CH379045A - Ion getter vacuum pump with glow discharge - Google Patents

Ion getter vacuum pump with glow discharge

Info

Publication number
CH379045A
CH379045A CH6184558A CH6184558A CH379045A CH 379045 A CH379045 A CH 379045A CH 6184558 A CH6184558 A CH 6184558A CH 6184558 A CH6184558 A CH 6184558A CH 379045 A CH379045 A CH 379045A
Authority
CH
Switzerland
Prior art keywords
vacuum pump
glow discharge
ion getter
getter vacuum
ion
Prior art date
Application number
CH6184558A
Other languages
German (de)
Inventor
Dana Hall Lewis
Calville Helmer John
Alto Palo
Lawrence Jepsen Robert
Original Assignee
Varian Associates
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US673816A external-priority patent/US2993638A/en
Application filed by Varian Associates filed Critical Varian Associates
Publication of CH379045A publication Critical patent/CH379045A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances
CH6184558A 1957-07-24 1958-07-16 Ion getter vacuum pump with glow discharge CH379045A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US673816A US2993638A (en) 1957-07-24 1957-07-24 Electrical vacuum pump apparatus and method
US801186A US3088657A (en) 1957-07-24 1959-03-23 Glow discharge vacuum pump apparatus

Publications (1)

Publication Number Publication Date
CH379045A true CH379045A (en) 1964-06-30

Family

ID=27101017

Family Applications (2)

Application Number Title Priority Date Filing Date
CH1397063A CH398868A (en) 1957-07-24 1958-07-16 Ion getter vacuum pump with glow discharge
CH6184558A CH379045A (en) 1957-07-24 1958-07-16 Ion getter vacuum pump with glow discharge

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CH1397063A CH398868A (en) 1957-07-24 1958-07-16 Ion getter vacuum pump with glow discharge

Country Status (6)

Country Link
US (1) US3088657A (en)
CH (2) CH398868A (en)
DE (2) DE1098667B (en)
FR (1) FR1207893A (en)
GB (3) GB883189A (en)
NL (3) NL6504257A (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3107844A (en) * 1959-11-12 1963-10-22 Ultek Corp Single cell vacuum apparatus
US3125283A (en) * 1960-03-24 1964-03-17 Vacuum pump
FR1281403A (en) * 1960-12-01 1962-01-12 Thomson Houston Comp Francaise Advanced Evaporative Ionization Type Vacuum Pump System
US3149774A (en) * 1961-01-27 1964-09-22 Varian Associates Getter ion pump method and apparatus
US3107045A (en) * 1961-02-02 1963-10-15 Varian Associates Getter ion pump apparatus
US3147910A (en) * 1961-08-30 1964-09-08 Varian Associates Vacuum pump apparatus
US3224664A (en) * 1962-08-08 1965-12-21 Philips Corp Ion pump
US3368100A (en) * 1963-11-25 1968-02-06 Gen Electric Vacuum pump having a radially segmented, annular anode
US4687417A (en) * 1985-12-19 1987-08-18 Hughes Aircraft Company High voltage feedthrough for ion pump
DE102009040356A1 (en) * 2009-09-05 2011-03-17 Schmidt, Linda Electrode arrangement for ion getter pump, has cathode plates formed in inner space, where side of electrode arrangement is designed as gas inlet opening side, and field-optimized design is formed over entire height of anode element
US9960026B1 (en) * 2013-11-11 2018-05-01 Coldquanta Inc. Ion pump with direct molecule flow channel through anode
US10550829B2 (en) * 2016-09-08 2020-02-04 Edwards Vacuum Llc Ion trajectory manipulation architecture in an ion pump
US20180306175A1 (en) * 2017-04-25 2018-10-25 Edwards Vacuum Llc Magnetic focusing in an ion pump using internal ferrous materials
CN108194314B (en) * 2017-12-31 2024-02-20 中国电子科技集团公司第十二研究所 Gas trapping vacuum pump and manufacturing method and using method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2413653A (en) * 1943-11-15 1946-12-31 Gen Motors Corp Refrigerant compressor valve arrangement
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device

Also Published As

Publication number Publication date
GB883190A (en) 1961-11-22
NL229703A (en)
NL131436C (en)
FR1207893A (en) 1960-02-19
GB942546A (en) 1963-11-27
CH398868A (en) 1966-03-15
DE1181364B (en) 1964-11-12
US3088657A (en) 1963-05-07
NL6504257A (en) 1965-06-25
GB883189A (en) 1961-11-22
DE1098667B (en) 1961-02-02

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