CH379045A - Ion getter vacuum pump with glow discharge - Google Patents

Ion getter vacuum pump with glow discharge

Info

Publication number
CH379045A
CH379045A CH6184558A CH6184558A CH379045A CH 379045 A CH379045 A CH 379045A CH 6184558 A CH6184558 A CH 6184558A CH 6184558 A CH6184558 A CH 6184558A CH 379045 A CH379045 A CH 379045A
Authority
CH
Switzerland
Prior art keywords
vacuum pump
glow discharge
ion getter
getter vacuum
ion
Prior art date
Application number
CH6184558A
Other languages
German (de)
Inventor
Lewis Dana Hall
John Calville Helmer
Robert Lawrence Jepsen
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH379045A publication Critical patent/CH379045A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH6184558A 1957-07-24 1958-07-16 Ion getter vacuum pump with glow discharge CH379045A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US673816A US2993638A (en) 1957-07-24 1957-07-24 Electrical vacuum pump apparatus and method

Publications (1)

Publication Number Publication Date
CH379045A true CH379045A (en) 1964-06-30

Family

ID=24704218

Family Applications (2)

Application Number Title Priority Date Filing Date
CH6184558A CH379045A (en) 1957-07-24 1958-07-16 Ion getter vacuum pump with glow discharge
CH1397063A CH398868A (en) 1957-07-24 1958-07-16 Ion getter vacuum pump with glow discharge

Family Applications After (1)

Application Number Title Priority Date Filing Date
CH1397063A CH398868A (en) 1957-07-24 1958-07-16 Ion getter vacuum pump with glow discharge

Country Status (6)

Country Link
US (1) US2993638A (en)
CH (2) CH379045A (en)
DE (1) DE1098667B (en)
FR (1) FR1207893A (en)
GB (1) GB883189A (en)
SE (1) SE183128C1 (en)

Families Citing this family (54)

