GB1209026A - Improvements in or relating to cold cathode, glow discharge device - Google Patents

Improvements in or relating to cold cathode, glow discharge device

Info

Publication number
GB1209026A
GB1209026A GB48144/66A GB4814466A GB1209026A GB 1209026 A GB1209026 A GB 1209026A GB 48144/66 A GB48144/66 A GB 48144/66A GB 4814466 A GB4814466 A GB 4814466A GB 1209026 A GB1209026 A GB 1209026A
Authority
GB
United Kingdom
Prior art keywords
electrode
mesh
electrodes
stream
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB48144/66A
Inventor
Ronald Arthur Dugdale
Stanley Denis Ford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to GB48144/66A priority Critical patent/GB1209026A/en
Priority to US677103A priority patent/US3482133A/en
Publication of GB1209026A publication Critical patent/GB1209026A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H01J17/06—Cathodes
    • H01J17/066—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0066—Construction, material, support, protection and temperature regulation of electrodes; Electrode cups

Abstract

1,209,026. Electron beam furnaces; ion beam apparatus. UNITED KINGDOM ATOMIC ENERGY AUTHORITY 24 Oct., 1967 [26 Oct., 1966], No. 48144/66. Heading H1D. A cold cathode (i.e. non-thermionic) glow discharge device producing a stream of electrons or ions comprises a first electrode 4 including a curved metallic plate 6 and a second electrode 5 including a metallic mesh 13, the plate and mesh being separated by a gap which is greatest at their centres and decreases towards their edges, the first electrode also including a portion 28 which extends from the -edge of said plate towards said mesh, and means to apply potentials to said electrodes. To produce a stream of electrons said first and second electrodes 4 and 5 are made cathode and anode, respectively, and said portion 28 extends about one-third of the distance to said mesh. To produce a stream of ions the electrodes 4 and 5 are made anode and cathode, respectively, and said portion 28 extends about one-half of the distance to said mesh. An enclosure formed by a glass cylinder 1 and earthed aluminium end-plates 2 and 3 is evacuated by a pump 20 to a pressure of 100- 300 microns Hg, which pressure is then maintained by adjusting a valve 22 to admit sufficient air to the enclosure through apertures 9 in electrode 4 to balance -the capacity of the pump. Tubes 10 and 17 supporting electrodes 4 and 5 are separated from an insulating tube 11 by copper wire spacers 12 and 18. Material 24 is vaporized in a rotatable crucible 25 by an electron beam 23 focused by an electrode 27 and condenses on a surface 26 which may be movable and may for annealing purposes be subjected to a further stream of electrons from a second similar electrode system. The cathode plate 6 may be pre-heated -by radiant heat or by conduction from a heating resistance to prevent glow to arc transitions during the initial stages of operation.
GB48144/66A 1966-10-26 1966-10-26 Improvements in or relating to cold cathode, glow discharge device Expired GB1209026A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB48144/66A GB1209026A (en) 1966-10-26 1966-10-26 Improvements in or relating to cold cathode, glow discharge device
US677103A US3482133A (en) 1966-10-26 1967-10-23 Cold cathode,glow discharge devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB48144/66A GB1209026A (en) 1966-10-26 1966-10-26 Improvements in or relating to cold cathode, glow discharge device

Publications (1)

Publication Number Publication Date
GB1209026A true GB1209026A (en) 1970-10-14

Family

ID=10447546

Family Applications (1)

Application Number Title Priority Date Filing Date
GB48144/66A Expired GB1209026A (en) 1966-10-26 1966-10-26 Improvements in or relating to cold cathode, glow discharge device

Country Status (2)

Country Link
US (1) US3482133A (en)
GB (1) GB1209026A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2146170A (en) * 1983-08-18 1985-04-11 Jeol Ltd Ion source for mass spectrometer
CN103299390A (en) * 2010-10-25 2013-09-11 弗劳恩霍弗实用研究促进协会 Device for producing an electron beam

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1275261A (en) * 1968-06-04 1972-05-24 Atomic Energy Authority Uk Improvements in or relating to non thermionic cathode slow discharge devices
GB1287262A (en) * 1968-09-05 1972-08-31 Atomic Energy Authority Uk Improvements in or relating to non-thermionic glow discharge devices
US3988565A (en) * 1973-06-11 1976-10-26 Varian Associates Nuclear reactor fuel rod thermal simulator
US4471224A (en) * 1982-03-08 1984-09-11 International Business Machines Corporation Apparatus and method for generating high current negative ions
US4538067A (en) * 1982-12-09 1985-08-27 International Business Machines Corporation Single grid focussed ion beam source
CA2065581C (en) * 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
DE4440521C1 (en) 1994-11-12 1995-11-02 Rowo Coating Ges Fuer Beschich Device for coating substrates with a material vapor in a vacuum or vacuum
EP2088612A1 (en) * 2007-12-21 2009-08-12 Applied Materials, Inc. Method of heating or cleaning a web or foil
CN107078004B (en) * 2014-11-07 2019-10-15 应用材料公司 For having the device and method of big width flexible base board using electron beam treatment

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2570124A (en) * 1949-10-20 1951-10-02 Rca Corp Positive ion beam gun
US3156842A (en) * 1962-10-08 1964-11-10 Gordon W Mcclure Gas ionizer
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2146170A (en) * 1983-08-18 1985-04-11 Jeol Ltd Ion source for mass spectrometer
CN103299390A (en) * 2010-10-25 2013-09-11 弗劳恩霍弗实用研究促进协会 Device for producing an electron beam
CN103299390B (en) * 2010-10-25 2016-04-20 弗劳恩霍弗实用研究促进协会 For generation of the equipment of electron beam

Also Published As

Publication number Publication date
US3482133A (en) 1969-12-02

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees