GB1049125A - Ion pump - Google Patents

Ion pump

Info

Publication number
GB1049125A
GB1049125A GB30183/63A GB3018363A GB1049125A GB 1049125 A GB1049125 A GB 1049125A GB 30183/63 A GB30183/63 A GB 30183/63A GB 3018363 A GB3018363 A GB 3018363A GB 1049125 A GB1049125 A GB 1049125A
Authority
GB
United Kingdom
Prior art keywords
pump
supported
polepieces
seal
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB30183/63A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canadian Patents and Development Ltd
Original Assignee
Canadian Patents and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canadian Patents and Development Ltd filed Critical Canadian Patents and Development Ltd
Publication of GB1049125A publication Critical patent/GB1049125A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Microwave Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

1,049,125. Ion pumps. CANADIAN PATENTS & DEVELOPMENT Ltd. July 30, 1963 [Aug. 23, 1962], No. 30183/63. Heading H1D. A magnetron-type cold-cathode getter-ion pump is similar in construction to the sputterion pump described in Specification 1,049,124, but has an evaporator 20 and accelerator electrodes 23, on which evaporated material is deposited, in place of a sputter cathode. The envelope of the pump is formed by upper and lower polepieces 7, 8, a wall 13 of stainless steel or other non-magnetic material, a glassto-metal seal 6, and a tubular member 11 for connection to a tubulation of a system to be evacuated. Rings 9 of sheet titanium form a cathode with metal sheets 10, preferably of titanium, covering the faces of the polepieces 7, 8. A cylindrical anode 12 is supported by a rod 15. An evaporator 20 having a heating winding 21 is supported by leads 5 passing through the seal 6. Accelerator electrodes 23 are supported by rods 24 passing through the seal 6. A number of permanent magnets 14 contact the polepieces 7 and 8 which are preferably of mild steel. Three assemblies as shown may be superimposed (Fig. 4, not shown) to provide a pump capable of increased pumping speeds.
GB30183/63A 1962-08-23 1963-07-30 Ion pump Expired GB1049125A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US218917A US3176907A (en) 1962-08-23 1962-08-23 Ion pump

Publications (1)

Publication Number Publication Date
GB1049125A true GB1049125A (en) 1966-11-23

Family

ID=22817006

Family Applications (1)

Application Number Title Priority Date Filing Date
GB30183/63A Expired GB1049125A (en) 1962-08-23 1963-07-30 Ion pump

Country Status (2)

Country Link
US (1) US3176907A (en)
GB (1) GB1049125A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3338507A (en) * 1965-03-22 1967-08-29 Perkin Elmer Corp Ionic vacuum pump
FR1583456A (en) * 1968-04-11 1969-10-31
US7236344B2 (en) * 2005-05-06 2007-06-26 Cool Shield, Inc. Ionic flow generator for thermal management
JP5495145B2 (en) * 2010-04-02 2014-05-21 独立行政法人情報通信研究機構 Ion pump system

Also Published As

Publication number Publication date
US3176907A (en) 1965-04-06

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