GB1298940A - Improvements in or relating to ion sources - Google Patents
Improvements in or relating to ion sourcesInfo
- Publication number
- GB1298940A GB1298940A GB21462/69A GB2146269A GB1298940A GB 1298940 A GB1298940 A GB 1298940A GB 21462/69 A GB21462/69 A GB 21462/69A GB 2146269 A GB2146269 A GB 2146269A GB 1298940 A GB1298940 A GB 1298940A
- Authority
- GB
- United Kingdom
- Prior art keywords
- chamber
- ion
- plates
- filament
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Electron Tubes For Measurement (AREA)
- Electron Sources, Ion Sources (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
1298940 Ion sources ASSOCIATED ELECTRICAL INDUSTRIES Ltd 28 April 1970 [28 April 1969] 21462/69 Heading H1D An ion source comprises an ion chamber 10 in which material is ionized by means other than field ionization (e.g. by ultra-violet or other radiation, an electron beam, or as shown a thermionic filament 26), and the ions so formed are subjected to an electric field, produced by a charged tip, blade 22, wire or other sharp edge or point, and oriented to expel ions from the chamber. The chamber 10 is closed by an ion exit plate 12, and beam centring plates 14 and 15 and an ion source slit 16 are arranged along the beam path. The blade 22 extends between ion repeller plates 18 and 19. The source is mounted within an evacuated housing (not shown). A magnetic field 28 is applied along the direction of the filament 26. Alternatively U.V. or other radiation may be beamed into the chamber through parts 24 and/or a beam of electrons may be projected through the chamber in a direction perpendicular to the plane of the drawing. In alternative embodiments (Figs. 2 and 3, not shown), the plates 18 and 19 are omitted and electrons are projected into the chamber either through a port in a side wall or through the slit in the plate 12 from an external filament. The field produced by the charged tip &c. may or may not be above the strength required to produce ionization.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB21462/69A GB1298940A (en) | 1969-04-28 | 1969-04-28 | Improvements in or relating to ion sources |
DE19702019926 DE2019926A1 (en) | 1969-04-28 | 1970-04-24 | Ion source and method for rapidly ejecting ions from an ion chamber |
FR7015350A FR2040313A1 (en) | 1969-04-28 | 1970-04-27 | |
US00032324A US3731089A (en) | 1969-04-28 | 1970-04-27 | Mass spectrometer ion source having means for rapidly expelling ions from the source and method of operation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB21462/69A GB1298940A (en) | 1969-04-28 | 1969-04-28 | Improvements in or relating to ion sources |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1298940A true GB1298940A (en) | 1972-12-06 |
Family
ID=10163355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB21462/69A Expired GB1298940A (en) | 1969-04-28 | 1969-04-28 | Improvements in or relating to ion sources |
Country Status (4)
Country | Link |
---|---|
US (1) | US3731089A (en) |
DE (1) | DE2019926A1 (en) |
FR (1) | FR2040313A1 (en) |
GB (1) | GB1298940A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3817604A1 (en) * | 1987-05-27 | 1988-12-08 | Mitsubishi Electric Corp | Ion beam generator for semiconductor processing |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8703012D0 (en) * | 1987-02-10 | 1987-03-18 | Vg Instr Group | Secondary ion mass spectrometer |
DE3739253A1 (en) * | 1987-11-19 | 1989-06-01 | Max Planck Gesellschaft | DEVICE WORKING WITH CONTACT TO GENERATE A RAY OF ACCELERATED IONS |
US6218672B1 (en) * | 1998-07-24 | 2001-04-17 | Sarnoff Corporation | Ion source |
US10622200B2 (en) * | 2018-05-18 | 2020-04-14 | Perkinelmer Health Sciences Canada, Inc. | Ionization sources and systems and methods using them |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3115591A (en) * | 1959-06-22 | 1963-12-24 | Atlas Werke Ag | Ion source for mass spectrometer |
US3247373A (en) * | 1962-12-18 | 1966-04-19 | Gca Corp | Mass spectrometer leak detector with means for controlling the ion source output |
US3356843A (en) * | 1965-02-01 | 1967-12-05 | Gen Electric | Mass spectrometer electron beam ion source having means for focusing the electron beam |
-
1969
- 1969-04-28 GB GB21462/69A patent/GB1298940A/en not_active Expired
-
1970
- 1970-04-24 DE DE19702019926 patent/DE2019926A1/en active Pending
- 1970-04-27 US US00032324A patent/US3731089A/en not_active Expired - Lifetime
- 1970-04-27 FR FR7015350A patent/FR2040313A1/fr not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3817604A1 (en) * | 1987-05-27 | 1988-12-08 | Mitsubishi Electric Corp | Ion beam generator for semiconductor processing |
DE3817604C2 (en) * | 1987-05-27 | 2000-05-18 | Mitsubishi Electric Corp | Ion beam generator |
Also Published As
Publication number | Publication date |
---|---|
FR2040313A1 (en) | 1971-01-22 |
US3731089A (en) | 1973-05-01 |
DE2019926A1 (en) | 1970-11-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PLNP | Patent lapsed through nonpayment of renewal fees |