AU2003227555A1 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
AU2003227555A1
AU2003227555A1 AU2003227555A AU2003227555A AU2003227555A1 AU 2003227555 A1 AU2003227555 A1 AU 2003227555A1 AU 2003227555 A AU2003227555 A AU 2003227555A AU 2003227555 A AU2003227555 A AU 2003227555A AU 2003227555 A1 AU2003227555 A1 AU 2003227555A1
Authority
AU
Australia
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003227555A
Inventor
Christian Harig
Manfred Kieffer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of AU2003227555A1 publication Critical patent/AU2003227555A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0261—Surge control by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
    • Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
    • Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
AU2003227555A 2002-04-11 2003-04-01 Vacuum pump Abandoned AU2003227555A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10215896.7 2002-04-11
DE10215896A DE10215896A1 (en) 2002-04-11 2002-04-11 vacuum pump
PCT/EP2003/003374 WO2003085268A1 (en) 2002-04-11 2003-04-01 Vacuum pump

Publications (1)

Publication Number Publication Date
AU2003227555A1 true AU2003227555A1 (en) 2003-10-20

Family

ID=28458708

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003227555A Abandoned AU2003227555A1 (en) 2002-04-11 2003-04-01 Vacuum pump

Country Status (4)

Country Link
EP (1) EP1492957B1 (en)
AU (1) AU2003227555A1 (en)
DE (2) DE10215896A1 (en)
WO (1) WO2003085268A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004024562A1 (en) * 2004-05-18 2005-12-15 Pfeiffer Vacuum Gmbh Dry running piston vacuum pump
DE102005028559B4 (en) * 2005-06-21 2013-01-03 E. Dold & Söhne KG Method and device for monitoring the speed of an electric motor
JP4970445B2 (en) 2005-07-24 2012-07-04 カーメリ・アダハン Wound cover and drainage system
CA2614797A1 (en) * 2005-07-24 2007-02-01 Carmeli Adahan Suctioning system, method and kit
US7503910B2 (en) 2006-02-01 2009-03-17 Carmeli Adahan Suctioning system, method and kit
DE102005041501A1 (en) * 2005-09-01 2007-03-08 Leybold Vacuum Gmbh Vacuum turbomolecular pump
DE102005045284A1 (en) * 2005-09-22 2007-03-29 Pfeiffer Vacuum Gmbh Speed monitoring device
DE102005045283B4 (en) * 2005-09-22 2014-05-15 Pfeiffer Vacuum Gmbh Vacuum pumping system
DE102006041183A1 (en) * 2006-09-01 2008-03-06 Oerlikon Leybold Vacuum Gmbh Turbo-molecular vacuum pump, has motor coils connected with brake resistor by change-over contact of brake relay e.g. mechanical relay, and with inverter module by another change-over contact of brake relay
DE202006017554U1 (en) * 2006-11-17 2008-03-27 Oerlikon Leybold Vacuum Gmbh vacuum pump
CN101678155A (en) 2007-05-07 2010-03-24 卡尔梅利·阿达汗 Suction system
EP3611383B1 (en) * 2019-07-17 2021-12-29 Pfeiffer Vacuum Gmbh Speed control of a rotor of a vacuum pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4237971B4 (en) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vacuum pump with converter
IT1288738B1 (en) * 1996-10-08 1998-09-24 Varian Spa ELECTRONIC CONTROL UNIT FOR VACUUM PUMP.
JP3057486B2 (en) * 1997-01-22 2000-06-26 セイコー精機株式会社 Turbo molecular pump
DE19745490A1 (en) * 1997-10-15 1999-04-22 Heidenhain Gmbh Dr Johannes Electric motor operation monitoring method
JP3169892B2 (en) * 1998-04-28 2001-05-28 セイコー精機株式会社 Turbo molecular pump device
DE10041606B4 (en) * 2000-08-24 2008-07-24 Berger Lahr Gmbh & Co. Kg Electromotive drive and method for operating an electronically commutated electric motor

Also Published As

Publication number Publication date
EP1492957A1 (en) 2005-01-05
DE10215896A1 (en) 2003-10-23
DE50308541D1 (en) 2007-12-20
WO2003085268A1 (en) 2003-10-16
EP1492957B1 (en) 2007-11-07

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase