GB1134231A - Improvements in or relating to ion vacuum pumps - Google Patents

Improvements in or relating to ion vacuum pumps

Info

Publication number
GB1134231A
GB1134231A GB2041/66A GB204166A GB1134231A GB 1134231 A GB1134231 A GB 1134231A GB 2041/66 A GB2041/66 A GB 2041/66A GB 204166 A GB204166 A GB 204166A GB 1134231 A GB1134231 A GB 1134231A
Authority
GB
United Kingdom
Prior art keywords
pump
sputter
cathodes
chamber
sublimation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2041/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB1134231A publication Critical patent/GB1134231A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/186—Getter supports

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

1,134,231. Ion pumps. L. D. HALL. 17 Jan., 1966 [25 Jan., 1965], No. 2041/66. Heading HID. A vacuum pump comprises a chamber 12 having a wall 13 serving as the sole anode of the pump, a cathode 16 of a gas-absorbent metal, means 25 for producing a magnetic field in a selected direction with reference to the chamber, and means for connecting the electrodes to a source 20 of potential to sputter said cathode 16 with positive ions produced by electron bombardment of gas molecules in said chamber, the sputtered metal absorbing gas particles while it condenses on said wall 13. In the pump shown two sputter cathodes 16 and 17 are connected to source 20, and anode 13 is earthed. The pump also comprises a sublimation target 35 heated by a filament 41 and arranged in direct line of sight with the cathodes 16 and 17 so that sublimed material is deposited on the cathodes. The pump may be operated as a sputter pump, or as a combined sputter and sublimation pump. The sublimation target and heating filament are omitted in a simple sputter pump (Fig. 1, not shown). The cathodes 16 and 17 may be of Ti or V. The sublimation target 35 may be of Cr or may be as described in Specification 1,134,233.
GB2041/66A 1965-01-25 1966-01-17 Improvements in or relating to ion vacuum pumps Expired GB1134231A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US427833A US3391303A (en) 1965-01-25 1965-01-25 Electronic vacuum pump including a sputter electrode

Publications (1)

Publication Number Publication Date
GB1134231A true GB1134231A (en) 1968-11-20

Family

ID=23696479

Family Applications (3)

Application Number Title Priority Date Filing Date
GB46387/67A Expired GB1134232A (en) 1965-01-25 1966-01-17 Improvements in or relating to electronic sublimation vacuum pumps
GB2041/66A Expired GB1134231A (en) 1965-01-25 1966-01-17 Improvements in or relating to ion vacuum pumps
GB46388/67A Expired GB1134233A (en) 1965-01-25 1966-01-17 Improvements in or relating to electronic sublimation vacuum pumps

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB46387/67A Expired GB1134232A (en) 1965-01-25 1966-01-17 Improvements in or relating to electronic sublimation vacuum pumps

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB46388/67A Expired GB1134233A (en) 1965-01-25 1966-01-17 Improvements in or relating to electronic sublimation vacuum pumps

Country Status (4)

Country Link
US (1) US3391303A (en)
DE (1) DE1539130A1 (en)
FR (1) FR1464357A (en)
GB (3) GB1134232A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3591827A (en) * 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
GB1386251A (en) * 1971-03-24 1975-03-05 British Oxygen Co Ltd Source of sublimable material
US4167370A (en) * 1976-11-01 1979-09-11 Massachusetts Institute Of Technology Method of an apparatus for self-sustaining high vacuum in a high voltage environment
US5646488A (en) * 1995-10-11 1997-07-08 Warburton; William K. Differential pumping stage with line of sight pumping mechanism
WO2003058069A2 (en) * 2002-01-14 2003-07-17 Varco Ltd. Arc vacuum pump
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10629417B1 (en) * 2016-12-01 2020-04-21 ColdQuanta, Inc. Sputter ion pump with penning-trap current sensor
GB2576968B (en) * 2019-05-24 2021-12-08 Edwards Ltd A vacuum pumping system having multiple pumps

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2006081A (en) * 1934-03-02 1935-06-25 Hanovia Chemical & Mfg Co Electrode for vapor electric devices
US2477279A (en) * 1946-09-11 1949-07-26 Hanovia Chemical & Mfg Co Electrical discharge device
US2845567A (en) * 1954-02-04 1958-07-29 Itt Indirectly heated thermionic cathode
DE1075272B (en) * 1958-06-06 1960-02-11 Siemens Schuckertwerke Aktien gesellschaft Berlin und Erlangen Iomation getter pump
NL251846A (en) * 1959-05-25
US3152752A (en) * 1962-04-30 1964-10-13 Gen Electric Apparatus and method of removing organic vapors from low pressure vacuum systems
US3176906A (en) * 1962-08-23 1965-04-06 Ca Nat Research Council Ion pump
US3235170A (en) * 1963-01-31 1966-02-15 Cons Vacuum Corp Getter supply
US3244990A (en) * 1963-02-26 1966-04-05 Wisconsin Alumni Res Found Electron vacuum tube employing orbiting electrons

Also Published As

Publication number Publication date
GB1134232A (en) 1968-11-20
GB1134233A (en) 1968-11-20
DE1539130A1 (en) 1970-11-12
US3391303A (en) 1968-07-02
FR1464357A (en) 1966-12-30

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