GB1152475A - Improvements In Getter-Ion Vacuum Pumps - Google Patents

Improvements In Getter-Ion Vacuum Pumps

Info

Publication number
GB1152475A
GB1152475A GB36706/66A GB3670666A GB1152475A GB 1152475 A GB1152475 A GB 1152475A GB 36706/66 A GB36706/66 A GB 36706/66A GB 3670666 A GB3670666 A GB 3670666A GB 1152475 A GB1152475 A GB 1152475A
Authority
GB
United Kingdom
Prior art keywords
cells
getter
pump
aug
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB36706/66A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1152475A publication Critical patent/GB1152475A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
    • H01J41/20—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes using gettering substances

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

1,152,475. Ion pumps. LEYBOLDHEREAUS - VERWALTUNG G.m.b.H. 16 Aug., 1966 [17 Aug., 1965], No. 36706/66. Heading H1D. Cells of at least two different configurations having optimum performance characteristics in different pressure ranges are combined in a multi-cell anode of a getter-ion vacuum pump to provide a high performance over a wide pressure range. Several cells of 10 mm. diameter may be arranged around each of several cells of 50 mm. diameter. Alternatively, the cells may differ in length, and may in additon be of different materials. Provision may be made for vamping the operating voltage and/or the magnetic field strength of the pump, and cells of one configuration may be rendered inactive. The cells may be exchangeable, a stock of cells of different configurations being accommodated in an evacuated magazine associated with the pump.
GB36706/66A 1965-08-17 1966-08-16 Improvements In Getter-Ion Vacuum Pumps Expired GB1152475A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEL0051403 1965-08-17

Publications (1)

Publication Number Publication Date
GB1152475A true GB1152475A (en) 1969-05-21

Family

ID=7274033

Family Applications (1)

Application Number Title Priority Date Filing Date
GB36706/66A Expired GB1152475A (en) 1965-08-17 1966-08-16 Improvements In Getter-Ion Vacuum Pumps

Country Status (2)

Country Link
US (1) US3409211A (en)
GB (1) GB1152475A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942546A (en) * 1972-10-27 1976-03-09 Continental Oil Company Corrosion monitoring and composition-analytical apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2993638A (en) * 1957-07-24 1961-07-25 Varian Associates Electrical vacuum pump apparatus and method
NL249138A (en) * 1959-03-06
US3161802A (en) * 1960-05-27 1964-12-15 Varian Associates Sputtering cathode type glow discharge device vacuum pump
NL284762A (en) * 1961-11-29
US3236442A (en) * 1964-01-20 1966-02-22 Morris Associates Ionic vacuum pump

Also Published As

Publication number Publication date
US3409211A (en) 1968-11-05

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees