en) * 1958-08-02 1960-09-22 Philips Nv Ion pump with a discharge path lengthened by a magnetic field and a method for using such an ion pump
NL243654A (en) * 1958-09-25
GB945005A (en) * 1960-06-07 1963-12-18 Ici Ltd Improvements in and relating to omegatrons
DE1156581B (en) * 1961-04-17 1963-10-31 Philips Nv Ionization manometer

Also Published As

Publication number Publication date
DE1265338B (en) 1968-04-04
US3280365A (en) 1966-10-18

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