AU2003207957A1 - Arc vacuum pump - Google Patents

Arc vacuum pump

Info

Publication number
AU2003207957A1
AU2003207957A1 AU2003207957A AU2003207957A AU2003207957A1 AU 2003207957 A1 AU2003207957 A1 AU 2003207957A1 AU 2003207957 A AU2003207957 A AU 2003207957A AU 2003207957 A AU2003207957 A AU 2003207957A AU 2003207957 A1 AU2003207957 A1 AU 2003207957A1
Authority
AU
Australia
Prior art keywords
vacuum pump
arc vacuum
arc
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003207957A
Other versions
AU2003207957A8 (en
Inventor
Aleksander Arenshtam
Efim Bender
Nitzan Eliyahu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varco Ltd
Original Assignee
Varco Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IL14762602A external-priority patent/IL147626A0/en
Priority claimed from IL15049702A external-priority patent/IL150497A0/en
Application filed by Varco Ltd filed Critical Varco Ltd
Publication of AU2003207957A8 publication Critical patent/AU2003207957A8/en
Publication of AU2003207957A1 publication Critical patent/AU2003207957A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
AU2003207957A 2002-01-14 2003-01-14 Arc vacuum pump Abandoned AU2003207957A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
IL14762602A IL147626A0 (en) 2002-01-14 2002-01-14 Arc-vacuum pump
IL147626 2002-01-14
IL150497 2002-06-30
IL15049702A IL150497A0 (en) 2002-06-30 2002-06-30 Arc-vacuum pump
PCT/IL2003/000035 WO2003058069A2 (en) 2002-01-14 2003-01-14 Arc vacuum pump

Publications (2)

Publication Number Publication Date
AU2003207957A8 AU2003207957A8 (en) 2003-07-24
AU2003207957A1 true AU2003207957A1 (en) 2003-07-24

Family

ID=26324058

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003207957A Abandoned AU2003207957A1 (en) 2002-01-14 2003-01-14 Arc vacuum pump

Country Status (2)

Country Link
AU (1) AU2003207957A1 (en)
WO (1) WO2003058069A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0502495D0 (en) 2005-02-07 2005-03-16 Boc Group Plc Ejector pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL132318C (en) * 1958-06-06
US3391303A (en) * 1965-01-25 1968-07-02 Lewis D. Hall Electronic vacuum pump including a sputter electrode
GB1333388A (en) * 1969-11-14 1973-10-10 Edwards High Vacuum Int Ltd Vacuum pumps
US4047102A (en) * 1974-10-30 1977-09-06 Varian Associates Dual chamber, high sensitivity gas sensor and pump
US4397611A (en) * 1981-07-06 1983-08-09 The Perkin-Elmer Corp. Particle beam instrumentation ion pump
EP0782174A1 (en) * 1995-12-26 1997-07-02 Nihon Shinku Gijutsu Kabushiki Kaisha Sputter ion pump

Also Published As

Publication number Publication date
AU2003207957A8 (en) 2003-07-24
WO2003058069A2 (en) 2003-07-17
WO2003058069A3 (en) 2004-01-29

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase