GB1134232A - Improvements in or relating to electronic sublimation vacuum pumps - Google Patents
Improvements in or relating to electronic sublimation vacuum pumpsInfo
- Publication number
- GB1134232A GB1134232A GB46387/67A GB4638767A GB1134232A GB 1134232 A GB1134232 A GB 1134232A GB 46387/67 A GB46387/67 A GB 46387/67A GB 4638767 A GB4638767 A GB 4638767A GB 1134232 A GB1134232 A GB 1134232A
- Authority
- GB
- United Kingdom
- Prior art keywords
- sublimation
- relating
- electronic
- vacuum pumps
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/186—Getter supports
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
1,134,232. Gettering. L. D. HALL. 17 Jan., 1966 [25 Jan., 1965], No. 46387/67. Divided out of 1,134,231. Heading H1D. A vacuum pump for producing a vacuum in a chamber by sublimation and subsequent condensation of a gas-absorbent metal comprises a chamber 62, a sublimation target 64 of reactive metal, an electron source 68 for subliming a portion of the target, and a shield 75 for preventing sublimed metal from impinging on the source 68. The target 64 may be as described and claimed in Specification 1,134,233.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US427833A US3391303A (en) | 1965-01-25 | 1965-01-25 | Electronic vacuum pump including a sputter electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1134232A true GB1134232A (en) | 1968-11-20 |
Family
ID=23696479
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB46387/67A Expired GB1134232A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to electronic sublimation vacuum pumps |
GB2041/66A Expired GB1134231A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to ion vacuum pumps |
GB46388/67A Expired GB1134233A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to electronic sublimation vacuum pumps |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2041/66A Expired GB1134231A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to ion vacuum pumps |
GB46388/67A Expired GB1134233A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to electronic sublimation vacuum pumps |
Country Status (4)
Country | Link |
---|---|
US (1) | US3391303A (en) |
DE (1) | DE1539130A1 (en) |
FR (1) | FR1464357A (en) |
GB (3) | GB1134232A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3591827A (en) * | 1967-11-29 | 1971-07-06 | Andar Iti Inc | Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor |
GB1386251A (en) * | 1971-03-24 | 1975-03-05 | British Oxygen Co Ltd | Source of sublimable material |
US4167370A (en) * | 1976-11-01 | 1979-09-11 | Massachusetts Institute Of Technology | Method of an apparatus for self-sustaining high vacuum in a high voltage environment |
US5646488A (en) * | 1995-10-11 | 1997-07-08 | Warburton; William K. | Differential pumping stage with line of sight pumping mechanism |
AU2003207957A1 (en) * | 2002-01-14 | 2003-07-24 | Varco Ltd. | Arc vacuum pump |
US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
US10629417B1 (en) * | 2016-12-01 | 2020-04-21 | ColdQuanta, Inc. | Sputter ion pump with penning-trap current sensor |
GB2576968B (en) * | 2019-05-24 | 2021-12-08 | Edwards Ltd | A vacuum pumping system having multiple pumps |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2006081A (en) * | 1934-03-02 | 1935-06-25 | Hanovia Chemical & Mfg Co | Electrode for vapor electric devices |
US2477279A (en) * | 1946-09-11 | 1949-07-26 | Hanovia Chemical & Mfg Co | Electrical discharge device |
US2845567A (en) * | 1954-02-04 | 1958-07-29 | Itt | Indirectly heated thermionic cathode |
DE1075272B (en) * | 1958-06-06 | 1960-02-11 | Siemens Schuckertwerke Aktien gesellschaft Berlin und Erlangen | Iomation getter pump |
NL251846A (en) * | 1959-05-25 | |||
US3152752A (en) * | 1962-04-30 | 1964-10-13 | Gen Electric | Apparatus and method of removing organic vapors from low pressure vacuum systems |
US3176906A (en) * | 1962-08-23 | 1965-04-06 | Ca Nat Research Council | Ion pump |
US3235170A (en) * | 1963-01-31 | 1966-02-15 | Cons Vacuum Corp | Getter supply |
US3244990A (en) * | 1963-02-26 | 1966-04-05 | Wisconsin Alumni Res Found | Electron vacuum tube employing orbiting electrons |
-
1965
- 1965-01-25 US US427833A patent/US3391303A/en not_active Expired - Lifetime
-
1966
- 1966-01-14 FR FR45911A patent/FR1464357A/en not_active Expired
- 1966-01-17 GB GB46387/67A patent/GB1134232A/en not_active Expired
- 1966-01-17 GB GB2041/66A patent/GB1134231A/en not_active Expired
- 1966-01-17 GB GB46388/67A patent/GB1134233A/en not_active Expired
- 1966-01-21 DE DE19661539130 patent/DE1539130A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
GB1134231A (en) | 1968-11-20 |
US3391303A (en) | 1968-07-02 |
FR1464357A (en) | 1966-12-30 |
GB1134233A (en) | 1968-11-20 |
DE1539130A1 (en) | 1970-11-12 |
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