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NL256013A (en) * 1959-09-25
US3107844A (en) * 1959-11-12 1963-10-22 Ultek Corp Single cell vacuum apparatus
US3125283A (en) * 1960-03-24 1964-03-17 Vacuum pump
FR1281403A (en) * 1960-12-01 1962-01-12 Thomson Houston Comp Francaise Advanced Evaporative Ionization Type Vacuum Pump System
US3149774A (en) * 1961-01-27 1964-09-22 Varian Associates Getter ion pump method and apparatus
US3107045A (en) * 1961-02-02 1963-10-15 Varian Associates Getter ion pump apparatus
DE1228750B (en) * 1961-04-01 1966-11-17 Leybolds Nachfolger E Atomizing ion getter pump
US3159332A (en) * 1961-08-14 1964-12-01 Varian Associates Methods and apparatus for enhanced sputter-ion pump operation
US3141605A (en) * 1961-08-18 1964-07-21 Nippon Electric Co Magnetron type getter ion pump
US3159333A (en) * 1961-08-21 1964-12-01 Varian Associates Permanent magnets
US3147910A (en) * 1961-08-30 1964-09-08 Varian Associates Vacuum pump apparatus
US3141986A (en) * 1961-09-18 1964-07-21 Varian Associates High vacuum sputter-ion gettering apparatus
US3233823A (en) * 1961-11-20 1966-02-08 Nippon Electric Co Electron-discharge vacuum apparatus
NL284762A (en) * 1961-11-29
US3143678A (en) * 1961-12-05 1964-08-04 Hughes Aircraft Co Vacuum ion gauge
FR80795E (en) * 1961-12-15 1963-06-14 Thomson Houston Comp Francaise Advanced Evaporative Ionization Type Vacuum Pump System
US3224664A (en) * 1962-08-08 1965-12-21 Philips Corp Ion pump
US3217974A (en) * 1962-11-23 1965-11-16 Hughes Aircraft Co Dual surface ionic pump with axial anode support
US3217973A (en) * 1962-11-23 1965-11-16 Hughes Aircraft Co Dual surface ionic pump with shielded anode support
US3197122A (en) * 1963-07-01 1965-07-27 Cons Vacuum Corp Ion pump
US3228589A (en) * 1963-10-16 1966-01-11 Gen Electric Ion pump having encapsulated internal magnet assemblies
US3368100A (en) * 1963-11-25 1968-02-06 Gen Electric Vacuum pump having a radially segmented, annular anode
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump
DE1302292B (en) * 1964-03-10 Varian Associates
US3310226A (en) * 1965-02-11 1967-03-21 Nat Res Corp Vacuum device
US3411073A (en) * 1965-07-01 1968-11-12 Gen Electric Gas detector having inlet orifice for linear operation of the detector
GB1152475A (en) * 1965-08-17 1969-05-21 Leybold Hereaus Verwaltung G M Improvements In Getter-Ion Vacuum Pumps
US3429501A (en) * 1965-08-30 1969-02-25 Bendix Corp Ion pump
FR1485659A (en) * 1966-05-09 1967-06-23 Alcatel Sa Multiple Plasma Cold Cathode Pressure Gauge
US3441839A (en) * 1966-11-22 1969-04-29 Nat Res Corp Power supply for vacuum pump with auxiliary pressure measurement function
US3449627A (en) * 1967-06-09 1969-06-10 Nat Res Corp Orbiting electron ionization pump having two anodes
US3460745A (en) * 1967-08-23 1969-08-12 Varian Associates Magnetically confined electrical discharge getter ion vacuum pump having a cathode projection extending into the anode cell
US3486213A (en) * 1968-08-27 1969-12-30 Norton Co Method of making or repairing a getter vacuum pump
US3872377A (en) * 1972-10-11 1975-03-18 Tokyo Shibaura Electric Co Cold cathode ionization gauge
US4334829A (en) * 1980-02-15 1982-06-15 Rca Corporation Sputter-ion pump for use with electron tubes having thoriated tungsten cathodes
IT1156530B (en) * 1982-09-14 1987-02-04 Varian Spa IONIC PUMP WITH CATHODE PERFECTLY STRUCTURE PARTICULARLY FOR PUMPING NOBLE GASES
IT1179833B (en) * 1984-11-28 1987-09-16 Varian Spa ELECTRONIC DEVICE FOR THE SUPPLY OF A TWO DIFFERENTIATED VOLTAGE IONIC PUMP AND FOR THE PERFECTED MEASUREMENT OF THE PRESSURE IN FORCE IN THAT PUMP
FR2580866B1 (en) * 1985-04-23 1989-01-06 Novatome ION PUMP WITH FLOW RATE
US4980609A (en) * 1988-10-12 1990-12-25 Amoco Corporation Spark gap purge system
US6004104A (en) * 1997-07-14 1999-12-21 Duniway Stockroom Corp. Cathode structure for sputter ion pump
US20040062659A1 (en) * 2002-07-12 2004-04-01 Sinha Mahadeva P. Ion pump with combined housing and cathode
US7295015B2 (en) * 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
ITMI20090402A1 (en) * 2009-03-17 2010-09-18 Getters Spa COMBINED PUMPING SYSTEM INCLUDING A GETTER PUMP AND A ION PUMP
DE102009040356A1 (en) 2009-09-05 2011-03-17 Schmidt, Linda Electrode arrangement for an ion getter pump
US8439649B2 (en) * 2009-11-02 2013-05-14 Duniway Stockroom Corp. Sputter ion pump with enhanced anode
US9484176B2 (en) * 2012-09-10 2016-11-01 Thomas Schenkel Advanced penning ion source
US9960025B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Cold-matter system having ion pump integrated with channel cell
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US9117563B2 (en) 2014-01-13 2015-08-25 Cold Quanta, Inc. Ultra-cold-matter system with thermally-isolated nested source cell
US10460917B2 (en) * 2016-05-26 2019-10-29 AOSense, Inc. Miniature ion pump
US10550829B2 (en) * 2016-09-08 2020-02-04 Edwards Vacuum Llc Ion trajectory manipulation architecture in an ion pump
US20180306175A1 (en) * 2017-04-25 2018-10-25 Edwards Vacuum Llc Magnetic focusing in an ion pump using internal ferrous materials
US10646722B2 (en) 2017-05-29 2020-05-12 Elegant Mathematics LLC Magnets for magnetic resonance applications
CN117715286A (en) * 2023-11-27 2024-03-15 中国科学院近代物理研究所 Electronic curtain accelerator and how to use it

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL50072C (en) * 1935-12-28
NL49158C (en) * 1936-05-29
US2460175A (en) * 1945-07-31 1949-01-25 Hazeltine Research Inc Ionic vacuum pump
US2554792A (en) * 1948-09-28 1951-05-29 William R Perret Pressure measuring device
US2726805A (en) * 1953-01-29 1955-12-13 Ernest O Lawrence Ion pump
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device
US2796555A (en) * 1954-06-29 1957-06-18 High Voltage Engineering Corp High-vacuum pump
US2899605A (en) * 1954-07-07 1959-08-11 Warmoltz
US2850225A (en) * 1955-11-10 1958-09-02 Wisconsin Alumni Res Found Pump

Also Published As

Publication number Publication date
FR1207893A (en) 1960-02-19
DE1098667B (en) 1961-02-02
US2993638A (en) 1961-07-25
SE183128C1 (en) 1963-04-02
GB883189A (en) 1961-11-22
CH398868A (en) 1966-03-15

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