GB1134233A - Improvements in or relating to electronic sublimation vacuum pumps - Google Patents
Improvements in or relating to electronic sublimation vacuum pumpsInfo
- Publication number
- GB1134233A GB1134233A GB46388/67A GB4638867A GB1134233A GB 1134233 A GB1134233 A GB 1134233A GB 46388/67 A GB46388/67 A GB 46388/67A GB 4638867 A GB4638867 A GB 4638867A GB 1134233 A GB1134233 A GB 1134233A
- Authority
- GB
- United Kingdom
- Prior art keywords
- relating
- electronic
- sublimation
- vacuum pumps
- sublimation vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
- H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
- H01J7/186—Getter supports
Abstract
1,134,233. Ion pumps; gettering. L. D. HALL. 17 Jan., 1966 [25 Jan., 1965], No. 46388/67. Divided out of 1,134,231. Heading H1D. A sublimation target comprises a member 50 of a refractory metal, e.g. W, supporting a plurality of alternate layers 52, 54, 56 of reactive metal, e.g. Ti and layers 51, 53, 55, 57 of refractory metal, e.g. Mo, Ta or W. The target may be used in the sublimation pump described in Specification 1,134,232, or in the combined sputter and sublimation pump described in Specification 1,134,231.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US427833A US3391303A (en) | 1965-01-25 | 1965-01-25 | Electronic vacuum pump including a sputter electrode |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1134233A true GB1134233A (en) | 1968-11-20 |
Family
ID=23696479
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB46387/67A Expired GB1134232A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to electronic sublimation vacuum pumps |
GB2041/66A Expired GB1134231A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to ion vacuum pumps |
GB46388/67A Expired GB1134233A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to electronic sublimation vacuum pumps |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB46387/67A Expired GB1134232A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to electronic sublimation vacuum pumps |
GB2041/66A Expired GB1134231A (en) | 1965-01-25 | 1966-01-17 | Improvements in or relating to ion vacuum pumps |
Country Status (4)
Country | Link |
---|---|
US (1) | US3391303A (en) |
DE (1) | DE1539130A1 (en) |
FR (1) | FR1464357A (en) |
GB (3) | GB1134232A (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3591827A (en) * | 1967-11-29 | 1971-07-06 | Andar Iti Inc | Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor |
GB1386251A (en) * | 1971-03-24 | 1975-03-05 | British Oxygen Co Ltd | Source of sublimable material |
US4167370A (en) * | 1976-11-01 | 1979-09-11 | Massachusetts Institute Of Technology | Method of an apparatus for self-sustaining high vacuum in a high voltage environment |
US5646488A (en) * | 1995-10-11 | 1997-07-08 | Warburton; William K. | Differential pumping stage with line of sight pumping mechanism |
WO2003058069A2 (en) * | 2002-01-14 | 2003-07-17 | Varco Ltd. | Arc vacuum pump |
US9960026B1 (en) * | 2013-11-11 | 2018-05-01 | Coldquanta Inc. | Ion pump with direct molecule flow channel through anode |
US10629417B1 (en) * | 2016-12-01 | 2020-04-21 | ColdQuanta, Inc. | Sputter ion pump with penning-trap current sensor |
GB2576968B (en) * | 2019-05-24 | 2021-12-08 | Edwards Ltd | A vacuum pumping system having multiple pumps |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2006081A (en) * | 1934-03-02 | 1935-06-25 | Hanovia Chemical & Mfg Co | Electrode for vapor electric devices |
US2477279A (en) * | 1946-09-11 | 1949-07-26 | Hanovia Chemical & Mfg Co | Electrical discharge device |
US2845567A (en) * | 1954-02-04 | 1958-07-29 | Itt | Indirectly heated thermionic cathode |
NL239135A (en) * | 1958-06-06 | |||
NL251846A (en) * | 1959-05-25 | |||
US3152752A (en) * | 1962-04-30 | 1964-10-13 | Gen Electric | Apparatus and method of removing organic vapors from low pressure vacuum systems |
US3176906A (en) * | 1962-08-23 | 1965-04-06 | Ca Nat Research Council | Ion pump |
US3235170A (en) * | 1963-01-31 | 1966-02-15 | Cons Vacuum Corp | Getter supply |
US3244990A (en) * | 1963-02-26 | 1966-04-05 | Wisconsin Alumni Res Found | Electron vacuum tube employing orbiting electrons |
-
1965
- 1965-01-25 US US427833A patent/US3391303A/en not_active Expired - Lifetime
-
1966
- 1966-01-14 FR FR45911A patent/FR1464357A/en not_active Expired
- 1966-01-17 GB GB46387/67A patent/GB1134232A/en not_active Expired
- 1966-01-17 GB GB2041/66A patent/GB1134231A/en not_active Expired
- 1966-01-17 GB GB46388/67A patent/GB1134233A/en not_active Expired
- 1966-01-21 DE DE19661539130 patent/DE1539130A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
US3391303A (en) | 1968-07-02 |
FR1464357A (en) | 1966-12-30 |
GB1134232A (en) | 1968-11-20 |
GB1134231A (en) | 1968-11-20 |
DE1539130A1 (en) | 1970-11-12 |
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